Nanopositioning and Nanomeasuring Machine

Major Performance Features The Nanopositioning and Nanomeasuring Machine is used for three-dimensional coordinate measurement in a range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. Its unique sensor arrangement provides Abbe error-free measurements on all three coordinate axes. The measurement axes of three miniature plane mirror interferometers for length measurements intersect virtually with the contacting point of the probe sensor with the measuring object at a single point. The object to be measured is placed directly on a movable mirror corner. The position of this mirror corner...