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Physik Instrumente
Precision Positioning and Motion Control

Precision Positioning and Motion Control

Product catalog summary

Introduction
The document provides an overview of PI's precision positioning and motion control solutions, emphasizing the use of their online product finder for the latest products and developments. It highlights the importance of selecting the right product type based on motion requirements and offers filters for specific needs like higher load capacity.

Markets and Applications

Semiconductor Production and Inspection: PI offers solutions for high precision and dynamics in semiconductor manufacturing, using air bearings and direct drives for optimal performance.
Photonics Packaging and Optical Alignment: Automated alignment systems with high precision are crucial for photonics, utilizing motorized linear stages and nanopositioners for efficient integration and operation.
Industrial Manufacturing: PI's micropositioning stages cater to growing precision needs in industrial applications, such as digital printing and force-controlled testing.
Laser Material Processing: Dynamic multi-axis motion systems are used for laser cutting, with solutions that integrate motion controllers and universal drive modules for enhanced productivity.
Automated Optical Inspection (AOI): High-speed scanning and precise positioning are essential for optical inspection, with systems designed for fast step-and-settle times and high stability.
Basic Research and Scientific Instrumentation: PI systems are frequently cited in scientific research for their role in successful R&D projects, offering customized designs for various environmental conditions.

Products
The document lists various products including XY stages, translation stages, linear actuators, motion control systems, gantry systems, and rotation stages. Each product category is designed to meet specific precision and motion control needs.

Conclusion
PI provides a comprehensive range of precision positioning and motion control solutions tailored for various industrial and research applications. Their systems are designed for high accuracy, dynamics, and reliability, supported by advanced motion controllers and customization options.

Specifications and Product Overview
The document details various motion and positioning products offered by PI, including linear actuators, rotary stages, and XY stages. These products are designed for high precision and adaptability to different environments, such as vacuum or clean-room conditions. The company also offers integrated system solutions like gantries and photonics alignment systems.

Customization and Technological Expertise
PI's strength lies in its ability to customize products to meet specific customer needs. The company has in-house capabilities for developing core components such as sensors, electronics, and motors. Their technological expertise includes linear guiding technologies, air bearings, and magnetic levitation systems.

System Solutions and Control Technology
PI offers comprehensive system solutions managed by ACS Motion Control technology, which supports complex industrial applications. Their modular multi-axis controllers are designed for direct drives, ensuring fast settling times and high-speed stability.

Market Presence and Global Support
PI has a strong global presence with subsidiaries and distributors worldwide, ensuring international support and rapid response to customer needs. The company prides itself on its expert consulting services, providing highly qualified consultancy through trained specialists.

Technological Breadth and Core Technologies
PI's technological diversity is unmatched, with in-house development of piezo components, magnetic direct drives, air bearings, and nanometrology sensors. Their expertise extends to parallel-kinematic systems and motion control technology, allowing them to offer advanced solutions without technological restrictions.

Conclusion
PI's commitment to innovation and customer satisfaction has established it as a leader in the precision positioning technology market. Their ability to provide customized solutions and their extensive technological expertise make them a reliable partner for high-tech applications worldwide.

Production Capabilities
PI employs modern production management and an integrated system to ensure high-quality products and services. The company uses a fractal production structure for flexibility in manufacturing large series with full process control, eliminating the need for extensive storage facilities. Key facilities include 13,000 m² of production space, 5,000 m² of cleanrooms, and specialized equipment for measuring and monitoring.

Vacuum Positioning Solutions
PI offers high-precision positioning solutions for vacuum conditions, addressing constraints like limited space and contamination prevention. The selection of drive technology is tailored to load capacity, velocity, and duty cycles. Cleanrooms and vacuum chambers are used for assembly and testing.

Services and Global Support
PI provides comprehensive services from design to delivery, including risk assessment, certification preparation, and mass production capabilities. Global service hubs in Asia, China, Europe, and the USA offer on-site training, setup, maintenance, and extended warranty options.

Application Examples and Requirements
The document lists various applications such as autofocus, biotechnology, digital printing, and semiconductor manufacturing, detailing the major requirements like high dynamics, precision, and repeatability. It also provides a comprehensive list of preferred solutions for high-precision automation tasks.

Precision Linear Stages
The document outlines various precision linear stages, including miniature, compact, high-load, and high-precision stages, along with their specific applications and features. It also mentions PIglide linear air bearing stages for enhanced precision and performance.

Specifications:
The document outlines specifications for various linear stages, including the L-412 and V-412 series. Key mechanical properties include recirculating ball bearings, ball screw drive type, and specific force and torque limits. The V-412 series features ironless 3-phase linear motors, offering high velocities and precision.

