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General Catalog

Product catalog summary

Introduction
Piezosystem Jena, based in Jena, is a leader in piezoelectrical positioning technology, known for its precision and suitability for various applications, including vacuum and cryogenic environments. The company offers a wide range of products and services globally.

Specifications and Systems
The document details several series of piezo systems:

Stack Type Actuators: Series P, PHL, PA, PAHL, N, R/RA, PA/T, P/S with different motion ranges.
Translation Stages: One-dimensional (PU, PX, PZ) and multi-dimensional stages (PXY, TRITOR, PENTOR) for precise positioning.
Mirror Tilting Systems: Series PSH for laser beam steering.
Micro Objective/Lens Positioning Systems: Series MIPOS for microscopy.

Electronics
Includes analogue and digital systems:

Analogue Systems: ENV systems with various current capacities.
Digital Systems: OEM and modular systems like d-Drive for enhanced control.

Applications
Products are used in:

Optics: Beam shuttering, laser tuning.
Life Sciences: Micro-manipulation, cell tracking.
Material Science: Positioning, damping.
Metrology: Nano-positioning, microscopy.

Technical Considerations
Key parameters include:

Linearity and Non-linearity: Position accuracy.
Repeatability and Resolution: Precision and smallest movement.
Drift/Creep and Hysteresis: Stabilization and feedback control.
Vacuum and Cryogenic Applications: Material and condition details.

Standards and Certifications
Products comply with ROHS and are CE certified, ensuring quality and safety.

Specifications and Features
Details on piezoelectric actuators, including voltage isolation, shielding, and UL certification. Cables are Teflon-Polyimide insulated for vacuum applications.

Connectors
Various connectors for actuator configurations, including LEMO and ODU for open/closed loop systems.

Calibration Procedure
Closed loop systems require calibration using a high-resolution interferometer.

Noise and Temperature Range
Position noise measured as peak-to-peak value. Operational temperature range is -20°C to 80°C.

ASI and ASC Functions
Automatic sensor identification and system calibration for easy interchange of parts.

Actuator Series Overview
Details on various actuator series, each with specific applications and specifications.

Applications and Mounting
Applications include micropositioning and scanning microscopy. Proper mounting is crucial to avoid non-axial forces.

Options and Recommendations
Options include strain gauge sensors and vacuum versions. Recommended supplies for systems are specified.

Specifications:
Specifications for piezoelectric actuators, including housing and threading details.

Series Overview:
Details on multiple actuator series, each with unique features.

Technical Features:
Actuators designed for high loads and stiffness, with operating voltages up to 150 V.

Applications:
Applications include micro-positioning and laser beam steering.

Options and Recommendations:
Various options available, including different plates and sensors.

Additional Notes:
Includes tables with detailed specifications and guidance on mounting.

Overview: Detailed specifications for piezoelectric translation stages, including Series PZ, PU, and PX.

Specifications: High mechanical stability and high resolution in the sub-nanometer range.

Options and Configurations: Available in various configurations, including vacuum versions.

Applications: Suitable for nm-precise positioning in various fields.

Mounting and Integration: Designed for easy integration with other systems.

Technical Data: Includes detailed tables with technical data for each series.

Conclusion: Translation stages offer high precision and reliability for various applications.

Overview: Detailed specifications for PXY and TRITOR series of multi-dimensional translation stages.

Specifications: Includes temperature range, materials, and motion range.

Mounting Instructions: Careful mounting to avoid damage.

Applications: Suitable for optics, microscopy, and semiconductor applications.

Options and Features: Vacuum versions and integrated measurement systems available.

Performance: High precision and accuracy due to flexure hinge design.

Overview: Specifications for TRITOR and PENTOR series translation stages and PSH series mirror tilting systems.

TRITOR Series: Specifications and applications for optics and laser tuning.

PENTOR Series: Specifications for motion and tilt, suitable for microscopes.

PSH Series: Specifications for mirror tilting systems.

General Remarks: Importance of temperature compensation and solid-state flexure hinges.

Overview: Information on accessories, cables, and electronic systems for precision positioning.

Specifications and Accessories: Details on extension cables and connectors.

Measurement Systems: Integrated strain gauge and capacitive systems.

Electronics and Amplifiers: Details on various amplifier systems.

Recommendations and Best Practices: Recalibration and stable conditions for optimal performance.

Conclusion: Importance of selecting the right components for precise positioning.

Overview: Technical specifications for piezo amplifier systems.

NV 40/3 Series: Features and applications for open and closed-loop amplifiers.

12V40 Series: Designed for low voltage piezo elements.

