PIEZO LEGS® MOTORS MINIATURE SIZE • BENCHMARK STRENGTH • PRECISION

High Performance in a Compact Space Optics, lasers and photonics An ever expanding high-tech sector is characterized by many new instrument launches, especially in medical technology and biotechnology. Key tasks for Piezo LEGS® motors include adjusting optics and moving devices such as linear stages. Their sub-micrometer to nanometer resolution is crucial for success. Factory automation The search for energy efficient solutions that also offer extremely high precision intensifies. Piezo LEGS® motors now replace micro-meter screws for fixation (fixturing) and remote adjustment. Far more precise...

Semiconductor manufacturing The precision nanometer-scale motion control and positioning of Piezo LEGS® motors is vital as IC line widths and feature sizes continue to decrease to well below the 100 nanometer limit. The motors’ vacuum compatibility and non-magnetic motor housings are also a requirement in many IC applications.

Outstanding resolution, instant reaction, exceptionally compact Piezo LEGS® motors require far less space than traditional motors, delivering top performance from locations where electromagnetic motors often won’t fit. Resulting products are generally easier and cheaper to assemble, which cuts overall production costs. In addition, their outstanding linear positioning resolution and instant response from zero hold energy make Piezo LEGS® motors a clear favorite for high precision systems as well as high volume products such as fixturing and alignment in factory automation. Piezo LEGS® motors...

Presenting – the best LEGS® in the business Direct, backlash-free drives with sub-micro/nanometer resolution and full force, power-off locking Piezo LEGS® motors Unique features common to all motors: • Single-digit nanometer resolution if required • Predictable sub-micron, direct-drive motion • Zero backlash • Combine with any driver • Use with encoders from Renishaw or MicroE and others LL10 Our most compact linear motor. Builds in for many applications. • Stall force 6 N • Stroke 0 – 80 mm • Non-magnetic version • Vacuum version Every Piezo LEGS® motor – linear or rotating – can be driven by...

LTC 20/40 Contains no ball-bearings or other lubricated parts that might need maintenance. • Two sizes • Various mounting options • Stall force 20 or 40 N • Stroke 0 – 13 mm LTC 300/450 A robust, direct drive motor for heavy loads. • Stall force 300 or 450 N • Stroke 0 – 25 mm LC20 Mainly for build in for linear and gonio stages. Gives a smaller envelope with easier mounting. Result is the same size as the bare stage to allow excellent integration in tight spaces. • Stall force 20 N • Stroke 0 – 29 mm LS15 When longer strokes are required. Can be mounted on the side with the drive rod fastened...

Imagine an ant – but with legs nearly 1,000 times stronger How a Piezo LEGS® motor works A Piezo LEGS® motor is a direct acting, one piece walking machine whose legs can be elongated and bent sideways. By synchronizing the movement of two pairs of legs, it moves in small but distinct increments – just as an ant does. Except that it’s much faster and far stronger. By taking thousands of steps per second – even in the sub-micrometer or nanometer range – it can cruise over several centimeters during this time. Pulling forces extend up to several hundred Newton. There’s no need for gears or mechanical...

150004-00 www.matador.se   PHOTO cover: Alex&Martin About PiezoMotor PiezoMotor is a world-leading developer and manufacturer of direct drive, micro motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these fail to meet exacting space and performance demands. Piezo LEGS® motors minimize total product size and deliver much greater precision. Many leading multi-national companies are among our clients.