Procedures:
Installation involves optional connections for linear encoders and fittings for purge air hoses. Controllers such as the ACS modular controller are recommended, and connecting cables must be ordered separately.

Standards and Recommendations:
The stages are designed for high performance and cost efficiency, suitable for applications like automated optical inspection, digital printing, and electronics manufacturing. The document recommends using specific controllers and highlights the importance of protective features like side seals and purge air connections to prevent contamination.

Key Features:
- High load capacity and dynamic performance due to advanced recirculating ball bearings.
- Encoder options include incremental and absolute types, enhancing motion tracking and reducing collision risks.
- Ironless motors in the V-412 series provide smooth operation without cogging, even at low velocities.

Applications:
The stages are suitable for various industrial applications, including automation, laser cutting, and scanning, due to their precision and high load capacity.

Design and Performance:
The V-412 and L-417 series offer class-leading design with high-resolution encoders and robust construction, ensuring reliability and long service life. The stages are adaptable for integration into central lubrication systems, enhancing maintenance efficiency.

Overview: The document provides detailed specifications and applications for various precision linear stages and motion platforms, focusing on their mechanical and drive properties, sensor integration, and recommended controllers. These devices are used in high-precision applications such as autofocus, digital printing, laser marking, and scientific instrumentation.

1. V-522 / V-524 / V-528 High-Dynamics PIMag® Linear Stage:

Features voice coil direct drive with direct position measurement.
Travel ranges of 5 mm, 10 mm, and 20 mm with a maximum velocity of 250 mm/s.
Integrated optical incremental sensors with a resolution of 10 nm.
Applications include autofocus, digital printing, and semiconductor testing.

2. V-508 PIMag® Precision Linear Stage:

Offers travel ranges of 80 mm, 170 mm, and 250 mm.
Equipped with ironless or iron core linear motors and incremental or absolute linear encoders.
Compact design with a cross-section of 80 mm × 25 mm.
Applications include electronics manufacturing and medical industry.

3. M-122.2DD1 Micro Translation Stage:

Provides a travel range of 25 mm with a maximum velocity of 20 mm/s.
Integrated linear encoder for high accuracy with 0.1 μm resolution.
Utilizes a ball screw for high velocities and cycle numbers.
Applications include automation and optical alignment.

4. MTS-65 Miniature Linear Stage:

Travel ranges up to 52 mm with repeatability to 0.1 μm.
Load capacity up to 2 kg, suitable for autofocus and biotechnology applications.
Driven by a 2-phase stepper motor with a design resolution of 5 μm.

5. M-105 / M-106 Microtranslation Stage:

Available in X, XY, and XYZ configurations with travel ranges up to 18 mm.
Features crossed roller bearings for guiding accuracy better than 2 μm.
Optional PiezoMike for 10 nm resolution and motor drives.

6. L-509 Precision Linear Stage:

Travel ranges from 26 mm to 102 mm with repeatability to 0.1 μm.
Equipped with ActiveDrive DC, BLDC, and stepper motors.
Applications include laser cutting and optical alignment.

Key Specifications:

Most stages feature aluminum construction with black anodized finish for durability.
Operating temperature ranges typically between 5°C to 50°C.
Recommended controllers vary by model, including C-413, C-863, and ACS modular controllers.

Conclusion: The document outlines a range of precision linear stages designed for high-precision applications across various industries. Each model offers unique features tailored to specific needs, such as travel range, load capacity, and sensor integration, ensuring optimal performance in demanding environments.

Overview: The document provides detailed specifications and features of various linear stages and motors, focusing on the L-509 and L-511 series, as well as the V-551 PIMag® Precision Linear Stage. These components are used in precision motion and positioning applications across various industries.

Specifications:

L-509 Series: Features recirculating ball bearings for high travel accuracy and load capacity. It includes DC and BLDC motors with various configurations for different applications. Key parameters include holding force, push/pull force, permissible lateral force, load capacity, and permissible torque in different axes.
L-511 Series: Offers high precision with options for ActiveDrive DC motors, stepper motors, and integrated sensors for accurate positioning. It supports travel ranges up to 155 mm and repeatability to 0.1 μm. The series is designed for high load capacity and precision with features like noncontact limit switches and optical reference point switches.
V-551 PIMag® Precision Linear Stage: Utilizes magnetic direct drive technology for high velocity and precision. It includes absolute and linear encoders for direct position measurement, ensuring high accuracy and efficiency. The stage is suitable for applications requiring high guiding accuracy and compact design.

Drive Types and Motors:

ActiveDrive DC motors for high velocity control via PWM signals.
DC servo motors with gearheads for high torque and resolution.
2-phase stepper motors for low velocity and high resolution.
Brushless DC motors for various applications.

Position Measurement: The document highlights the use of integrated rotary and linear encoders for precise position measurement, minimizing the effects of nonlinearity and mechanical play.

Applications: The stages and motors are applicable in fields such as biotechnology, automation, laser cutting, optical alignment, and scientific instrumentation.

Controllers and Connectivity: Recommended controllers include C-863, C-884, C-885, and ACS modular controllers, with various configurations supporting single to multiple axes. All necessary cables are included, with options for custom designs.

Materials and Construction: The stages are constructed from aluminum and steel, ensuring durability and stability under various operating conditions.

Operating Conditions: The components are designed to operate within a temperature range of 5 to 40°C, with specific tolerances for mass and dimensions.

Overview: The document provides detailed specifications and features of various high-performance nanopositioning stages, including the PIglide AT3, LC, and VC series. These stages are designed for precision applications such as metrology, photonics, and semiconductor manufacturing, offering frictionless motion through air bearings and linear motors.

Specifications:

Accuracy and Error Compensation: The stages offer varying levels of accuracy, with options for error compensation to enhance precision. For example, the A-123 series provides accuracy from ±0.5 μm to ±5 μm, depending on the model and compensation applied.
Operating Conditions: The stages require clean, oil-free air filtered to 1.0 μm or better, with specific operating pressures and air consumption rates outlined for each model.
Materials and Construction: The stages are constructed from hardcoat aluminum and stainless steel, ensuring durability and compatibility with cleanroom environments.

Applications:

These stages are ideal for applications requiring high precision and cleanliness, such as sample inspection, scanning, metrology, and testing in industries like photonics and semiconductor manufacturing.

Technology and Features:

The stages utilize noncontact components like air bearings and linear encoders, providing frictionless motion and high reliability.
Options for customization and additional accessories, such as encoders and motion controllers, are available to tailor the stages to specific application needs.

Performance Metrics:

Travel Range: Varies from 25 mm to 750 mm across different models.
Load Capacity: Supports payloads up to 100 N, with specific limits for each model.
Velocity and Acceleration: Maximum velocities range from 0.5 m/s to 1 m/s, with acceleration capabilities up to 80 m/s².

Recommendations:

For optimal performance, stages should be used with a controller from PI to achieve the specified accuracy levels.
It is recommended to connect an air pressure sensor to the Motion-Stop input of the controller to protect the stage from damage.

Overview: The document provides detailed specifications and features of various precision Z stages and XY stages used in motion and positioning applications. These stages are equipped with different types of motors and encoders to ensure high accuracy and repeatability in positioning tasks.

Z Stage Specifications:

Travel Range: Typically 13 mm, with some models offering up to 26 mm.
Motor Types: Options include 2-phase stepper motors, DC motors, and brushless DC motors (BLDC).
Encoders: Incremental linear encoders and rotary encoders are used for precise position measurement.
Resolution and Repeatability: Design resolutions range from 0.005 μm to 0.05 μm, with unidirectional repeatability as low as 0.05 μm.
Mechanical Properties: Crossed roller guides with anti-creep systems and ball screws are standard, providing high load capacity and stability.
Operating Conditions: Operating temperature ranges from 5 to 40°C, with materials typically being anodized aluminum and steel.

Drive Properties:

Operating Voltage: Nominally 24 V, with a maximum of 48 V.
Controllers: Various controllers are recommended, including C-663.12, SMC Hydra, and ACS modular controllers, depending on the axis configuration.

XY Stage Specifications:

Travel Range: Up to 205 mm × 205 mm for precision applications.
Velocity: Capable of reaching up to 90 mm/s.
Repeatability: Unidirectional repeatability can be as precise as 0.05 μm.

Applications: These stages are suitable for general automation, photonics, scientific instrumentation, and semiconductor industries, offering high precision and stability for demanding positioning tasks.

Additional Features: Some models offer vacuum-compatible versions, noncontact limit switches, and self-locking mechanisms for enhanced performance and reliability.

Overview: The document provides detailed specifications and features of various high-precision XY stages used in motion and positioning applications. These stages are equipped with either DC motors, stepper motors, or magnetic direct drives, and are designed for applications requiring high accuracy and stability.

Specifications:

Incremental Encoder: Provides 1 nm resolution for precise position measurement.
Rotary Encoder: Offers 20000 impulses per revolution for accurate rotational positioning.
Crossed Roller Guide: Ensures high guiding accuracy and load capacity with anti-creep features.

Drive Types:

Stepper Motors: 2-phase motors provide high torque at low velocities and higher resolution.
DC Motors: Known for high velocity constancy, low vibration, and high velocities.
Magnetic Direct Drive: Ironless 3-phase linear motors for high precision and velocity.

Key Features:

Travel Range: Options include 205 mm × 205 mm and 305 mm × 305 mm.
Velocity: Up to 200 mm/s for magnetic direct drive stages.
Repeatability: Unidirectional repeatability as low as 0.05 μm.
Load Capacity: Up to 200 N for certain models.

Applications: These stages are suitable for biotechnology, laser cutting and marking, medical industry, metrology/testing, automated optical inspection, and scanning.

Mechanical Properties:

Drive Screw Type: Ball screw with a 2 mm pitch.
Material: Aluminum, black anodized for durability.

Positioning and Sensors:

Integrated Sensors: Incremental linear and rotary encoders for precise positioning.
Sensor Signals: Sin/cos and A/B quadrature signals for accurate feedback.

Miscellaneous:

Operating Temperature Range: 5 to 40 °C.
Connection: Various Sub-D connectors for motor and sensor connections.
Controllers: Compatible with SMC Hydra, C-891, C-885, ACS modular controllers, among others.

Specifications:
1. Mechanical Properties: The document outlines various mechanical properties of different stages, including load capacities, permissible torques, and guide types. For instance, the L-738 Precision XY Stage has a load capacity of 50 N max and uses a crossed roller guide with an anti-creep system.
2. Drive Properties: The stages are driven by different motor types, such as ironless 3-phase linear motors and DC motors, with specific operating voltages and force constants. For example, the V-738 PIMag® High-Precision XY Stage uses an ironless 3-phase linear motor with a nominal operating voltage of 48 V.
3. Positioning: The stages feature integrated sensors like incremental linear encoders, providing high resolution and repeatability. The A-311 PIglide IS Planar Scanner offers a resolution to 1 nm and bidirectional repeatability of ±0.05 μm.
4. Miscellaneous: Operating temperature ranges from 5 to 40 °C, and materials used include aluminum and stainless steel. The stages are compatible with various controllers, and all necessary cables are included.

Procedures and Applications:
1. Applications: The stages are suitable for a range of applications, including biotechnology, laser cutting, medical industry, and metrology/testing.
2. Operating Conditions: The document specifies conditions such as operating pressure and air quality for systems like the A-322 PIglide HS Planar Scanner, which requires clean, oil-free air.

Recommendations:
1. Controller Compatibility: It is recommended to use specific controllers like the SMC Hydra or ACS modular controller for optimal performance.
2. Custom Designs: The document suggests inquiring about custom designs to meet specific application needs.

Key Data from Tables and Figures:
1. Travel Range and Velocity: The L-738 Precision XY Stage offers a travel range of 102 mm × 102 mm and a velocity of up to 90 mm/s.
2. Load and Torque Capacities: The V-738 stage has a load capacity of 100 N max and permissible torque in θX, θY of 130 N·m max.
3. Resolution and Repeatability: The A-311 PIglide IS Planar Scanner provides a resolution to 1 nm and bidirectional repeatability of ±0.05 μm.

This structured summary provides an overview of the technical specifications, applications, and recommendations for the various stages described in the document, highlighting critical parameters and operational guidelines.

Specifications and Motion Positioning:
The document outlines specifications for various motion and positioning systems, focusing on drive specifications per motor, with two motors located at the gantry axis. It emphasizes the importance of connecting an air pressure sensor to the Motion-Stop input of the controller to protect the stage from damage. Specifications are detailed for different models (A-322.Axx, A-322.Bxx, A-322.Cxx, A-322.Dxx) with parameters such as travel range, sensor resolution, repeatability, accuracy, pitch, yaw, straightness, flatness, orthogonality, velocity, and acceleration.

Mechanical Properties:
The document provides mechanical properties including load capacity, moved mass, overall mass, and guide type, which are consistent across models. Air bearings are used for guidance.

Rotation Stages:
Several rotation stages are described, including M-116, RS-40, DT-34, DT-80, M-060/M-061/M-062, and L-611. Each stage has unique features such as unlimited travel range, compact design, high resolution, and specific applications like automation, precision micro-assembly, and scientific instrumentation. Specifications include rotation range, sensor resolution, repeatability, velocity, mechanical properties, and drive properties.

Applications and Technology:
The document highlights applications in automation, precision micro-assembly, scientific instrumentation, medical industry, metrology/testing, photonics, and sample inspection. It also references incremental encoder technology and offers vacuum-compatible versions for certain models.

Controllers and Custom Designs:
Recommended controllers and drivers are listed for each stage, with options for custom designs. The document notes that connecting cables for motors and sensors are not included and must be ordered separately.

Overview: The document provides detailed specifications and features of various precision rotation stages and motion positioning systems, highlighting their applications, mechanical properties, drive properties, and sensor capabilities.

