High load piezo positioner series nanoX 200

Product catalog summary

Overview: The nanoX 200 series is a line of high-speed piezo translation stages designed for ultra-fast linear positioning. These stages are optimized for dynamic performance and guiding accuracy, even under high loads, and are temperature compensated to maintain position despite environmental changes.

Specifications: The nanoX 200 series offers a 240μm range of motion with a resolution of 0.4 nm in open loop and up to 1 nm in closed loop. It features a central aperture of Ø3mm and is available in vacuum and cryogenic versions. The body material options include invar, superinvar, aluminium, or titanium.

Performance: The stages achieve high positioning accuracy, stability, linearity, and reproducibility in closed loop operation with a capacitive direct measuring feedback system. The resonant frequency is 700 Hz, decreasing with additional load.

Applications: Suitable for machine tools, laser optics, life sciences, and scanning systems.

Technical Data: The series includes models nanoX 200, nanoX 200 SG, and nanoX 200 CAP, each with specific part numbers and configurations. The maximum push/pull force is 100 N, and the maximum load is 100 N. The voltage range is -20 to +130 V.

Recommended Configurations: Various configurations are recommended for different models, including specific actuators, amplifiers/controllers, power supply units, and PC interfaces.

Note: Specifications are subject to change without notice as progress occurs.

Catalog excerpts

High load piezo positioner series nanoX 200-1

High speed piezo translation stages The one-axis linear positioning stages nanoX 200 are a development within the ultra-fast nanoX®-line. Due to FEA-optimization these stages achieve the highest dynamical per- formance and excellent guiding accuracy even under high loads. The positioning stages of the nanoX 200 series are temperature compensated - while changing the environmental temperature the stage keeps its position. The highest positioning accuracy, stability, linearity and reproducibility are achieved in closed loop operation when used in combi- nation with the high resolution capacitive direct measuring feedback system from piezosystem jena. The raster tapped and thru holes allow easy integration of the stage into any application product highlights: • highest dynamical performance • excellent guidance accuracy • vacuum and cryogenic versions available • body material variations of invar, superinvar, aluminium or titanium available • external sensor preamplifier optional • machine tools • laser optics • life science • scanning systems [email protected] • http://www.piezosystem.de

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High load piezo positioner series nanoX 200-2

nanoX 200 series technical data: series nanoX motion open loop (±10%)* motion closed loop (±0,2%)* integrated measurement system resolution*** open loop closed loop resonant frequency max. push/pull force open loop max. push/pull force closed loop **** lateral force limit rotational error voltage range connector cable length min. bend radius of cable material stainless steel/aluminium central aperture * typical value measured with 30V300 nanoX amplifier ** typical value for small electrical field strength *** The resolution is only limited by the noise of the power amplifier and metrology. ****max....

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