nanoX catalog (high speed piezo translation stages)

Product catalog summary

Introduction
Piezosystem Jena, located in Jena, is a leader in piezoelectrical positioning technology, known for its precision and suitability for various applications, including vacuum environments. The technology offers refined motion, high forces, and no mechanical play, ensuring durability and quick response times.

Showcase Applications / Special Feature
The nanoSXY 400 CAP is utilized in SASAM® acoustic microscopes for life sciences, providing high-resolution imaging through ultra-short excitation pulses and direct analogue to digital conversion. The nanoSX 400 CAP piezo scanner enhances imaging speed and maintains scanning plane flatness.

Integrated Temperature Compensation
Piezosystem Jena's nanoX® series incorporates a lever translation system to counteract temperature effects, ensuring consistent motion across a temperature range of -20 to +80 °C with high repeatability.

Overview Applications
Piezo translation stages are used in fields such as life sciences, material science, mechanical engineering, metrology, microscopy, optics, and semiconductor technology. The nanoX series is noted for its dynamic performance and temperature compensation.

Series nanoX
The nanoX series provides linear strokes up to 480 microns with excellent guidance accuracy and temperature compensation, suitable for fast scanning and high load applications.

Series nanoSX
The nanoSX series extends the nanoX capabilities, offering positioning and scanning ranges up to 800 microns, optimized for high-resolution metrology and dynamic nano positioning.

Specifications

nanoSX 800 CAP: Features a 900 microns travel range, 0.6 nm resolution, and a 12.5 mm free aperture, with capacitive feedback for stability and accuracy.
nanoSXY Series: Models like nanoSXY 120 and nanoSXY 400 offer XY motion with up to 450 microns travel range, high z-axis stiffness, and a flat design for quick settling times.

Key Features

High load capability and dynamic performance.
Integrated capacitive feedback sensor system for enhanced stability and accuracy.
Available in vacuum and cryogenic versions with materials such as invar, superinvar, aluminum, or titanium.

Applications

Machine tools, laser optics, life sciences, and scanning systems.
High precision positioning, scanning microscopy, metrology, and alignment.

Additional Information
The document details various models with specific part numbers and technical parameters, including motion range, capacitance, resolution, repeatability, resonant frequency, stiffness, and load capacity.

Catalog excerpts

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tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:5.00pt "Arial", sans-serif; } .font1 { font:8.00pt "Arial", sans-serif; } piezosystem jena GmbH Pruessingstr. 27 D-07745 Jena phone: +49-(0)3641-6688-0 fax: +49-(0)3641-6688-66 e-mail: [email protected] www.piezojena.com www.gra1ides.de Druckstelle Weimar

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