Triple-Beam Plane-Mirror Interferometer SP-TR Series

Design and Operation Our triple-beam interferometers combine three interferometers into a single unit and thus allow making simultaneous, nanometer-precision, triaxial length measurements. They are intended for incorporation into customer supplied systems. Angles may be determined with high precisions from the differences between pairs of length measurements and the respective beam separations involved. The dynamic ranges for pitch and yaw measurements are approximately 1.5 minutes of arc. A HeNe laser emitting an ultrastable wavelength supplies all three interferometers so that all three length...