MoOxTa14 Sputtering Targets PS – PRODUCTSPECIFICATION This document is subject to electronic version control – confirm version status before using. This specification covers MoOxTa14 sputtering targets. The MoOxTa14 sputtering targets are produced according to Plansee SE drawings with the dimensions, tolerances and surface finish specified in these construction drawings. Bonding position The target position on the backing plate is defined as follows: Long direction = actual measurement ± 0,5 mm from the backing plate end where the water cooling ports are located. Actual measurement is defined as distance from new backing plate end where the water cooling ports are located to the edge of the target. Short direction = actual measurement ± 0,5 mm from both backing plate ends. Actual measurement is defined as distance from the lateral end of the backing plate to the lateral edge of the target. The warp after bonding will be less than 1,0 mm on plus side and less than 1,0 mm on minus side for targets smaller than 800 mm backing plate length. The warp after bonding will be less than 1,0 mm on plus side and less than 2,0 mm on minus side for 800 to 1600 mm backing plate length target. The warp after bonding will be less than 1,5 mm on plus side and less than 3,0 mm on minus side for 1600 to 3000 mm backing plate length target. Target height Target height from backing plate surface will be defined by H in the following equation (Target thickness) < H < (Target thickness + 1,5 mm) Physical and mechanical product properties Guaranteed Density: Surface condition According to the drawing the specified areas of the target and / or the backing plate are blasted. The Targets will have no cracks, abrasions and discoloration. Inhomogeneity and discolouration of the surface can occur and are related to the different phase alignment and the resulting interference. Chemical composition Main and minor components

MoOxTa14 Sputtering Targets PS – PRODUCTSPECIFICATION This document is subject to electronic version control – confirm version status before using. balance 13,8 ± 1,0 wt.% Min. 99,9 % Max. values [µg/g] b) Guaranteed a) EU-directives 2015/863/EU, 2011/65/EU and 2000/53/EC b) μg/g ≙ ppm (mass fraction) c) Initial value / first up Remarks: The specified physical and chemical characteristics are disclosed not regarding measurement accuracy.

This document is subject to electronic version control - confirm version status before using. 4.1 Packaging, labelling and storage Standard individual packing: The target is vacuum-sealed in a vinyl pack, which is put into a transportation box. Each package will be provided with a label with the following information: The targets must be kept in a dry place and protected from mechanical damage. The shelf time for the vacuum-packed targets shall be 6 months from the shipping date under the following storage conditions a). However, the customer is recommended to use the targets within 3 months....

MoOxTa14 Sputtering Targets PS - PRODUCTSPECIFICATION This document is subject to electronic version control - confirm version status before using. Changes to last version(s) Vs Valid from Replacing Reason for change / Change description Appendix 1General product information for MoOxTa14 Targets The following physical data are for reference only and no guarantee values. Public Template: QM1 / HPM-020-TP-010 / part 100 / Version 09