The MSA-600-S Micro System Analyze is a specialized optical measurement workstation designed for 8 GHz frequency vibration analysis and surface characterization. The MSA-600-S system extends the capability for automated scan measurement and visualization of operational deflection shapes to super high frequencies (SHF). This is an indispensable capability for measuring displacement response, mapping deformations, validating FE simulations, and determining leakage to substrates on GHz MEMS (micro electro-mechanical systems). The high-performance laser Doppler vibrometer delivers fast, real-time response measurement with sub-pm displacement resolution. Additional white-light interferometry provides millions of 3D surface data in seconds. Use the MSA-600-S for developing GHz devices, for quality control on behalf of form parameter evaluation, device performance and reliability testing. This enables testing of high frequency devices such as FBAR (film bulk acoustic resonators), BAW (bulk acoustic wave) filters and SAW (surface acoustic wave) devices. ■ Specialized 8 GHz optical measurement workstation ■ Real-time response measurements without post-processing ■ Unparalleled sub-pm displacement resolution ■ Fast measurement and visualization of deflection shapes ■ Straightforward and intuitive operation ■ Automated system for easy integration into probe stations Preliminary datasheet

Values in brackets apply to the 4 channel data acquisition mode Time domain acquisition and animation restricted to frequencies up to 600 MHz Maximum displacement amplitude < 10 nm The noise-limited resolution is defined as the signal amplitude (rms) at a signal-to-noise ratio of 0 dB and a spectral resolution of 1 Hz. The attainable resolution is frequency-dependent. The specified values are average values across the given bandwidth.

General specifications

1 Requires portal stand with automatic z-stage.

Please refer to the document "Accessories for stand-based instruments” Compliance with standards

OM_DS_MSA-600-XU_E_52127 2025/05 - Technical specifications are subject to change without notice Shaping the future since 1967 High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn