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Precision and Dynamics with Piezo Motor Stages

Precision and Dynamics with Piezo Motor Stages
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Precision and Dynamics with Piezo Motor Stages - 1

CUSTOM DESIGNS CONSTANT VELOCITY RELIABLE PILINE® PRECISION AND DYNAMICS WITH PIEZO MOTOR STAGES MOTION CONTROL TJ PIEZOMIKES 2 COST EFFECTIVE n 1- n —I z C/3 PIEZOWALK® HIGH DYNAMICS MULTI-AXIS SOLUTIONS

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Precision and Dynamics with Piezo Motor Stages - 2

Precision and Dynamics with Piezo Motor Stages Product Finder Online – What is the easiest way for you to find the best positioning solution? The printed catalog is a major showcase for PI and, as well as presenting the entire product range, it also acts as a reference for all of our motion solutions. However, to take advantage of the latest products and developments, we recommend using the product finder on the PI website www.pi.ws. How to use the product finder: Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of...

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Precision and Dynamics with Piezo Motor Stages - 3

Introduction Linear Stages XY Stages and Microscopy Solutions Motion Control PiezoMike Actuators Parallel Kinematics / Hexapods More information, step-files and downloads are available from our website www.pi.ws. All data subject to change without notice, ©PI 2018. Terms and Technology Glossary

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Precision and Dynamics with Piezo Motor Stages - 4

Piezomotors position a laser for use in an eye surgery application fast and reliably LIFESCIENCE AND MICROSCOPY Optical methods have been relying on PI positioning systems for years, e.g. for aligning optical systems or samples. Piezo motors and actuators are best for replacing conventional motor/spindle driven systems because they are more compact, more precise and faster. Other non-optical microscopic processes, such as SEM (scanning electron microscope) and AFM (atomic force microscope), use PI systems due to their high accuracy and dynamics. The XY stage with PILine® technology ensures...

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Precision and Dynamics with Piezo Motor Stages - 5

AUTOMATION OF HANDHELD OR PORTABLE DEVICES Leica Geosystems, a leading manufacturer of high-precision surveying instruments, relies on PILine ® direct drive technology in their new total station product line. Total stations are used for angle and distance measurement in geodesy. Customer requirements included an extensive increase of the rotation speed and the angular resolution compared to the previously used conventional drive. The typical usage of the device consists of rotating a mass of 6 kg (15,000 kg/m²) in alternating directions, with a total of 7,000 h or 2,500 km of operation....

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Precision and Dynamics with Piezo Motor Stages - 6

SCIENTIFIC INSTRUMENTATION From small-scale laboratory automation to experimental endstations of beamlines in synchrotrons and other particle accelerators, a large variety of applications in the scientific environment benefits from piezo based, sub-nanometer precision scanning and positioning. The conditions of use vary, and include ultrahigh vacuum, nonmagnetic or cryogenic. The miniature parallel-kinematic Q-845 aligns the probe extremely flexibly in all 6 degrees of freedom. The requirements are the lowest possible weight and an angular accuracy of up to 0.001° respectively, an error of...

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Precision and Dynamics with Piezo Motor Stages - 7

Eight Q-Motion® axes position components precisely to each other in this system. The six-axis hexapod aligns micrometer-sized components relative to the manipulator with an angular resolution under 10 µrad. Even the feeds from below and the side are moved by customized Q-Motion® linear stages. (Image: VUB Vrije University Brussels, Belgium) OPTOMECHANICS High throughput and high resolution are essential for optical particle analysis technology. Particle of different sizes are detected in liquids of all kind, ranging from monitoring of pipelines to ecological environments such as rivers or...

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Precision and Dynamics with Piezo Motor Stages - 8

Custom Examples Picture Wall This customized, nonmagnetic, and HV-compatible hexapod is only 130 mm in height and has a diameter of 140 mm. Modified PiezoMike inertia drives serve as drives. With 5 mm/s, they are considerably faster than the classical PiezoMikes. A special joint construction ensures the necessary stiffness and at the same time, a long travel range of up to 10 mm. This customized tripod with PiezoMike inertia drives is used for adjusting a mirror. The mirror can be moved along an axis linearly and tilted in two further orthogonal axes. The constructive challenge was to...

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Precision and Dynamics with Piezo Motor Stages - 9

This miniature hexapod was developed on the basis of fast PILine® ultrasonic motors to enable fast motion in all six spatial directions (three linear, three rotational). The parallelkinematic SpaceFAB design makes a particularly low overall height of only 80 mm possible. The individual axes can be commanded with up to 120 mm/s. This three-axis system integrates two linear axes and a rotational axis and is used for aligning and fast, surface area scanning of photosensitive sensors. The use of PILine® ultrasonic motors makes shorter process times and a small installation space possible....

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Precision and Dynamics with Piezo Motor Stages - 10

Custom Examples Picture Wall PILine® ultrasonic motors are suitable for directly driven rotary motion. This special product has a clear aperture of Ø 53 mm for accommodating 2” lenses and is also made completely of nonmagnetic materials. Even the rotation bearing is a proprietary development from PI. The low-profile design allows stacking of several rotational axes while maintaining small distances between the lenses. It is also important that the control unit for motion axes is designed according to customer specifications, in particular for highly integrated solutions in mobile end...

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Precision and Dynamics with Piezo Motor Stages - 11

Options of Customizations / OEM Capabilities PILine® ultrasonic motors can be designed in different sizes, to generate various forces, and for different axes of motion. This makes it possible to develop custom-fit, customer-specific solutions that allow linear or rotary motion with velocities up to 400 mm/s, forces to 20 N, and minimum incremental motion to 10 nm. PI has the entire manufacturing chain at its disposal for manufacturing piezo actuators. The latest development is an ultrasonic piezo motor that can be operated with allow voltage of less than 12 volts and is particularly...

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Precision and Dynamics with Piezo Motor Stages - 12

NANOPOSITIONING WITH PIEZOMOTORS OVER LONG TRAVEL RANGES Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on different features. For example, PI piezomotors that feature high stiffness and resolutions in the nanometer range are used for nanometer-precision stages with travel ranges over 1 mm. General Properties of Piezomotor Drives n elf-locking S when powered off with maximum holding...

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