PX 200 • PX 300 • PX 400 compact 1-axis translation stage Concept: The systems of the series PX 200, PX 300 and PX 400 are ideally suited for nm-precise positioning of optic components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies and quality assurance as well as microbiology. The series PX consist of piezo electrical actuator in stage design with a solid top and bottom plate for easily integration in optical setups. The monolithic flexure hinges design offers high precision motion range, high stiffness and in due of this excellent dynamical performance for extremely fast and accurate positioning tasks Specials: The systems of this series are available in vacuum and cryogenic temperature configurations. As an option they may come equipped with strain gage or capacitive position sensors, depending on the system configuration, to achieve very accurate repeatability in the low nanometer range. Interfaces: The elements of the series PX 200 up to PX 400 are actuators integrated with an inner lever transmission in housing. Since the lever mechanism works in both directions, pulling forces between bottom and top plate need to be avoided, as they could damage the stage. The stage is fixed to a base plate. Components can be mounted on the top plate by two threaded diagonal holes and can be accurately affixed using the precise pin holes. Product highlights: • • • • • • accurate parallel motion up to 400µm motion range without mechanical play easily combined with other piezo electrical systems precison pin holes for accurate adjustment high dynamic range fiber positioning beam alignment semiconductor micro manipulation

PX 200 • PX 300 • PX 400 linear positioning stage resolution (open/closed loop)*** resonant frequency (unloaded) stiffness voltage range connector (additional variation please see table below) **** LEMO 0S.302 / Sub-D 15 (only with part number suffix ”D”) cable length min. bend radius of cable temperature range aluminum/stainless steel dimensions (LxWxH) linear positioning stage integrated measurement system strain gage strain gage strain gage motion in closed loop (±0.2%)* resolution (open/closed loop)*** connector voltage connector feedback sensor (please see table above) LEMO.0S.304 OR ODU...

typical value measured with NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier ) typical value for small electrical field strength the resolution is only limited by the noise of the power amplifier and metrology examples of additional connector variations depending on stage configuration: product name PX 200 CAP Digital description Version for digital controller series d-Drive and 30DV50 in combination with additional functionalities: Interchangeability, ASI, ASC Version with sensor pre-amplifier for the use with „CLE” amplifier units and with the additional functionalities: Interchangeability,...