High load stack type actuator series PAHL
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High load stack type actuator series PAHL - 1

Piezo High Load Actuators Series PAHL Concept: The PAHL series of actuators consists of high number of piezoelectrical plates. Based on their large size, they are ideally suited for high loads. They have high blocking forces and can move large masses. Due to the integrated mechanical pre-load, they can work under tensile forces and image: high load actuators series PAHL work well in dynamic applications. Their high resonant frequency guarantee fast setting times. These actuators are useful for applications with precision mechanics, valve technologies and other fields, where high resolutions and high forces are critical. Product highlights: • stack type actuator in multilayer technique integrated pre-load for dynamic use high tensile forces up to 350 N motion up to 200 µm (larger motions available on request) The resolution PAHL series is in sub-nanometer range and is limited only the signal noise. As an option, these actuators are available with strain gage sensors for motion control. The pre-loaded stack type actuator is designed for dynamical use. wafer alignment micro positioning mirrors tilting injection valve control vibration generation and cancellation

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High load stack type actuator series PAHL - 2

Piezo High Load Actuators Technical data unit series PAHL resonant frequency blocking force operating voltage cable length with spherical series PAHL series PA SG with integrated measurement system part. no. closed loop integrated measurement strain gage system resolution closed loop integrated measurement typical value measured with NV 40/3( closed loop NV 40/3 CLE) typical value for small electrical field strength

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High load stack type actuator series PAHL - 3

Piezo High Load Actuators vacuum version cryogenic temperature version full bridge strain gage sensors top plate: spherical tungsten carbide (part no./size: see table) other options available upon request tip adapter for M4 thread on top plate size: diameter 7 mm, length 2.5 mm (part no. P-170-11) flexure hinge for PAHL XX/20 size: diameter 10 mm, length 13 mm (part no. Z-100-03) Please pay attention to our “notes for mounting”, which are available as download on our homepage....

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