A Johnson Electric Company

Based on the principles of ultrasonic standing waves in piezoelectricity, Nanomotion introduces its most advanced series of electronic motors, operating similarly to DC servo motors with the high resolution and dynamic performance of piezo actuators. As the leading manufacturer of piezo-electric motors for precision motion control applications, Nanomotion's product line ranges from single element motors for actuation, to larger motors for driving typical stages. Nanomotion motors operate with no intrinsic magnetic fields and no moving parts. The motors provide unlimited travel in a compact package,...

Nanomotion’s unique motor & stage technology makes it well suited to applications in: Medical Instruments and Devices: Microscopy Chromatography Analytical Instrumentation Focus Modules for Endoscopes Efficient Pump Drives Security: Shutter and Aperture Control Auto Focus Mechanisms Image Stabilization Semiconductor: Photo Lithography Process Wafer Inspection Thin Film Measurement Tools Scanning Electron & Ion Beam Microscopes Atomic Force Microscopes An exceptionally small operating package provides unlimited travel in a convenient and easy to mount package. The operating nature of the finger...

Nanomotion Motors, Stages and Modules For The BioMedical Markets Medical Instruments & Device Applications Non-magnetic Motors: • MRI Applications Standard Motors: • Microscope Stages • Auto Focus Axes • High Throughput Screening • Clean Room Assembly Applications Vacuum Motors: • Laser & Mass Spectrometer Applications Precision Stages for Bio and Pharma Markets: • Linear Stages for Auto Focus In Cell Analysis • Linear and Rotary Stages for Sample Manipulation Microscope and Chromatograph applications benefit greatly from the size and motion performance that Nanomotion systems offer. Compact,...

Non-Magnetic Motors for MRI Nanomotion’s – N motors are suitable to operation in a 1.5T to 3T MRI environment. These motors have no magnetic materials and no intrinsic magnetic field. Non-magnetic motors are supported by MRI compatible amplifiers that can be tuned to specific MRI frequencies to eliminate artifacts during imaging. MRI robots & manipulators use –N motors to position while the MRI is on, yielding high static holding and no power consumption at rest. Nanomotion has configured ‘traditional’ rotary motors, based on its ultrasonic piezo technology to offer a common mounting, with motor...

Shutter & Aperture Control Standard Motors: • Shutter & Aperture Control • Auto Focus & Zoom • Optical Image Stabilization Modules: • Edge Actuator • NUC Shutters • Pan & Tilt Gimbals Test Data for Security Market: • Wide Operating Temperature -40°C to 70°C • Thermal Shock Test Data • Operation Under Vibration • Impact Shock Testing Nanomotion's low voltage motors are particularly well suited flight and battery operated devices in the Security Markets. Non-Uniformity Correction (NUC) Shutters and Variable Apertures benefit from the Edge motor, weighing 0.55g and supported by an ASIC that can...

Optical Image Stabilization Pan and tilt mechanisms for camera control and image stabilization in cameras, binoculars and other optical devices benefit from rapid response of Nanomotion’s ultrasonic standing wave motor technology. Stabilizing a binocular can be achieved with a small pan and tilt mechanism that moves a roof prism inside an eye piece. The Nanomotion advantage is in the ability to miniaturize such a device with exceptional low mass and stabilize both high frequency/low amplitude and low frequency/high amplitude motions. Image stabilization in camera can be achieved by shifting the...

Standard Motors: • Clean Room Applications Vacuum and NonMagnetic Motors: • E-Beam and Ion Beam Applications Vacuum Compatible Motors: • High Vacuum and UHV Applications Standard and Vacuum Compatible FB Stages: • Precision Linear and Rotary Stages for Clean Room and Vacuum Environments • Custom Stage Designs for Open Frame and Small Footprints • Well-suited To Use in E-Beam and Ion Beam Chambers XYZT UHV Stage for Laser / Ion Beam Micromachining of Semicon Devices This 4 axis motion system provides X/Y/Z and Theta motion for laser or Ion Beam machining of semiconductor chips or MEMs devices. The...

High Vacuum Multi Axis Stage An XY-Theta stage providing 55mm travel in X and Y at 20nm resolution and a continuous rotary axis operating at 3 arc second resolution provides high performance motion and position stability in Ion beam microscopy. Wafer Metrology Stage XYZ stage provides travel to position 300mm wafers for inspection process. The XY stage provides travel of 360mm x 480mm with a vertical Z Wedge stage providing up to 25mm travel. Z stage can support a wafer chuck and position sample relative to the process tool. Stages can operate from 10nm to 100nm position resolution. Wafer Metrology...

Nanomotion’s HR Series motors range in size from a single element (providing 0.4kg of force) to an eight element motor (providing 3.2kg of force). The HR series is capable of driving both linear and rotary stages. The HR series motors have a wide dynamic range of speed, from several microns per second to 250mm/sec and can easily mount to traditional low friction stages or other devices. The unique operating characteristics of the HR Series motors provide inherent braking and the ability to eliminate servo dither when in a static position. Unlimited travel Wide dynamic velocity range– Approved...

HR Series Dimensions (European View) motor weight (grams) Bottom Back Bottom Back Note: All dimensions in mm -S motors are Standard -V motors are Vacuum Rated to 10-7 Torr (use VN for Vacuum & Non-Magnetic) -U motors are Vacuum Rated to 10-10 Torr and are Non-Magnetic -N motors are Non-Magnetic, for MRI environments Envelope of Performance curve duty cycle 25˚C max. continuous operation time duty cycle 50˚C max. continuous operation time duty cycle Vacuum max. continuous operation time