Calibration Laser Interferometer

Major Performance Features The measurement and calbration interferometers SP 15000 C with a measuring range of at least 15 m are designed for high-precision length, angle and straightness measurements on positioning axes. A synchronous, continuous 5 DOF-measurement is possible. The horizontal and vertical components of axis straightness are measured by a rotatable optics. The measuring reflector is based on a combination of hollow reflectors and a rotatable Wollaston prism. Other accessories are the straightness mirror and a 90° beam deflection. Calibration software according to the currently...