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5 volume jena piezosystem >

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:5.00pt "Arial", sans-serif; } .font1 { font:6.00pt "Arial", sans-serif; } .font2 { font:7.00pt "Arial", sans-serif; } .font3 { font:9.00pt "Arial", sans-serif; } .font4 { font:16.00pt "Arial", sans-serif; } .font5 { font:29.00pt "Arial", sans-serif; } sries PA series PAHL series N series RIRA stack type actuators series PHL The PHL series of actuators, because of their high blocking forces, are ideally suitable for applications in the machine tool industry. This feature enables the PHL series to move a large mass and to...

series Pseries PHLseries PAseries Nseries R/RAseries PA/Tseries P/S13series PAHL options integrated pre-load for dynamical use vacuum and cryogenic version strain gauge sensors as a full bridgeother options available on request high loads up to 3500 N recommended supply (open loop): ENV 40 high tensile forces up to 350 N (page: 68); ENV 800 (page: 70); 12V40 (page: 76); (page: 74); 30V300 ENV 40 SG (page: 78) multi-layer technique recommended supply (closed loop): NV 40/1 CLE (page: 68); ENV 300 SG (page: 70); 12V40SG (page: 76); d-Drive (page: 82) motion up to 200 m (larger motion...

series Pseries PHLseries PAseries PAHLseries Nseries PA/Tseries P/S13series R/RA applications RA series with high dynamic properties due to integrated me-chanical preload micro positioning > laser beam steering scanning systems for atomic force micro-scopes piezoelectrical pumps R series without housing forsystem integration options measurement system: strain gauge feed back sensors modern multi-layer technique optic adapters for RA series with inside thread (part no. P-400-05 for RA xx/24 and P-400-10 for RA xx/35 series) maximum load up to 4000 N tensile forces up to 500 N (RA series)...

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } Solid state hinges in parallelogram construction provide parallel motion without mechani-cal play in the x and y direction. These conͭstruction principles result in a very high resolution which gets far beyond the resolution of mechanical and electromechanical posi-tioning systems. The PXY series can be easily mounted to other positioning systems and can be equip-ped with measurement devices that over-come the effect of hysteresis. Dynamic operation is...

series PXYseries PXY D12series PXY OEM series PXY frame applications motion range up to 150 m in X and Y microscopy stage for light transmitting application wafer handling and semiconductor large free central space mask positioning and lithography near field scanning and AFM microscopy capacitive mea- surement system metrology and material sciences high load flexure hinges in parallel design integrated feed back sensors shortest settling time because of high stiffness >

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } piezosystem jena's unique TRITOR lments are extremely compact but offer motions of up to 400 um in all three axes. Parallel motion is achieved without play due to the mechanical design. As an option, an integrated strain gauge measurement system or capacative mea-surement system for overcoming the effect of hysteresis are available. TRITOR ele驭ments can be easily combined with other mechanical positioning systems. They are well suited for many various...

series TRITOR PENTOR 5 axes systemseries TRITOR 101, 102, 200/20 with free central hole (30 mm/ 40 mm)/free central space of 50 mm optics, laser tuning, fiber positioning micromanipulation, microscopy scanning systems vacuum and low temperature applications highly compact design results in superior perfor- mance options integrated measurement system for each axis accurate parallel motion by paralle- logram design vacuum design other modifications available on request > high reliability due to solid state hinges motion without mechanical play > high resolution in nm and sub-nm range motion...

series TRITOR series TRITOR 101, 102, 200/20PENTOR 5 axes system PENTOR, upright setup combination of a three axis trans- lation system and a two axis tilting system picture 2: cable duct on the rightpicture 3: free center hole with 17 mm dia- meter PENTOR T-451-00 D, integrated preload cable duct on the left translation each axis: 100 m PENTOR T-452-00 D, > adapter plate Z-700-00 cable duct on the right picture 5: tilt each direction: ձ2 mrad Using the adapter plate allows an easy assembling of the PENTOR systems. The PENTOR can be fixed on two different ways: (picture 4 and 5).picture 4:...

tr.row {} td.cell {} div.block {} div.paragraph {} .font0 { font:6.00pt "Arial", sans-serif; } .font1 { font:7.00pt "Arial", sans-serif; } .font2 { font:9.00pt "Arial", sans-serif; } .font3 { font:16.00pt "Arial", sans-serif; } .font4 { font:30.00pt "Arial", sans-serif; } .font5 { font:8.00pt "Lucida Sans Unicode", sans-serif; } mirror tilting Systems sries PSH The sries for PSH mirror tilting platforms has been especially developed for fast scanning and moving of mirrors or optical components. The unique designs, utilizing direct piezo driven actuating systems, are ideally suited for high...

piezosystem jena developed a special sen-sor signal amplifier which is located inside of the actuator or built into a small box as part of the cable. Regarding external measurement systems with strain gauge or capacitive feed back sensors in the actuator, the distance bet- ween the place of measurement, and the place of signal process itself is explicitly smaller. So a considerably higher signal accuracy of the measurement system is achieved. Consequently we are able to achieve an enhanced temporal resolution of the motion. This criteria is a very important precondition for all extremely...