microscope objective / lens positioning system 400μm focusing range and sub-nm step width max. lens diameter 39mm temperature compensated shortest settling times due to high stiffness universal use by thread adapter optional integrated capacitive feedback sensor applicable for standard and inverse microscopy applications: surface scanning and analysis AFM microscopy biotechnology (e.g. cell scanning) beam focusing for printing processes semiconductor test equipment fig.: nanoMIPOS 400 CAP Concept The nanoMIPOS 400 offers a nano positioning and scanning range up to 400µm in open loop operation as well as 320µm in closed loop. The system can be assembled with objectives of up to 39mm diameter. The sophisticated monolithic guidance design consisting of solid flexure hinges means the trajectory is free of mechanical play and friction – a feature of all piezosystem jena stages. The advanced nanoMIPOS 400 design is FEA optimized to show an outstanding minimum of lateral and rotational components as well as excellent guidance accuracy while offering robustness against off center and lateral loads. To avoid drift and hysteresis, the nanoMIPOS 400 can be equipped with a capacitive measurement system. In combination with the piezosystem jena controller the system offers in closed loop operation high stability, linearity, repeatability and accuracy. Specials The nanoMIPOS 400 design is temperature compensated, while changing the environmental temperature the stage keeps its position. Because of the bidirectional gear design, guidance and preload are separated. With this nanoX design the system offers equal and highest set and reset forces. This is essential for nanoscan applications that require short settling times and minimized overshooting. The nanoMIPOS 400 is suited for upside down use in inverted microscopes. Parfocal tube extensions for each threading type are available as an accessory. Vacuum, cryogenic or nonmagnetic versions are available on demand. 1. Screw the objective into the MIPOS 2. Screw the Flex-Adapter into the microscope 3. Clamp the MIPOS on the FlexAdapter using the attachment screw Spacer rings to compensate the extended optical path are available and flex adapters for all common

technical data: series nanoMIPOS part no. for thread … axis motion open loop (±10%)* motion closed loop (±0,2%)* capacitance (±20%)** integrated measurement system resolution open loop*** resolution closed loop*** typ. repeatability resonant frequency additional load = 80g additional load = 100g additional load = 300g stiffness blocking force max. load rotational error voltage range voltage connector**** sensor cable length min. bend radius of cable material dimensions (l x w x h) weight max. lens diameter max. lens weight option for standard microscopes option for inverse microscopes LEMO 0S.650...