PIEZO ACTUATORS Stack Type Actuators Series P and PA Product Features P (without preload) ■■ motion up to 82 μm (larger motions on request) without preload micro positioning laser tuning semiconductors Different P-Actuators The series P actuators are based on stack type actuators covered with stainless steel housing. The top and bottom plates are epoxied and eliminate technical play. The P se- ries actuators are not preloaded. Therefore they can’t withstand tensile force and should not be driven dynamically. But they are able to withstand pressure forces. Technical Data series P blocking force More P-elements? www.piezosystem.com/p Product Features PA (preloaded) ■■ excellent dynamic properties due to high resonant frequencies integrated mechanical preload optics adjustment nano positioning 30V300 for high dynamic applications PA 36/14 of their ability to generate large forces. Also they can be subjected to high mass loading. The PA series actuators are based on stack type actuators using multilayer technology. They are particularly useful for machine tools and dynamic scanning systems because Technical Data series PA resonant frequency blocking force More PA-elements? www.piezosystem.com/pa PA 140/14 145 0.29 3 850 150 ol – open loop, cl – closed loop Also available with integrated measurement system, as vacuum or cryogenic version. longer versions available on request

PIEZO ACTUATORS Stack Type Actuators Series PHL and PAHL Product Features PHL (without preload) ■■ ■■ ■■ high-load actuator without preload motion up to 103 μm use under static conditions micro-positioning of heavy loads laser and mirror movement PHL 60/20 Due to their high blocking forces (up to 3500 N), the stack type actuators series PHL are ideally suited for applications in machine industry. The actuators provide response times in the millisecond range with sub-nm resolution. Technical Data series PHL blocking force dimensions Ød x l More PHL-elements? www.piezosystem.com/phl Product Features...

PIEZO ACTUATORS Stack Type Actuators Series N Stack type multilayer actuators without housing for high accuracy under high load environmental conditions Product Features (without preload) ■■ PZT multilayer stack type actuators without housing without preload motion up to 123 μm high stiffness up to 250 N/μm unlimited resolution fiber stretching and modulation micro-manipulation mirror tilt & tip different sizes of N stacks for more than 20 years in a vast number of applications in the fields of nano metrology, semiconductor, material sciences, scanning applications and much more. Their high precise...

PIEZO ACTUATORS Ring Actuators Series R/RA The free inside diameter makes bare and housed ring actuators suitable for all kind of optical applications R actuators: without preload RA actuators with preload motion up to 50 µm free inside diameter (9 mm up to 14 mm) sub nm-resolution blocking force up to 4000 N µs response time flexible epoxy insulation micro positioning laser beam steering scanning systems for atomic force microscopes piezo electrical pumps fiber positioning laser tuning doubled extension and a higher stiffness (up to 330 N/µm). The ring actuators of the series RA are available...

PIEZO ACTUATORS Stack Type Actuators Series PA/T and P/S Product Features PA/T (preloaded) preloaded stack type actuator with outside threading for easy system integration vacuum and cryogenic temperature versions available Recommended Controller mirror adjustment automation PA 50/T14 M14 outside threading that can be used to mount the actuator and lock in its position precisely. The series PA/T, based on stack type actuators in multilayer design, is mechanically preloaded what makes it perfectly suited for dynamic applications. These actuators have a Technical Data series PA/T resonant frequency...

PIEZO ACTUATORS Compact 1-Axis Translation Stages Series PU and PX Product Features PU high mechanical stability due to high stiffness accurate parallel motion from parallelogram design Recommended Controller universal applications for 1D, 2D and 3D systems automation The series PU is constructed from a single metallic part which includes the flexure guiding system. Actuators can be used in combination to build a 2D or 3D stage. These systems are able to generate single axis motion of 40 to 100 micrometers and the internal preload enables them to be used for dynamic applications. Technical Data...

PIEZO ACTUATORS Long Distance Linear Actuators PX Product Features PX 500 ■■ ■■ ■■ travel range: 500 micrometers integrated preload for dynamic use OEM module with small dimensions Recommended Controller scanning systems precision engineering automation PX 500 The linear actuator PX 500 moves precisely and incredibly fast. High frequencies and long travel can also be reached. Due to its compact design it can easily be integrated for OEM applications. The positioners are ideally suited for micro positioning of optical components such as mirrors and laser diodes or for opening and closing micro...

PIEZO ACTUATORS Compact 1-Axis Translation Stages Series PZ and PZ OEM Product Features PZ ■■ ■■ motion up to 700 μm PZ 700 with inside aperture of up to 66 x 66 mm Recommended Controller fiber positioning laser optics scanning systems PZ 700 The series PZ stages are ideally suited for nm-precise positioning of optic components; such as mirrors and laser diodes or adjustment in semiconductor technologies. They are also available in vacuum or cryogenic temperature configurations. Technical Data series PZ max. push/ pull force dimensions lxwxh More PZ-elements? www.piezosystem.com/pz resonant frequency...

PIEZO ACTUATORS High Speed Piezo Translation Stages nanoX Product Features nanoX ■■ ■■ ■■ ■■ linear stroke up to 480 micrometers excellent guidance accuracy up to 5 N stiffness in z-axis high mass loads Recommended Controller machine tools life science nanoX 200 The nanoX series offers fast and high dynamic performance due to the exceptional bidirectional lever trans- mission design. For optical laser applications the systems offer a free aperture of 3mm. Technical Data series nanoX motion open loop (±10%) resolution open loop dimensions l x w x h series nanoX µm nm nanoX 200 x 240 0.4 nanoX...