Monolithic Rotary Sputtering Targets

Product catalog summary

Overview
PLANSEE is a leading supplier of planar and rotary sputtering targets used in thin-film solar cells and flat panel displays. Their innovative solutions aim to optimize sputtering results and enhance the efficiency of the coating process.

Monolithic Rotary Targets
The latest development from PLANSEE is the monolithic rotary targets made entirely of molybdenum. These targets are designed without a backing tube, offering several advantages:

Fully dense material due to a special deformation process, ensuring leak-proof performance.
Highest mechanical strength and improved thermal conductivity, leading to a faster coating process.
Usage rates exceeding 75%, contributing to maximum cost efficiency.

Material Properties
PLANSEE's molybdenum targets are characterized by:

Density of 99.8% or more at 20°C.
Purity level of 3N7 (excluding tungsten).
Thermal conductivity of 140 W/(m.K) at 20°C.
Capability to handle sputtering DC power density up to 30 kW/m.
Target lengths up to 4000 mm.
Fine-grained, uniform microstructure.

Applications
These targets are suitable for use in thin-film solar cells and flat panel displays, compatible with all commercially available PVD equipment.

Productivity and Efficiency
Monolithic rotary targets enhance productivity and efficiency by allowing higher power operations (up to 30 kW/m) without a low-melting bonding layer, ensuring the highest heat transfer rates. They also offer higher material utilization compared to planar targets, maintaining stability even after more than 75% utilization.

Cost Efficiency
The manufacturing process of monolithic targets is streamlined, eliminating the need for bonding, which maximizes cost efficiency for customers.

Catalog excerpts

Maximum Productivity Monolithic Rotary Sputtering Targets As the leading supplier of planar and rotary sputtering targets for thin-film solar cells and flat panel displays, PLANSEE provides innovative solutions for optimum sputtering results and an efficient coating process. The newest development: PLANSEE monolithic rotary targets made of 100 % molybdenum have proven their efficiency to deposit thin films for the solar cell production. Their design without backing tube pays off. Field tests with different forms and dimensions show the following advantages: - Fully dense material (leak-proof) because of special deformation process - Highest mechanical strength - Improved thermal conductivity for a faster coating process - Highest usage rates of 75 % and more - Maximum cost efficiency Monolithic PLANSEE rotary target before sputtering Monolithic PLANSEE rotary target after the sputtering process

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Fully dense materials for maximum solar cell efficiency PLANSEE has a proven track-record and more than 25 years Properties of molybdenum monolithic rotary sputtering targets experience in physical vapour deposition (PVD). With a broad range of R&D capabilities we are able to optimize material properties according to customer requirements. Our sputtering targets can be used in all commercially available PVD equipments. Density (at 20°C) Purity (without tungsten) Thermal conductivity (at 20°C) Due to its special deformation processes PLANSEE offers fully densified material that stands out for...

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