nanoSX 400 High speed piezo translation stages Positionierer The nanoSX 400 translation stage offers a large travel range, a central aperture and temperature compensation in a compact design. A high stiffness and trajectory trueness even at higher loads are major advantages compared to competitive systems available on the market. Vacuum and cryogenic versions are available on demand as well as body material variations of invar, super invar, aluminum or titanium. Product highlights: Specials: The nanoSX 400 systems can be easily combined to a system with a longer travel range or to a two axes system. For more information please contact our staff. An optional external sensor preamplifier (version “EXTERN”/“DIGITAL”) cable length. travel range 450/400 µm open/closed loop sub-nm resolution high load capability Application examples: nano positioning The raster tapped and thru holes allow easy integration of the nanoSX 400 into any application surface analysis cryogenic temperatures vacuum version special materials

nanoSX 400 Technical data nanoSX 400 series part number axis motion open loop ±10 %* motion closed loop ±0.2 %* capacitance ±20 %** feedback sensor resolution open loop*** resolution closed loop*** typ. repeatability typ. nonlinearity resonant frequency additional load 50 g additional load 100 g additional load 300 g stiffness (X/Y/Z) max. push/pull force max. load tilt voltage range voltage connector sensor material dimensions (w x h x d) central aperture weight typical value measured with 30V300 nanoX amplifier typical value for small electrical field strength The resolution is only limited...