series N Stack type actuators without casing Concept: PZT multilayer stack type actuators are made for industrial applications. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. The flexible polymer coating material gives the PZT actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. These PZT multilayer stack type actuators have been successfully working for more than 15 years Product highlights: in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences PZT multilayer stack without housing without pre-load Specials: PZT multilayer stack can be used in cryogenic applications down to a few Kelvin. They can also motion up to 123µm high stiffness up to 250N/µm flexible mounting be used in vacuum atmosphere conditions as well. unlimited resolution The Curie temperature for baking is 150°C. flexible epoxy insulation to guarantee Mounting: It is rather important, not to subject the actuator tip to non-axial forces during the manufacturing process and use. To assist the mounting of the ceramic, ball tip end plates and flat tungsten carbide endplates are available in different sizes. The standard cable length is 100mm. As an option, flat tungsten carbide or ball tip end plates are available. The PZT multilayer stacks are not pre-loaded. long life Applications: positioning application demanding high accuracy under high load environment conditions, long lifetime, permanent movement in industrial applications

blocking force operating voltage blocking force operating voltage series N /S5 part no.: motion (±10%)* operating voltage blocking force motion (±10%)* capacitance (±20%)** resolution*** blocking force operating voltage hight H mm 14 14 14 * typical value measured with NV 40/3 ** typical value for small signal strength 14 14 *** limited by signal noise only

series N Technical details series N – round shape size stack type actuator top and bottom plate: round ceramics (Al2O3, diameter 5mm) isolation by thermal shrinking tube, resulting overall diameter less then 6mm series N – rectangular shape size stack type actuator: epoxy isolation of the stack itself additional isolation by thermal shrinking tube (also for fastening the cables) outlet of the cable about 5mm below the end of the stack standard version without top and plates further options: -different top/end plates available (please see table below) -vacuum version -cryogenic temperature version...