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Precision and Dynamics with Piezo Motor Stages

Precision and Dynamics with Piezo Motor Stages

Product catalog summary

Introduction
The document introduces PI's precision and dynamics solutions using piezo motor stages, emphasizing their high dynamics, multi-axis capabilities, and reliability. It highlights the use of the online product finder for the latest products and developments.

Markets and Applications

Life Sciences and Microscopy: PI positioning systems are used for optical alignment and non-optical microscopic processes due to their precision and speed.
Automation of Handheld Devices: PILine® technology is used in high-precision surveying instruments, offering increased rotation speed and angular resolution.
Scientific Instrumentation: Applications include wafer alignment and sub-nanometer precision scanning in various scientific environments.
Micromanipulation and Optomechanics: Systems like Q-Motion® stages are used for precise component positioning and optical particle analysis.

Custom Examples
The document provides examples of customized solutions using PILine® and Q-Motion® technologies, such as a nonmagnetic hexapod for precise positioning, a compact tripod for mirror adjustment, a miniature XYZ setup for industrial microadjusting, and a three-axis system for fast scanning of photosensitive sensors.

Customization and OEM Capabilities
PI offers customization options for piezo motors, allowing for various sizes, forces, and motion axes, including low-voltage ultrasonic piezo motors suitable for medical applications.

Products
The document lists various products, including linear stages, actuators, motion controllers, and accessories, each designed for specific applications and environments.

Conclusion
PI provides a wide range of motion control solutions with customization options to meet specific industry needs, emphasizing precision, reliability, and adaptability.

Introduction to Piezomotors
Piezomotors leverage the unique properties of piezo actuators to achieve extended travel ranges. PI offers various piezomotor technologies tailored for different applications, such as high stiffness and nanometer precision for stages with travel ranges over 1 mm. Key technologies include PiezoWalk® NEXACT®, PILine® Ultrasonic Motors, Q-Motion® Inertia Drives, and PiezoMike Actuators, each with specific features like high force, low velocity, and cost-effectiveness.

General Properties of Piezomotor Drives
Piezomotors are self-locking when powered off, do not generate or are affected by magnetic fields, offer scalable travel ranges, and provide nanometer-precision resolution. They are easily integrated mechanically and optimized for either high velocities or high forces.

Comparison with Electromotors
Piezomotors offer advantages over traditional motor-leadscrew combinations by providing direct linear motion, faster response, better stability, and smaller design possibilities. They are ideal for precise and stable positioning over long periods.

Specifications Overview
The document provides a detailed comparison of different piezomotor technologies based on travel range, feed force, velocity, lifetime, dimensions, and compatibility with ultra-high vacuum and non-magnetic environments.

Applications
Piezomotors are used in various applications, including mobile devices, semiconductor manufacturing, optical microscopy, and electron microscopy. Each application has specific requirements such as high force, stability, high resolution, and compatibility with clean rooms and ultra-high vacuum environments.

PI Group Overview
PI (Physik Instrumente) is a leading manufacturer of nanopositioning technology, known for its high-quality products and customer-focused solutions. The company has a global presence with subsidiaries in multiple countries and offers a wide range of products from standard to OEM solutions.

Technological Capabilities
PI develops and manufactures its core technologies, including piezo components, magnetic direct drives, air bearings, and nanometrology sensors. This allows PI to offer advanced motion and positioning solutions without technological restrictions.

Production and Quality Assurance
PI's production capabilities include a large production space with cleanrooms, air-conditioned measuring conditions, and vacuum chambers. The company emphasizes continuous improvement and flexibility in production processes to meet customer demands efficiently.

Vacuum Positioning Solutions
PI provides high-precision solutions for vacuum conditions, focusing on optimal drive technology selection and mechanical design to meet specific application requirements. The company offers vacuum chambers for testing and measurement under real operating conditions.

OEM Services
PI offers comprehensive OEM services, including global account management, risk assessment, and production of large series. The company ensures standardized performance control and provides sustainable spare parts service.

Global Service and Support
PI is committed to providing lifelong support to its customers, including on-site training to optimize the use of PI systems.

Introduction
The document outlines the services and products offered by PI, focusing on their PI systems and linear stages. PI provides comprehensive support from the initial consultation through to the purchase and maintenance of their systems, ensuring global coverage with service hubs in Asia, China, Europe, and the USA.

PI's Standard On-Site Services

Set up and Commissioning: On-site support for unboxing, setting up, and commissioning the PI system.
Training Program: User training on software, programming, and system performance optimization.
Maintenance Systems Health Check: Preventative maintenance to extend the life of the motion device.
Support: Ongoing remote and on-site support to maximize system uptime.

Contracted Services
Customers can subscribe to Contractual Support Services, which include agreed service levels, remote technical support, and on-site expert response for repairs or replacements.

Extended Warranty
PI offers extended warranties beyond the standard period, covering repair or replacement costs due to poor workmanship or faulty materials.

Linear Stages Overview
The document details various linear stages, including PILine® and Q-Motion® stages, highlighting their specifications and applications.

U-521 PILine® Linear Stage

Compact design with ultrasonic piezo motor.
Velocity up to 200 mm/s and minimum incremental motion of 0.3 µm.
Self-locking feature saves energy and reduces heat generation.
Applications include autofocus systems, micro manipulators, and scanning imaging.

U-523 PILine® Linear Stage

Fast positioning with high guiding accuracy.
High sensor resolution of 10 nm and low-noise operation.
Applications include autofocus systems and sample positioning.

Q-521 Q-Motion® Miniature Linear Stage

Smallest linear stage with high resolution and affordable price.
Encoder resolution up to 1 nm and suitable for vacuum environments.
Applications include fine adjustment in photonics and microscopy.

Q-522 Q-Motion® Miniature Linear Stage

Compact design with direct position measurement.
Minimum incremental motion up to 2 nm and suitable for vacuum environments.
Applications include semiconductor technology and test laboratories.

Specifications:

Linear Stages: The document details various models of linear stages, such as Q-522 and Q-545, which utilize piezoelectric inertia drives. These stages offer high precision with travel ranges from 13 mm to 52 mm and velocities up to 10 mm/s. They are suitable for vacuum environments and have load capacities ranging from 10 N to 25 N.
Drive Properties: The stages use piezoelectric inertia drives, which are compact and provide high holding forces. They operate at frequencies up to 20 kHz and are compatible with vacuum environments.
Material and Construction: The stages are constructed from aluminum and steel, with dimensions varying by model. They are designed for high precision and stability.

Procedures and Recommendations:

Vacuum Operation: For vacuum environments, a reduced duty cycle of 20% and a maximum motor push/pull force of 30% compared to standard environments are recommended.
Custom Designs: The document encourages inquiries about custom designs to meet specific application needs.

Applications:

Microscopy and Photonics: The stages are suitable for fine adjustment in microscopy, photonics, and alignment applications.
Semiconductor Technology: They are used in semiconductor technology for precise positioning and alignment.

Technology Overview:

Piezoelectric Inertia Drive: This technology provides space-saving, high-precision motion with virtually unlimited travel range.
Direct-Measurement Principle: Some models include noncontact optical linear encoders with resolutions as fine as 1 nm.

Miscellaneous:

Operating Conditions: The stages operate within a temperature range of 0 to 50°C and are constructed to withstand various environmental conditions.
Controllers: Recommended controllers include models E-871, E-873, and E-872, which support high-resolution digital interfaces and software integration for image acquisition.

Overview: The document provides detailed information on various motion and positioning systems, specifically focusing on piezo stages and PILine® XY stage systems for microscopy applications. These systems are designed for high-dynamic tracking and precise positioning, suitable for examining individual molecules and other microscopic applications.

Microscopy Solutions: The document highlights the use of piezo stages for moving objectives and samples in microscopy. It mentions the PInano® tracking stages that offer XYZ motion in a compact package, and the compatibility of piezo scanners with various microscope stages.

