This document is subject to electronic version control - confirm version status before using. This specification covers WMo49 sputtering targets. The WMo49 sputtering targets are produced according to Plansee SE drawings with the dimensions, tolerances and surface finish specified in these construction drawings. The target position on the backing plate is defined as follows: • Long direction = actual measurement ± 0,5 mm from the backing plate end where the water cooling ports are located. Actual measurement is defined as distance from new backing plate end where the water cooling ports are located to the edge of the target. • Short direction = actual measurement ± 0,5 mm from both backing plate ends. Actual measurement is defined as distance from the lateral end of the backing plate to the lateral edge of the target. The warp after bonding will be less than 1,0 mm on plus side and less than 1,0 mm on minus side for targets smaller than 800 mm backing plate length. The warp after bonding will be less than 1,0 mm on plus side and less than 2,0 mm on minus side for 800 to 1600 mm backing plate length target. The warp after bonding will be less than 1,5 mm on plus side and less than 3,0 mm on minus side for 1600 to 3000 mm backing plate length target. Target height from backing plate surface will be defined by H in the following equation (Target thickness) < H < (Target thickness + 1,5 mm) Guaranteed density: > 99,5 % of theoretical density Bonding ratio: a) A > 95,0 % (the largest single void will be less than 36 cm2) a) optional for bonded version Appearance: According to the drawing the specified areas of the target and / or the backing The targets will have no cracks, abrasions and discoloration determined by macroscopic visual inspection. Public Template: QM1 / HPM-020-TP-010 / part 100 / Version 09

WMo49 Sputtering Targets PS – PRODUCTSPECIFICATION This document is subject to electronic version control – confirm version status before using. Main and minor components Mo W Purity Impurities Content [%] 49,2 ± 1,1 wt.% 65 ± 1,0 at.% 50,8 ± 1,1 wt.% 35 ± 1,0 at.% 99,97 wt.% b) Max. values [µg/g] c) Guaranteed (e.g. PBB, PBDE, PFOS, PFOA) a) EU-directives 2015/863/EU, 2011/65/EU and 2000/53/EC b) Metallic purity c) μg/g ≙ ppm (mass fraction) **) The presence of Cr (VI), In and organic impurities can definitely be excluded because of the production process (multiple heat treatments at temperatures...

This document is subject to electronic version control - confirm version status before using. Each package will be provided with a label with the following information: The targets must be kept in a dry place and protected from mechanical damage. The shelf time for the vacuum-packed targets shall be 6 months from the shipping date under the following storage conditions a). However, the customer is recommended to use the targets within 3 months. a) Storage conditions: temperature: 22 ± 4 °C; relative humidity of the air: < 50 %; atmospheric pressure: approx. 1000 mbar. All targets manufactured...

WMo49 Sputtering TargetsPS - PRODUCTSPECIFICATION This document is subject to electronic version control - confirm version status before using. ■ type of certificate (2.2 or 3.1 according to EN 10204:2004) ■ bonded version (yes/no) ■ For special packing: specification of packaging For further information on our delivery possibilities, please look onto our http://www.plansee.com The standards applied for the test methods are listed in the Plansee standard infobase and are made available upon request. Changes to last version(s) Vs Valid from Replacing Prepared SeeSAP-DMS SeeSAP-DMS Reason for change...