30V300 Series: High-frequency applications with high output current.

5V10 Series: Tailored for bimorph and low voltage piezo elements.

30DV50 Series: Digital amplifier series with high-resolution control.

Key Features and Applications: Used for driving piezo elements in various applications.

Specifications and Features: Use of actuators with ASI compatible amplifiers.

Technical Specifications: d-Drive system features and compatibility.

Sealing and Environmental Conditions: Recommendations for sealing and vacuum operations.

Applications and Advantages: High resolution and force generation for various applications.

Design and Construction: Explanation of piezoelectrical effect and actuator design.

Dynamic and Static Properties: Dynamic properties and guidelines for use.

Conclusion: Comprehensive guide on piezoelectrical actuators and best practices.

Specifications: Characteristics of piezoelectric actuators, focusing on multi-layer and monolithic designs.

Mounting and Usage Recommendations: Proper mounting to avoid forces.

Tube Design: Use of transversal piezoelectric effect in tube actuators.

Bimorph Elements: Suitable for dynamic applications.

Hybrid Design: Precise parallel motion using lever design.

Properties of Piezo-Mechanical Actuators: Expansion, hysteresis, resolution, and other properties.

Temperature Effects on Piezoelectric Actuators
Performance varies with temperature, with specific effects at low temperatures.

Capacitance and Voltage Considerations
Actuators as capacitors with specific capacitance characteristics.

Creep and Repeatability
Creep effects and repeatability in periodic signals.

Vacuum Conditions
Functionality in vacuum conditions with low outgassing materials.

Curie Temperature
Importance of operating below Curie temperature.

Static Behavior and External Forces
Effects of external forces on actuator expansion.

Dynamic Applications
Considerations for heating and depolarization in dynamic applications.

Specifications and Procedures:
Behavior of actuators under various conditions.

Dynamic Properties:
Resonant frequency and its impact on applications.

Rise Time and Dynamic Forces:
Suitability for fast applications and recommendations for pre-loaded actuators.

Actuators with Lever Transmission:
Enhancements for motion and parallelism.

Simulation of Dynamic Properties:
Use of electromechanical network model for simulation.

Recommendations:
Importance of considering dynamic forces and resonant frequencies.

Actuator System Model and Measurements
Modeling and measurement of piezoelectric actuator systems.

FEM Optimization
Importance of minimizing cross motion and optimizing stage design.

Position Control and Closed Loop Systems
Enhancing repeatability and accuracy with closed loop systems.

Resolution and Linearity
Factors influencing resolution and methods for improvement.

Repetition Accuracy and Dynamic Properties
Importance of calibrating control systems for optimal performance.

Calibration Protocol for Closed Loop Systems
Calibration for optimal linearity and repeatability.

Dynamic and Static Operations
Current requirements for static and dynamic operations.

Electrical Power and Noise
Impact of noise on actuator sensitivity.

Lifetime and Reliability
Factors affecting lifetime and reliability.

Alternative Actuator Technologies
Comparison with electrostrictive and magnetostrictive actuators.

Guidelines for Using Piezoelectrical Actuators

Safety Precautions:
Guidelines for safe handling and operation.

Handling and Application:
Recommendations for avoiding damage.

Technical Specifications:
Parameters and units for piezoelectric actuators.

Conversion and Units:
Conversion tables for MKS and English units.

Contact Information:
Piezosystem Jena GmbH, Pruessingstr. 27, D-07745 Jena, Phone: +49-(0)3641-6688-0, Fax: +49-(0)3641-6688-66, Email: [email protected], Website: www.piezojena.com

Catalog excerpts

5 volume jena piezosystem >

Open the catalog to page 1

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:5.00pt "Arial", sans-serif; } .font1 { font:6.00pt "Arial", sans-serif; } .font2 { font:7.00pt "Arial", sans-serif; } .font3 { font:9.00pt "Arial", sans-serif; } .font4 { font:16.00pt "Arial", sans-serif; } .font5 { font:29.00pt "Arial", sans-serif; } sries PA series PAHL series N series RIRA stack type actuators series PHL The PHL series of actuators, because of their high blocking forces, are ideally suitable for applications in the machine tool industry. This feature enables the PHL series to move a large mass and to generate...

