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SP-TR Series

Product catalog summary

Overview: The SP-TR Series Triple-Beam Plane-Mirror Interferometer is designed for ultraprecise triaxial length and angle measurements. It integrates three interferometers into a single unit, allowing simultaneous measurements with nanometer precision.

Major Performance Features:

Simultaneous triaxial length and angle measurements, including pitch and yaw.
Single laser source for all measuring arms, ensuring consistent reference length.
Factory-calibrated beam separations.
Constructed from materials like aluminum, stainless steel, or invar.
Applicable for calibrating metrological equipment and machine tools.
Capable of differential measurements and extended angular measurements on special order.

Technical Specifications:

Models: SP 120 TR and SP 2000 TR.
Length measuring range: 100 mm (SP 120 TR) and 2000 mm (SP 2000 TR).
Resolution: 0.1 nm for length, 0.002 arcsec for angles.
Laser: HeNe with a wavelength of 632.8 nm and high frequency stability.
Operating temperature: 15°C to 30°C.
Interfaces: RS232C, USB, and optional digital/analog signals.
Dimensions and mass: Sensor head (142 x 102 x 50 mm, 2300 g), Electronics unit (450 x 400 x 150 mm, 9500 g).
Laser safety class: 2M / II according to EN 60825-1 / ANSI Z136.1.

Applications: The interferometers are suitable for integration into customer systems, providing high precision in triaxial length and angle measurements. They are particularly useful in environments requiring compensation for environmental influences, achieved through laser wavelength correction.

Operating Principle: The system uses a HeNe laser to supply a stable wavelength to all three interferometers. The moving mirrors' motions are converted into signals processed by an electronic unit. A PC with custom software manages the electronic modules and displays results.

Catalog excerpts

Triple-Beam Plane-Mirror Interferometer SP-TR Series

Open the catalog to page 1

Design and Operation Our triple-beam interferometers combine three interferometers into a single unit and thus allow making simultaneous, nanometer-precision, triaxial length measurements. They are intended for incorporation into customer supplied systems. Angles may be determined with high precisions from the differences between pairs of length measurements and the respective beam separations involved. The dynamic ranges for pitch and yaw measurements are approximately 1.5 minutes of arc. A HeNe laser emitting an ultrastable wavelength supplies all three interferometers so that all three length...

Open the catalog to page 2

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