Specifications: The document lists several models of piezo positioning stages and PILine® XY stage systems, detailing their compatibility with different microscope brands such as Nikon, Olympus, Leica, and Zeiss. It includes specifications like travel range, sensor resolution, velocity, and load capacity.

Applications: The systems are used in scanning microscopy, metrology, sample positioning, and biotechnology. They offer high velocity constancy and extensive travel ranges, making them suitable for inverted microscopes and high-content processes.

Technical Features: The document describes the use of PILine® ultrasonic piezomotors, which provide high stability and low noise due to their self-locking feature at rest. It also mentions the use of incremental linear encoders for accurate position measurement.

Software and Control: The systems are compatible with various software and programming environments, including PIMikroMove, NI LabVIEW, MATLAB, and others. They support functions like startup macros and data recording.

Rotation Stages: The document details several rotation stages, including the U-624, U-628, and U-651 models, which feature ultrasonic piezo motors and incremental encoders. These stages are designed for applications requiring precise angular adjustments and are available in vacuum-compatible versions.

Key Features of Rotation Stages: These stages offer unlimited rotation range, high velocity, and self-locking capabilities. They are compact and suitable for various applications, including optical filter alignment and micro manipulation.

Conclusion: The document provides comprehensive technical specifications and applications for motion and positioning systems, emphasizing their precision, compatibility, and versatility in microscopy and other scientific fields.

Overview: The document provides detailed specifications and applications for various Q-Motion® and NEXACT® piezoelectric motion and positioning devices, including rotation stages, hexapods, and linear actuators. These devices are designed for high precision and are suitable for vacuum environments.

Q-622 and Q-632 Rotation Stages: These miniature rotation stages are equipped with piezoelectric inertia drives and are available with or without position sensors. They offer a rotation range of over 360°, with the Q-622 having a 22 mm turntable diameter and the Q-632 a 30 mm diameter. Both models are suitable for vacuum environments and have specific velocity and resolution capabilities.

Q-845 and Q-821 SpaceFAB Robots: These devices provide six degrees of freedom with high precision and stiffness. The Q-845 offers a travel range of ±7 mm in X and Y, and ±5 mm in Z, while the Q-821 offers slightly smaller ranges. Both are equipped with incremental encoders and are suitable for applications requiring fine adjustments.

N-865 NEXACT® SpaceFAB: This hexapod design offers six degrees of freedom with a high load capacity and precision. It features a NEXACT® piezo walking drive and is suitable for vacuum environments. The device is self-locking, reducing energy consumption and heat generation.

N-450 PiezoMike Miniature Linear Actuator: This actuator is designed for optical alignment and mirror adjustment, offering a step size of 15 nm and a feed force of 14 N. It is 30% smaller than the N-470 model and is suitable for vacuum environments.

Applications: The devices are used in various fields such as photonics, microscopy, semiconductor technology, and test laboratories. They are particularly useful for fine adjustments and alignment tasks.

Recommendations: For vacuum operations, a reduced duty cycle and rotation speed are recommended to ensure optimal performance and longevity of the devices.

Overview: The document provides detailed specifications and applications for various PiezoMike linear actuators utilizing Q-Motion® piezoelectric inertia drive technology. These actuators are designed for high-resolution and stable positioning, suitable for optical alignment, mirror adjustment, and autofocus applications. Vacuum-compatible versions are available.

Key Specifications:

N-470 PiezoMike Linear Actuator: Offers a holding force of over 100 N, a step size of 20 nm, and a travel range of 7.5 mm to 26 mm. It features a compact design, self-locking mechanism, and a lifetime of over 1 billion steps.
N-472 PiezoMike Linear Actuator: Includes an integrated incremental encoder for closed-loop operation, maintaining high stability at target positions. It is vacuum-compatible up to 10–6 hPa.
N-474 PiezoMike Linear Actuator: Known for its strong feed force of 40 N and nonmagnetic, vacuum-compatible design. It operates with a step size of 20 nm and is self-locking at rest.
N-480 PiezoMike Miniature Linear Actuator: Designed for kinematic mirror mounts, it supports optics with diameters of 0.5ʺ, 1ʺ, or 2ʺ. It offers a step size of 1 µrad and is vacuum-compatible up to 10–9 hPa.
N-412 Linear Actuator: An OEM actuator without a position sensor, offering silent operation with a frequency over 20 kHz and a velocity over 5 mm/s. It has a holding force of up to 10 N.