Specifications:

Sensor Signal: Sin/cos, 1 V peak-peak; A/B quadrature, TTL.
Sensor Resolution: Rotary encoder resolution up to 20000 counts per revolution; angle measuring system resolution up to 23600 lines per revolution.
Design Resolution: As low as 0.017 μrad for certain models.
Repeatability: Unidirectional repeatability as low as 0.5 μrad; bidirectional repeatability ±5 μrad.
Motor Types: Includes 2-phase stepper motors, DC motors, BLDC motors, and torque motors.
Operating Voltage: Nominal 24-48 V, with maximum up to 80 V for certain models.

Mechanical Properties:

Bearing Types: Crossed roller bearings and air bearings for optimized flatness and stability.
Load Capacity: Axial force up to 500 N; radial force up to 200 N.
Torque: Power on torque up to 4 N·m; permissible torque in various axes specified.

Drive Properties:

Drive Types: Ironless and iron-core torque motors, with specifications on nominal and peak currents, resistance, and inductance.
Velocity: Angular velocity up to 360 °/s for certain models.

Applications: The systems are suitable for use in the medical industry, metrology/testing, photonics, precision micro assembly, sample inspection, automation, biotechnology, and semiconductor industries.

Additional Features:

Unlimited Travel Range: Many models offer unlimited rotational travel.
Cleanroom Compatibility: Some models are designed for cleanroom environments.
Direct Drive: Ensures high dynamics and stability.

Miscellaneous:

Operating Temperature Range: 5 to 40 °C.
Material: Typically aluminum, black anodized, with stainless steel and red bronze components.
Connection Types: Various Sub-D connectors for motor and sensor connections.
Recommended Controllers: Includes single-axis and multi-axis controllers, with specific models recommended for different systems.

Overview: The document provides detailed specifications and features of various motorized precision goniometers and rotation stages designed for applications in metrology, testing, optical alignment, and scientific instrumentation. It includes information on motion and positioning capabilities, mechanical properties, drive properties, and recommended controllers.

Specifications:

Rotation Stages: Features include friction-free, motorized platforms with diameters of 200 mm or 300 mm, low profile, and options for self-locking at rest. They utilize direct drive technology with absolute and incremental encoders.
Goniometer Stages: The WT-85, WT-100, WT-90, and WT-120 models offer rotation ranges from 10° to 90°, with repeatability as precise as 2.7 μrad. They support load capacities up to 20 kg and offer options for direct position measurement.

Mechanical Properties:

Stages are constructed with materials like hardcoat aluminum and stainless steel fasteners, ensuring durability and precision.
Load capacities vary by model, with axial and radial limits specified for each.

Drive Properties:

Utilize torque motors, DC motors, and stepper motors, with specific voltage and torque specifications provided.
Drive systems include ball screws and worm gears, with detailed gear ratios and drive screw pitches.

Positioning and Sensors:

Integrated sensors include rotary encoders and angle measuring systems, providing high-resolution feedback for precise positioning.
Sensor signals are typically AB quadrature or Sin/cos, with specific resolutions and signal periods detailed.

Applications: These stages are suitable for sample inspection, precision micro-assembly, photonics, and other scientific applications requiring high precision and repeatability.

Recommendations:

For optimal performance, stages should be used with recommended controllers and drivers, and connecting cables must be ordered separately.
Custom designs and materials are available upon request, and users are advised to contact the manufacturer for application-specific parameters and quotes.

Overview: The document provides detailed specifications and features of various high-resolution linear actuators, each designed for specific applications such as general automation, optical alignment, and scientific instrumentation. The actuators are equipped with different types of motors, sensors, and drive mechanisms to cater to diverse operational needs.

Specifications: The actuators vary in travel range, resolution, velocity, and force capacity. For instance, the M-227 series offers travel ranges of 10, 25, and 50 mm with a minimum incremental motion of 0.05 μm, while the M-235 series supports travel ranges of 20 and 50 mm with a push/pull force capacity of up to 120 N. The L-239 series is noted for its high load capacity of up to 300 N and a travel range of 52 mm.

Mechanical and Drive Properties: The actuators utilize different drive screws such as leadscrews and ball screws, with varying thread pitches and gear ratios. Motor types include DC gear motors, stepper motors, and brushless DC motors, each offering specific advantages in terms of speed, precision, and control.

Controllers and Compatibility: Recommended controllers for these actuators include models like C-863, C-884, and C-885, which support single to multiple axis operations. The document emphasizes the inclusion of necessary cables for operation with these controllers, with additional cables available as accessories.

Applications and Features: The actuators are suitable for applications requiring high precision and reliability, such as electronics manufacturing and precision micro-assembly. Features like nonrotating end pieces, incremental encoders, and vacuum-compatible versions enhance their versatility and performance in demanding environments.

