Double-Beam Plane-Mirror Interferometer SP-DS Series

Design and Operation Double-beam plane-mirror interferometers of the SP-DS series allow a wide variety of applications as OEM measuring systems or standalone units. Two parallel measuring beams are used to acquire two length values independently of each other and with maximal resolution and precision. Difference values or angle values may be calculated from this and the factory-calibrated beam spacing. The single-beam measuring principle applied to every measuring beam allows measuring set-ups in compliance with the Abbe princple which avoids first-order measurement errors. Major Performance...