Open the catalog to page 9

series Pseries PHLseries PAseries Nseries R/RAseries PA/Tseries P/S13series PAHL options integrated pre-load for dynamical use vacuum and cryogenic version strain gauge sensors as a full bridgeother options available on request high loads up to 3500 N recommended supply (open loop): ENV 40 high tensile forces up to 350 N (page: 68); ENV 800 (page: 70); 12V40 (page: 76); (page: 74); 30V300 ENV 40 SG (page: 78) multi-layer technique recommended supply (closed loop): NV 40/1 CLE (page: 68); ENV 300 SG (page: 70); 12V40SG (page: 76); d-Drive (page: 82) motion up to 200 m (larger motion available...

Open the catalog to page 13

series Pseries PHLseries PAseries PAHLseries Nseries PA/Tseries P/S13series R/RA applications RA series with high dynamic properties due to integrated me-chanical preload micro positioning > laser beam steering scanning systems for atomic force micro-scopes piezoelectrical pumps R series without housing forsystem integration options measurement system: strain gauge feed back sensors modern multi-layer technique optic adapters for RA series with inside thread (part no. P-400-05 for RA xx/24 and P-400-10 for RA xx/35 series) maximum load up to 4000 N tensile forces up to 500 N (RA series) cryogenic...

Open the catalog to page 17

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } Solid state hinges in parallelogram construction provide parallel motion without mechani-cal play in the x and y direction. These conͭstruction principles result in a very high resolution which gets far beyond the resolution of mechanical and electromechanical posi-tioning systems. The PXY series can be easily mounted to other positioning systems and can be equip-ped with measurement devices that over-come the effect of hysteresis. Dynamic operation is possible...

Open the catalog to page 28

series PXYseries PXY D12series PXY OEM series PXY frame applications motion range up to 150 m in X and Y microscopy stage for light transmitting application wafer handling and semiconductor large free central space mask positioning and lithography near field scanning and AFM microscopy capacitive mea- surement system metrology and material sciences high load flexure hinges in parallel design integrated feed back sensors shortest settling time because of high stiffness >

Open the catalog to page 31

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } piezosystem jena's unique TRITOR lments are extremely compact but offer motions of up to 400 um in all three axes. Parallel motion is achieved without play due to the mechanical design. As an option, an integrated strain gauge measurement system or capacative mea-surement system for overcoming the effect of hysteresis are available. TRITOR ele驭ments can be easily combined with other mechanical positioning systems. They are well suited for many various applications...

Open the catalog to page 36

series TRITOR PENTOR 5 axes systemseries TRITOR 101, 102, 200/20 with free central hole (30 mm/ 40 mm)/free central space of 50 mm optics, laser tuning, fiber positioning micromanipulation, microscopy scanning systems vacuum and low temperature applications highly compact design results in superior perfor- mance options integrated measurement system for each axis accurate parallel motion by paralle- logram design vacuum design other modifications available on request > high reliability due to solid state hinges motion without mechanical play > high resolution in nm and sub-nm range motion up...

Open the catalog to page 37

series TRITOR series TRITOR 101, 102, 200/20PENTOR 5 axes system PENTOR, upright setup combination of a three axis trans- lation system and a two axis tilting system picture 2: cable duct on the rightpicture 3: free center hole with 17 mm dia- meter PENTOR T-451-00 D, integrated preload cable duct on the left translation each axis: 100 m PENTOR T-452-00 D, > adapter plate Z-700-00 cable duct on the right picture 5: tilt each direction: ձ2 mrad Using the adapter plate allows an easy assembling of the PENTOR systems. The PENTOR can be fixed on two different ways: (picture 4 and 5).picture 4: PENTOR...

Open the catalog to page 39

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } .font2 { font:9.00pt "Arial", sans-serif; } .font3 { font:16.00pt "Arial", sans-serif; } .font4 { font:30.00pt "Arial", sans-serif; } .font5 { font:8.00pt "Lucida Sans Unicode", sans-serif; } mirror tilting Systems sries PSH The sries for PSH mirror tilting platforms has been especially developed for fast scanning and moving of mirrors or optical components. The unique designs, utilizing direct piezo driven actuating systems, are ideally suited for high frequency...

Open the catalog to page 40

piezosystem jena developed a special sen-sor signal amplifier which is located inside of the actuator or built into a small box as part of the cable. Regarding external measurement systems with strain gauge or capacitive feed back sensors in the actuator, the distance bet- ween the place of measurement, and the place of signal process itself is explicitly smaller. So a considerably higher signal accuracy of the measurement system is achieved. Consequently we are able to achieve an enhanced temporal resolution of the motion. This criteria is a very important precondition for all extremely fast...

Open the catalog to page 55

All Piezosystem jena GmbH catalogs and technical brochures

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Piezosystem Jena Product Catalog Vol. 6
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Optical Catalogue
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