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Molybdenum Rotary Sputtering Targets

Molybdenum Rotary Sputtering Targets

Molybdenum Rotary Sputtering Targets

Product catalog summary
Overview: PLANSEE offers high-performance molybdenum rotary sputtering targets designed to enhance the performance of thin film absorber layers. These targets are optimized for efficient coating processes and superior sputtering results, applicable in various fields such as flat panel displays, photovoltaics, and large area coatings.
Application Fields:
  • Back contact in thin film solar cells
  • Electrode material for TFT-LCD metallization
  • Adhesion and barrier layer for Al- and Cu-metallization for TFT-LCD
Properties:
  • Density: > 99.8% of theoretical density at 20°C
  • Purity: > 99.97 wt% (excluding tungsten)
  • Thermal Conductivity: 140 W/(m.K) at 20°C
  • Target Material Thickness: Typically 10 to 15 mm
  • Target Length: Monolithic or bonded on backing tube up to 4 m
  • Microstructure: Fine-grained, uniform, stress-relieved
Advantages:
  • Fully dense material due to special deformation processes
  • Higher usage rates compared to planar targets
  • High thermal conductivity
Material Quality:
  • Guaranteed purity of more than 99.97% (without tungsten)
  • Excellent thermal heat transfer
  • Low thin film resistivity (typical: 15 µOhm.cm)
  • High mechanical strength
  • 3.1 certificate (EN 10204) for critical elements
  • Trace and ultra-trace analysis using GDMS, ICP-OES, AAS, LECO
  • Microstructural analysis via metallography (Light optical microscopy, SEM)
  • Ultrasonic testing
Performance:
  • Monolithic targets allow high heat transfer rates and can operate with up to 30 kW/m power.
  • Rotary targets offer double or triple the material utilization of planar targets, maintaining stability even after more than 75% utilization.
Product Specifications:
  • Material thickness up to 20 mm
  • Bonding on stainless steel or titanium backing tube
  • Monolithic or bonded design up to 4 m
Contact Information: PLANSEE SE, E-mail: [email protected], Website: www.plansee.com
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Catalog excerpts

Molybdenum Rotary Sputtering Targets-1

High Performance Molybdenum Rotary Sputtering Targets PLANSEE offers sputtering targets that improve the performance of thin film absorber layers. Our molybdenum rotary sputtering targets combine optimized target geometries and material properties for an efficient coating process and the best sputtering results. They are used in a wide range of applications, such as flat panel displays, photovoltaics and large area coatings. With our materials and application expertise and state of the art processing technologies we are the leading supplier for CIGS producers and major OEMs, including Von Ardenne, Leybold and Applied Materials. Application fields: - Back contact in thin film solar cells - Fully dense material because of special - Electrode material for TFT-LCD metallization deformation processes - Adhesion and barrier layer for Al- and Cu-metallization - Higher usage rates than planar targets - High thermal conductivity Properties of molybdenum rotary sputtering targets Density (at 20°C) Purity  (without tungsten) Target material thickness Target length Microstructure typical: 10 to 15 mm monolithic or bonded on backing tube up to 4 m fine grained, uniform (stress relieved)

 Open the catalog to page 1
Molybdenum Rotary Sputtering Targets-2

High usage rates Rotary targets provide double or even triple the material utilization of planar targets. Rotary monolithic versions hold the record: they maintain their stability even after target utilization of more than 75 %. High thermal conductivity Monolithic targets contribute to greater productivity and improved efficiency for a faster coating process. Without a low-melting bonding layer, monolithic targets allow the highest heat transfer rates. Monolithic rotary targets can be run with up to 30 kW/m Thin Film Resistivity [µΩcm] Dynamic deposition rate [nm m/min] Mo cylindrical cathode:...

 Open the catalog to page 2

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