nanoSXY 120 Ultra fast XY piezo positioning stage Positionierer The nanoSXY 120 offers a long travel scanning range, combined with a central aperture of 12.5 mm in a compact design. Dynamic performance with a high load capacity, supreme stiffness and a high resonant frequency are major advantages of the nanoSXY 120. The nanoSXY 120 is also available Image: nanoSXY 120, vacuum version with a capacitive measurement system. The FEA designed actuating system based on flexure hinges guarantees excellent guidance accuracy without parasitic motion. The durability of the nanoSXY 120 makes this series Product highlights: of stages an excellent choice for permanent use in industrial applications. Specials: The bi-directional gear design makes the system very robust and makes it non-sensitive against external forces. Vacuum and cryogenic versions are available on travel range 120/100 µm open/closed sub-nm resolution excellent guidance accuracy high Z-axis stiffness compact design Application examples: nano positioning scanning microscopy super invar, aluminum or titanium. demand as well as body material variations of invar, The nanoSXY 120 can easily be fixed via four rectangular arranged through holes into any application or mechanical setup. cryogenic version vacuum version special material

nanoSXY 120 Technical data Unit motion open loop (±10 %)* motion closed loop (±0.2 %)* open loop*** closed loop*** central aperture dimensions w x h x d voltage range connector weight typical value measured with 30V300 nanoX amplifier typical value for small signal electrical field strength The resolution is only limited by the noise of the power amplifier and metrology.