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TRITOR 101 and 102

TRITOR 101 and 102
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TRITOR 101 and TRITOR 102 3D piezo positioning stages with central opening Concept: The piezo 3D stage series TRITOR 101 and 102 are extremely compact and offer motions of up to 100 µm in XYZ direction. The unique cube like mechanical design allows motion without play. They are well suited for many applications reaching from optical research to OEM systems. Probe alignment in microscopes usually requires an open center space (e. g. for the passage of light). The 3D piezo stage models TRITOR 101 and 102 with their central apertures of 30 mm and 40 mm were developed considering such applications. High stiffness, in combination with excellent straightness of motion, make the TRITOR series ideal for high precision in the nano meter range for optics, laser–technique, and any other type of high resolution positioning application. Specials: Piezo electrical actuators can act much faster, and with a higher accuracy to a signal change, than any motorized drive available. Each axis can be controlled separately in closed loop mode. An integrated sensor system is an available option that guarantees accuracy in the nanometer range. The simultaneous motion, available in XYZ directions, offers a large degree of freedom during use. All stages of the TRITOR series can be made with special materials for extraordinary applications such as vacuum or cryogenic applications. Assembling: The stages are designed to be mounted, by the use of two through holes located diagonal from each other. Components can be mounted on the top plate by two diagonal tapped holes and can be accurately located by using the precision pin holes. Tel: +49 (3641) 66880 • U.S. (+1) 508 634 6688 info@piezojena.com • http://www.piezosystem.com TRITOR_101-102_ds_Rev02_2014_07_31.doc Product highlights: 3D nano positioning stage central opening (up to 40 mm) XYZ motion range 100 µm optional integrated feedback sensors motion without mechanical play highest positioning resolution stage design for microscopy platforms high resonant frequency precise for line scanning application AFM and Microscopy Micromanipulation Cantilever adjustment Probe Scanners Wafer stepper and lithographic

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TRITOR 101 and TRITOR 102 Technical data: series TRITOR 101 (opening Ø 30 mm) motion in open loop (±10%)* motion in closed loop * electrical capacitance per axis (±20%) integrated measurement system stiffness (X/Y/Z) max. force generation (X/Y/Z) wire bending radius cable length stainless steel/aluminum dimensions (LxWxH) series TRITOR 102 (opening Ø 40 mm) motion in open loop (±10%)* motion in closed loop * electrical capacitance per axis (±20%) integrated measurement system stiffness x/y/z max. force generation x/y/z push cable length wire bending radius stainless steel/aluminum...

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TRITOR 101 and TRITOR 102 Types of connectors: Product name TRITOR 101 Digital TRITOR 101 SG Digital TRITOR 101 CAP Digital TRITOR 102 Digital Version for digital controller series d–Drive and NV40/3 controller in combination with additional functionalities: Interchange ability, ASI and ASC T–405–06 D plug voltage: LEMO 0S.302 TRITOR 101 SG Extern TRITOR 102 SG Extern TRITOR 101 CAP Extern Version with sensor pre–amplifier for the use of additional functionalities: Interchange ability, ASI plug sensor CAP: LEMO 0S.650 TRITOR 101 plug voltage : LEMO 0S.302 TRITOR 101 SG TRITRO 101 CAP TRITOR...

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