Miscellaneous: Operating temperature ranges typically span from -20 to 65°C, with materials used including aluminum, stainless steel, and brass. The document also highlights the availability of custom designs to meet specific user requirements.

Overview: The document provides a comprehensive overview of motion control systems, focusing on high-performance solutions for industrial automation. It highlights the importance of robust and reliable systems that offer submicrometer accuracy, high dynamics, and throughput, especially in the context of Industry 4.0.

Key Features of Motion Control Systems:

Functional safety and communication via fieldbus interfaces.
Autotuning and synchronization of individual axes.
Multidimensional motion profiles and 3-DOF compensation of position error.
Yaw compensation for gantry solutions and suppression of system oscillation.
Robust control behavior and easy integration into higher-level automation environments.

High-Performance Motion Control Systems: ACS Motion Control offers modular, distributed-architecture systems with three levels: user interface, motion controllers, and universal drive modules. These systems are designed for high-throughput and high-precision multi-axis applications, ensuring that mechanics, drive technology, and control electronics are perfectly matched.

Available Modules: The document lists various ACS Motion Control modules, including:

SPiiPlusEC: Powerful motion controller and EtherCAT® network manager for up to 64 axes.
MC4Unt: Customized multi-axis control using standard components.
SPiiPlusES: High-performance multi-axis controller with built-in EtherCAT® bridge.
SPiiPlusCMnt: 32-axis EtherCAT® master control module with built-in drives.
SPiiPlusSPC and SPiiPlusSMC: Interfaces for high-precision laser processing and machining applications.

Drive Modules: The document details various drive modules, including:

Universal Drive Modules with AC and DC options.
NanoPWM Drive Modules for precise control.
Stepper Drive Modules for specific applications.

PIglide Motion Controllers: The A-81x and A-82x series offer fully integrated electronics solutions for PIglide air bearing stages, featuring:

Closed-loop servo control with PID and parameter changing during operation.
Support for sine/cosine and BiSS-C encoders.
ServoBoost™ technology for consistent performance.

Conclusion: The document emphasizes the importance of integrated solutions from a single-source supplier for sophisticated positioning technology and high-performance control solutions, ensuring faster start-up and flexibility in implementing new requirements.

Specifications:
The document outlines various motion controllers and motor types, including voice coil, brushed DC, and brushless 3-phase motors with sine commutation. It specifies encoder options such as incremental sine/cosine and absolute encoder BiSS-C, with an interpolation factor adjustable by software. The output voltage is consistently 72 VDC, with a continuous output current of 10 A and a peak of 20 A. The power supply requirement is 200 – 240 V AC, single phase, 50 – 60 Hz.

Procedures:
The document describes the setup and operation of motion controllers, including the SMC Hydra Universal Motion Controller and the C-891 PIMag® Motion Controller. It details the communication interfaces like Ethernet, USB, and RS-232, and the use of software such as PIMikroMove and LabVIEW for operation and programming.

Standards and Recommendations:
Safety features include switch-off via external switch, overload protection, and overheat protection. The document recommends using the PI General Command Set (GCS) for command execution and provides guidelines for operating temperature ranges and power consumption.

Key Data from Tables and Figures:
The document includes detailed specifications for various controllers, such as the C-885 PIMotionMaster, which supports multiple controller modules and offers easy installation and scalability. It also highlights the modular design for efficient communication and reduced wiring effort.

Critical Information:
The document emphasizes the importance of proper configuration and startup procedures, the use of appropriate power supplies, and adherence to specified operating conditions to ensure optimal performance and safety.

Communication Interfaces and Operation: The document outlines various communication interfaces including USB, RS-232, and Ethernet, supporting up to 16 units on a single interface. It also details motor connections and I/O lines for automation purposes. The command set used is the PI General Command Set (GCS), and user software includes PIMikroMove with APIs available for multiple programming languages.

Electrical Properties: The document specifies the electrical properties for different models, including maximum output voltage and power, power consumption, and current limitations. Operating voltage ranges and temperature conditions are also provided.

Motion Control Features: The document describes motion control features such as PID servo control, macro programming language, and trajectory support for motion patterns. It includes details on motion profiles, encoder inputs, and stall detection mechanisms.

Digital Motion Controllers: The document provides specifications for digital motion controllers for DC servo motors, highlighting dual-core architecture, supported functions, and extensive software support. It also covers the control of force, position, and velocity for PIMag® voice coil drives.

Gantry Systems: The document discusses gantry systems for high-dynamic precision positioning in three axes, suitable for industrial automation applications. It includes specifications for travel range, sensor resolution, and mechanical properties.

