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Technology: Piezo Actuators with Guiding and Preload

Technology: Piezo Actuators with Guiding and Preload
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Technology: Piezo Actuators with Guiding and Preload - 1

Simple lever amplification. The point contact decouples shear forces and thus tensile stress on the piezo ceramic V77777777777777777777777// Preloaded and Cased Actuators Piezoceramic actuators are insensitive to push forces, but must be protected from pulling and shearing stress. A case mechanically decouples lateral forces and insulates contacting. Between the case and the piezo ceramic, a preload can be applied, e.g. by means of a spring, which allows dynamic operation of higher loads. Flexure Guides Direct Motion and Maintain Stiffness Precise straight motions require the piezo actuator to be embedded in a guide. This is usually a flexure guide, which is frictionless and allows hysteresis-free motion at the possible travel ranges of up to a few millimeters. Ideally this mechanical guiding concept also integrates force decoupling and preloading without an adverse effect on the system stiffness. Lever Amplification Allows Travel Ranges of up to 1 mm The displacements of piezo stack actuators are typically up to a few ten millimeters and a few 100 micrometers maximum. The flexure guide can be designed such that it will act like a mechanical lever. This mechanically amplifies the displacement of the piezo actuator and guides it into a different direction, if necessary. Lever-amplified systems have an extremely demanding design: On the one hand, they are supposed to prevent lateral migration and, on the other, to always guide it in a straight line, even though the lever always leads through a pivot point. Moreover, increasing the travel range is at the cost of stiffness. The flexure guide can be designed such that further integration does not require any additional guide. The piezo ceramic stack is mechanically preloaded against the housing by means of a spring. This prevents pull forces, such as the ones caused by the inert mass of the load in dynamic operation

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Technology: Piezo Actuators with Guiding and Preload - 2

From Stack Actuator to 6-Axis Stage Integration levels of piezo actuators Travel ranges Moving axes Sensor technology Linearity Guiding Space requirement Price Integration effort PiezoMove® OEM Flexure Actuators with Built-In Guiding PiezoMove® actuators combine guided motion with long travel ranges of up to 1 mm and provide precision in the 10 nanometer range if ordered with the position sensor option. Their high-precision, frictionless flexure guides achieve very high stiffness and excellent straightness of motion. This makes them easier to handle than a simple piezo actuator, but still...

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Technology: Piezo Actuators with Guiding and Preload - 3

Headquarters GERMANY_ © Physik Instrumente (PI) GmbH & Co. KG All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI. Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely. Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ from the original and are not binding. PI reserves the right...

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