PENTOR – 5-axis system The PENTOR a piezo-electric stage was developed to meet the requirements of linear movement in three axes while at the same time being able to provide tip and tilt motion. With 5 different degrees of freedom, 100 µm in XYZ axes, and ±2 mrad in ʘX and ʘY axes, the PENTOR provides a spatial positioning flexibility to fulfill complex tasks. PENTOR 100 SG The PENTOR is equipped with a 17mm diameter open aperture that makes it ideal for optical setups. Due to the high stiffness, this element is able to offer a high resonant frequency. Therefore the PENTOR is very suitable for dynamic applications. Product highlights: • combination of a three axis translation system and a two axis tilting system free center hole with 17 mm diameter and closed loop versions. The closed loop ver- integrated preload sion is equipped with strain gage sensors to translation each axis: 100 µm overcome drift and hysteresis. tilt each direction: ±2 mrad solid state flexure hinges in parallelo- The 5-axes piezo stage is available in both open gram design without mechanical play Vacuum and low temperature versions are also available upon request. optional measurement system vacuum and low temperature versions available Application examples: • • dynamical applications laser tuning micro and nano positioning [email protected] • http://www.piezosystem.com scanning system life science

PENTOR – 5-axis system Technical Data PENTOR series part number voltage range temperature range dimensions (length, width, height) central aperture PENTOR translation stage motion (± 10%) x,y,z open loop motion (± 0.2%) x,y,z closed loop open loop closed loop resolution capacitance (per axis) ±20% resonant frequency (unloaded) stiffness (per axis) typ. non-linearity PENTOR tilting stage tilt (± 10%) Θx, Θy open loop closed loop voltage range

Control electronics We recommend the electronic d-Drive (E751-000) and 5 x EVD 50 (CL) Rights reserved to change specifications as progress occurs without notice!