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MI-Series

Product catalog summary

Overview
The MI-Series Miniature Retroreflector Interferometers are precision instruments designed for length measurement with versatile applications. They feature a miniaturized sensor head and corner cube reflector, making them suitable for both permanent installations and portable calibration systems. The system uses a fiber-optic coupled sensor head for ease of use and converts movement into an interference signal, which is then processed to output a length value.

Applications

Installation in single and multi-axis measuring tables, microscope stages, machine tools, and positioning tables.
Calibration of machine tools and coordinate measuring machines.
Precision length measurements in research and development.

Major Performance Features

Flexible and ultraprecise length measuring system adaptable to customer requirements.
Easy adjustment and high maximum displacement speed of the measuring reflector.
Large permissible tilting of the measuring reflector and fiber-optic cable coupling.
No thermal effects on the measurement environment and insensitivity to electromagnetic fields.
HeNe laser with high frequency stability as the metrological standard, with environmental influence correction.
Traceability to national standards and availability of data acquisition and display software.
Open interfaces for OEM software under Windows and Linux.

Technical Specifications

Measurement range varies by model: MI 60 (60 mm), MI 150 (150 mm), MI 5000 (5000 mm).
Resolution: 20 pm for all models.
Laser wavelength: 632.8 nm.
Frequency stability: 3 · 10^-7 for MI 60 and MI 150, 2 · 10^-8 for MI 5000.
Warm-up time: 1 minute for MI 60 and MI 150, 10-20 minutes for MI 5000.
Operating temperature range: 15-30°C.
Maximum tilting angle: ±1.5 degrees.
Maximum displacement speed: 800 mm/s.
Dimensions and mass vary for sensor head, reflector, and evaluation unit.
Standard interfaces include RS232C and USB, with optional digital and analog incremental signals.
Cable length between sensor head and electronics unit: 3 m, optionally up to 10 m.
Line voltage/frequency: 100-240 VAC/47-60 Hz.
Laser safety class: 2M according to EN 60825-1:2007 and II according to ANSI Z136.1 (CDRH).

Catalog excerpts

Miniature Retroreflector Interferometer

Open the catalog to page 1

Design and Operation Series MI miniature retroreflector interferometers are precision length measuring instruments with a wide range of applications. The can be adapted geometrically and functionally to specific tasks. The miniaturized sensor head and corner cube reflector enable the instrument to be used both as a permanently installed measuring system as well as a transportable calibration system. The fiber-optic coupled sensor head makes the systems easy to use. The miniature interferometer converts the measuring movement of the corner cube reflector into an interference signal. This optical...

Open the catalog to page 2

MI-Series

MI-Series

Catalog excerpts

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