High speed piezo translation stages The one-axis linear positioning stages nanoX 200 are a development within the ultra-fast nanoX®-line. Due to FEA-optimization these stages achieve the highest dynamical per- formance and excellent guiding accuracy even under high loads. The positioning stages of the nanoX 200 series are temperature compensated - while changing the environmental temperature the stage keeps its position. The highest positioning accuracy, stability, linearity and reproducibility are achieved in closed loop operation when used in combi- nation with the high resolution capacitive direct measuring feedback system from piezosystem jena. The raster tapped and thru holes allow easy integration of the stage into any application product highlights: • highest dynamical performance • excellent guidance accuracy • vacuum and cryogenic versions available • body material variations of invar, superinvar, aluminium or titanium available • external sensor preamplifier optional • machine tools • laser optics • life science • scanning systems [email protected] • http://www.piezosystem.de

nanoX 200 series technical data: series nanoX motion open loop (±10%)* motion closed loop (±0,2%)* integrated measurement system resolution*** open loop closed loop resonant frequency max. push/pull force open loop max. push/pull force closed loop **** lateral force limit rotational error voltage range connector cable length min. bend radius of cable material stainless steel/aluminium central aperture * typical value measured with 30V300 nanoX amplifier ** typical value for small electrical field strength *** The resolution is only limited by the noise of the power amplifier and metrology. ****max....

recommended configurations: actuator power supply unit Rights reserved to change specifications as progress occurs without notice!