Monolithic Rotary Sputtering Targets
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Maximum Productivity Monolithic Rotary Sputtering Targets As the leading supplier of planar and rotary sputtering targets for thin-film solar cells and flat panel displays, PLANSEE provides innovative solutions for optimum sputtering results and an efficient coating process. The newest development: PLANSEE monolithic rotary targets made of 100 % molybdenum have proven their efficiency to deposit thin films for the solar cell production. Their design without backing tube pays off. Field tests with different forms and dimensions show the following advantages: - Fully dense material (leak-proof) because of special deformation process - Highest mechanical strength - Improved thermal conductivity for a faster coating process - Highest usage rates of 75 % and more - Maximum cost efficiency Monolithic PLANSEE rotary target before sputtering Monolithic PLANSEE rotary target after the sputtering process

Fully dense materials for maximum solar cell efficiency PLANSEE has a proven track-record and more than 25 years Properties of molybdenum monolithic rotary sputtering targets experience in physical vapour deposition (PVD). With a broad range of R&D capabilities we are able to optimize material properties according to customer requirements. Our sputtering targets can be used in all commercially available PVD equipments. Density (at 20°C) Purity (without tungsten) Thermal conductivity (at 20°C) Due to its special deformation processes PLANSEE offers fully densified material that stands out...