Components and Accessories: The document lists components and accessories such as air bearings, mounting feet, and adapter brackets, emphasizing their applications in positioning, scanning, and metrology.

Overview: The document provides detailed specifications and descriptions of various air bearing modules and related components, focusing on their applications, load capacities, dimensions, and operational parameters. It includes information on motion platforms, rotary air bearings, and hemispherical air bearings, highlighting their suitability for precision tasks in cleanroom environments.

Specifications: The document lists multiple models of air bearing modules, each with specific dimensions, travel ranges, load capacities, and material compositions. For instance, the A-101 to A-109 series offers travel ranges from 50 to 1000 mm and varying load capacities, with materials like hardcoat aluminum and stainless steel fasteners.

Performance Parameters: Key performance metrics such as straightness/flatness, position stability, pitch/yaw, and operating pressure are detailed. For example, straightness/flatness varies from ±1.25 μm to ±5 μm depending on the travel range, while position stability is consistently ±0.05 μm across models.

Air Quality and Consumption: The air quality requirements are stringent, adhering to ISO 8573-1 Class 1 standards for cleanliness and oil-free operation. Air consumption is specified for different models, ensuring efficient operation under nominal pressures.

Applications: The air bearing modules are designed for applications requiring high precision and friction-free motion, such as sample inspection, scanning, metrology, and optical alignment. The modular design allows for customization and integration into various systems.

Accessories and Options: The document mentions available accessories like mounting hardware, encoders, and air preparation kits, which enhance the functionality and integration of the air bearing modules into existing systems.

Technical Data Tables: Several tables provide detailed technical data, including dimensions, load capacities, stiffness, and air consumption for each model. These tables are crucial for selecting the appropriate module based on specific application requirements.

Conclusion: The document serves as a comprehensive guide for selecting and implementing air bearing modules in precision applications, emphasizing their versatility, precision, and compatibility with cleanroom standards.

Overview: The document provides a comprehensive glossary of terms and technologies related to precision positioning and motion control systems, particularly focusing on piezo and motor technologies developed by Physik Instrumente (PI) GmbH & Co. KG.

Key Sections:

Open-loop Operation: Describes the suitability of open-loop systems for applications requiring fast response and high resolution, noting that such systems are not suitable for electromagnetic direct drives.
Operating Conditions: Discusses the safe operating temperature range and the need for recalibration at different temperatures. Performance specifications are valid at room temperature.
Patents and Technologies: Highlights PI's patents in piezo and motor technology, including parallel kinematics and hexapods, which allow precise positioning in multiple degrees of freedom.
Sensor Technologies: Covers various sensor types, including piezoresistive sensors and rotary encoders, emphasizing their roles in measuring position and ensuring accuracy.
Drive Technologies: Details on PIMag® Magnetic Linear Motors and Voice Coil Drives, explaining their applications in high dynamics and precision positioning.
Software and Compatibility: Lists user software and functions compatible with various platforms, including LabVIEW and MATLAB, for enhanced control and integration.
Vacuum Compatibility: Notes the availability of vacuum-compatible versions of PI's drive technologies for use in specialized industrial environments.

Critical Information:

Performance Specifications: Valid at room temperature, with recalibration recommended for different operating temperatures.
Operating Voltage and Protection: Specifies the allowed control input voltage range and overtemperature protection features.
Dynamic Capabilities: Discusses peak current availability for short durations and the implications for dynamic performance.
Integration and Compatibility: Emphasizes the ease of integrating PI's technologies into existing systems via standardized fieldbus systems.

Conclusion: The document serves as a detailed reference for understanding the technical aspects and applications of PI's precision positioning and motion control technologies, highlighting their versatility and adaptability to various industrial needs.

Catalog excerpts

Precision Positioning and Motion Control-1

VOICE COIL BALL SCREW MICRO POSITIONING ENGINEERED SYSTEMS DIRECT DRIVE PRECISION POSITIONING AND MOTION CONTROL LINEAR MOTOR HIGH DYNAMICS PIMAG®

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Precision Positioning and Motion Control-2

Precision Positioning and Motion Control Product Finder Online – What is the easiest way for you to find the best positioning solution? The printed catalog is a major showcase for PI and, as well as presenting the entire product range, it also acts as a reference for all of our motion solutions. However, to take advantage of the latest products and developments, we recommend using the product finder on the PI website www.pi.ws. How to use the product finder: Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results. Select...

