Piezo actuator with high resonant frequency PU 65 HR
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Piezo actuator with high resonant frequency PU 65 HR - 1

PU 65 HR Compact 1-axis translation stages Concept: PU translators consist of a single metallic part which includes the flexure guiding system. This design means that PU translation stages show excellent mechanical stability and, because they are pre-loaded, can work dynamically. The FEA modeled flexures guarantee zero friction and high robustness. These actuators can support high loads and generate single axis motion of 40 to 100 microns. They are easily adaptable because they can be mounted both horizontally and vertically. The rugged design makes the PU series well suited for all kinds of industrial applications where reliable sub-nanometer accuracy is needed. A special translator, the PU 65 HR, has been optimized for a high resonant frequency which is ideal for scanning applications. Specials: The systems may be specially prepared for vacuum and/or cryogenic applications. Other materials, such as nonmagnetic stainless steel, anodized aluminum, or titanium, are also available. Interfaces: The elements of the PU series consist of one monolithic element. The direction of motion is shown in the drawings. Please note that there must be a space between the translator and the plate to which it is fixed, otherwise movement may be blocked and not parallel. Precision pin holes provide the means for very accurate mounting of the PU translators. The PU series can be loaded with tensile forces defined by the specified pull force values for each element. Product highlights: high mechanical stability because of high stiffness accurate parallel motion by parallelogram design motion without mechanical play high resolution in nm and sub-nm range motion up to 65 µm integrated lever transmission precision pin holes for accurate adjustment Applications: scanning and vibration control mechanical engineering, precision automation

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Piezo actuator with high resonant frequency PU 65 HR - 2

PU 65 HR Technical data: PU series motion in open loop (±10%)* resolution in open loop*** resonant frequency stiffness max. push force voltage range cable length min. bend radius of cable material dimensions (LxWxH) weight typical value measured with NV 40/3 controller typical value for small electrical field strength the resolution is only limited by the noise of the power amplifier and metrology Rights reserved to change specifications as progress occurs without notice! Tel: +49 (3641) 66880 • U.S. (+1) 508 634 6688 info@piezojena.com • http://www.piezosystem.com...

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