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NMM-1

Product catalog summary

Overview: The Nanopositioning and Nanomeasuring Machine (NMM-1) is designed for high-precision three-dimensional coordinate measurement within a range of 25 mm x 25 mm x 5 mm, achieving a resolution of 0.1 nm. It utilizes a unique sensor arrangement to ensure Abbe error-free measurements across all three axes.

Design and Operation: The NMM-1 features three miniature plane mirror interferometers that intersect at the probe sensor's contact point with the object. The object is placed on a movable mirror corner, monitored by fixed interferometers and positioned by a three-axis driving system. Angular deviations are corrected by two angle sensors. The system is compact and thermally stable, with laser light guided via optical fibers. A digital signal processor (DSP) manages signal processing, drive control, and measurement procedures.

Performance Features:

3D-multisensor positioning and measuring system with high accuracy.
Abbe Comparator principle applied to each measuring axis.
Operates in dynamic positioning, continuous-scan, or single-step modes.
Controlled via an easy-to-use script language on a host PC with USB interface.
Optional interchangeable contact system for zero indication.
Compatible with various probe systems, including laser focus sensors, scanning tunneling microscopes, and 3D micro probes.

Technical Data:

Measuring and positioning range: 25 mm x 25 mm x 5 mm.
Resolution: 0.1 nm.
External analog interface for customized probe sensor systems.
Cable length between measuring table and electronics unit: approx. 4 m.
Dimensions: NMM-1 (340 x 420 x 420) mm; Electronics unit (700 x 553 x 600) mm.
Weight: NMM-1: 95 kg; Electronics unit: 75 kg.

Applications: The NMM-1 is suitable for positioning, manipulation, processing, and measurement in micromechanics, microelectronics, optics, molecular biology, and microsystems engineering. It is also used for measuring precision parts and calibrating step height and pitch standards.

Contact Information: For further information, contact SIOS Meßtechnik GmbH at Am Vogelherd 46, D-98693 Ilmenau, Germany. Phone: +49-(0)3677-64470, Email: [email protected], Fax: +49-(0)3677-64478, Website: www.sios.de.

Note: Specifications are subject to change without notice as of 01/2013.

Catalog excerpts

Nanopositioning and Nanomeasuring Machine

Open the catalog to page 1

Major Performance Features The Nanopositioning and Nanomeasuring Machine is used for three-dimensional coordinate measurement in a range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. Its unique sensor arrangement provides Abbe error-free measurements on all three coordinate axes. The measurement axes of three miniature plane mirror interferometers for length measurements intersect virtually with the contacting point of the probe sensor with the measuring object at a single point. The object to be measured is placed directly on a movable mirror corner. The position of this mirror corner...

Open the catalog to page 2

NMM-1

NMM-1

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