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Precision Positioning and Motion Control-3

Introduction Translation Stages Linear Actuators Motion Control Rotation Stages Components & Accessories More information, step-files and downloads are available from our website www.pi.ws. All data subject to change without notice, ©PI 2018. Terms and Technology Glossary Gantry Systems

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SEMICONDUCTOR PRODUCTION AND INSPECTION The automation of process steps in production and inspection is steadily on the increase. At the same time, the requirements to accuracy required in motion and positioning are growing. Today, in many industrial areas accuracy levels are needed as they were needed just a few years ago in research institutions. PI with its linear stages, rotation stages, and lifting stages, as well as more complex multi-axis kinematics, offers excellent solutions for industrial applications in many growing markets and even for very general automation tasks with challenging...

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Precision Positioning and Motion Control-5

PHOTONICS PACKAGING AND OPTICAL ALIGNMENT During production and inspection of components with optical data transmission, it is important to align fibers or fiber arrays for optimum connection with the highest possible accuracy. Position tolerances way under 50 nm are usual and multi-channel inputs e and outputs require simultaneous alignment in several axes. eous In this multi-axis system for wafer inspection and photonics alignment, high speed linear motor or stages are used for the long xy stroke, e while mechanical stages with stepper motors and screw drives are used for the other degrees...

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Precision Positioning and Motion Control-6

Automated testing procedures ensure quality, e.g., in the production process of printed circuit boards (PCBs). Thereby, the precise control of the forces acting on the sensitive boards as well as the fast capturing and interpretation of measurement data are extremely important INDUSTRIAL MANUFACTURING The field of industrial manufacturing and assembly offers the widest range of applications for the PI micropositioning stages. In many applications the precision requirements keep growing for industrial application. For example, digital printing becomes more and more common. The accuracy of the...

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Precision Positioning and Motion Control-7

LASER MATERIAL PROCESSING Laser cutting for example, often requires lowest tracking errors while following the arbitrary path of the customer’s workpiece. This means very dynamic multi-axis motion that is ideally realized by using linear motor solutions which combine dynamics and accuracy. An additional vertical motion is typically realized using a ball screw stage. For improved dynamics in the Z-direction, a linear motor axis can be equipped with a mechanical, magnetic or pneumatic weight balance. These applications can be served with standard linear stages with a debris protection or with fully...

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Precision Positioning and Motion Control-8

Typical 2-axis setup with clear aperture for the scanning of larger surfaces 3-axis combination of linear motor stages. The vertical axis uses weight compensation and it can, therefore, move with high dynamics while, at the same time, offering the best positioning accuracy AUTOMATED OPTICAL INSPECTION (AOI) To increase productivity, it is very common to do a meander scan. While one axis generates a motion with constant speed, the perpendicular axis moves one step to the next line. Pictures are taken during the constant speed motion which leads to high requirements in straightness and flatness...

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Precision Positioning and Motion Control-9

The sample positioning setup inside the holography endstation uses a variety of PI’s motorized translation and rotary stages, as well as piezo stages for ultra-fine positioning (Image: M. Osterhoff, Institute for X-Ray Physics, Georg-August-University Göttingen) BASIC RESEARCH, SCIENTIFIC INSTRUMENTATION Why scientists rely on PI: Creativity for Research and Development. Many scientific publications cite PI systems because they are an important prerequisite for successful research and development projects. Customized designs for university research are everyday business for PI, also for environmental...

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Precision Positioning and Motion Control-10

Linear Actuators ■ Optional force control ■ Screw or voice coil drive ■ Compact Linear Stages ■ Travel range up to several 100 mm ■ Screw or direct drive ■ Mechanical or air bearing ■ Incremental or absolute encoders ■ Vacuum or clean room compatible Rotary Stages ■ 360° or goniometer stages ■ Worm or direct drive ■ Mechanical or air bearing ■ Incremental or absolute encoders ■ Vacuum or clean room compatible XY Stages ■ Screw or direct drive ■ Mechanical or air bearing ■ Incremental or absolute encoders ■ Optional aperture

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Precision Positioning and Motion Control-11

Broad Range of Standard Axes The PI Group has many years of experience in the development and construction of highly complex motion systems with the highest precision classes. The experience gained over the years, mainly from customized solutions, has been transferred to the standard products. As a result, a broad spectrum of standard positioning systems has been established, which offers many options within the individual series such as variable travel ranges, different motors, or adaptations to different ambient conditions such as a vacuum and clean-room environments. Today, the use of PI positioning...

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Precision Positioning and Motion Control-12

Technological Depth for Optimized Products From Standard to Custom Products Customization on all levels of integration PI’s proprietary technological know-how and vertically integrated production are the basis for the successful development of customized motion systems from scratch. All technologies can be adapted specifically to an application. Examples range from a PIMag® voice coil drive for integration into an OEM system, to complex multi-axis positioning setups, to fully integrated, turn-key system solutions. Individual assembly of a stage PI produces core components in-house for its precision...

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