Applications: These actuators are primarily used for precise optical alignment, mirror adjustments, and autofocus mechanisms in various scientific and industrial applications.

Drive Properties: All actuators utilize piezoelectric inertia drive technology, which is compact, inexpensive, and self-locking, requiring no current or heat generation at rest.

Mechanical and Electrical Properties: The actuators feature stainless steel construction, operate within a temperature range of 10 to 40 °C, and require specific electronics for optimal performance.

Customization: The document encourages inquiries about custom designs to meet specific application needs.

Overview: The document provides detailed specifications and functionalities of various motion controllers and piezoelectric drives used in precision positioning systems. It includes information on applications, mechanical properties, drive properties, and electrical properties of different models.

Applications: The technology is applied in optical alignment, mirror adjustment, autofocus, and OEM actuators without position sensors. It offers easy integration with two mounting versions and operates silently at frequencies over 20 kHz, achieving velocities over 5 mm/s with submicron resolution and a holding force up to 10 N.

Specifications: The N-422 model features a travel range of 35 mm, step size of 300 nm, and a maximum velocity of 5 mm/s. It uses a piezo inertia drive with an operating voltage of 48 Vpp and power consumption of 15 W for the actuator and 30 W for the driver input. The operating temperature range is 0 to 50 °C, and it is constructed from stainless steel.

Controllers: The document details several motion controllers, including:

C-867.1U: A single-axis controller with programmable PID control, supporting USB, RS-232, and SPI interfaces. It includes a data recorder and supports various programming interfaces.
C-867.2U2: A two-axis controller for XY positioning with similar features to the C-867.1U but includes TCP/IP support.
C-877.1U11 and C-877.2U12: Compact controllers for ultrasonic piezo motors, supporting one and two axes respectively, with extensive software support and daisy chain networking.
E-873 Q-Motion®: A digital servo controller for piezoelectric inertia drives, offering high precision with a servo cycle time of 50 µs and supporting USB, TCP/IP, and RS-232 interfaces.

Drive Electronics: The document also covers drive electronics for Q-Motion® Piezo Motors, highlighting integrated power amplifiers, PID servo control, and macro programmability for standalone functionality.

Accessories: Various accessories are available, including network cables, pushbutton boxes, and joysticks for manual control.

Conclusion: The document provides comprehensive technical details for integrating and operating precision motion control systems using piezoelectric technology, suitable for applications requiring high precision and reliability.

Overview: The document provides detailed technical specifications and functionalities of various motion control systems and components, primarily focusing on piezoelectric inertia drives and their controllers. It includes information on application programming interfaces, manual control options, and electrical properties.

Specifications: The systems operate at 24 V DC with varying current consumption and temperature ranges. They support multiple programming languages and interfaces, including C, C++, MATLAB, Python, and LabVIEW. The controllers are equipped with PID control, encoder inputs, and support for digital and analog signals.

Controllers and Modules: The document describes several controller modules such as the E-873.3QTU, C-885 PIMotionMaster, and C-867.1xC885, each designed for specific motion control tasks. These modules offer features like point-to-point motion, macro programmability, and data recording capabilities.

Interfaces and Communication: Communication is facilitated through USB and TCP/IP interfaces, with additional options for digital I/O lines. The systems support extensive software packages for enhanced functionality and integration.

Installation and Expansion: The modular design allows for easy installation and expansion, with plug-and-play capabilities for additional controller modules. This design reduces wiring efforts and supports scalable system configurations.

Applications: These systems are suitable for high-precision positioning tasks in various applications, including parallel-kinematic positioners and single-axis positioning systems. They offer sophisticated control using vector algorithms and support for Cartesian coordinates.

Overview: The document provides detailed technical specifications and functionalities of various motion control devices, specifically focusing on piezo inertia drives and related components. It includes information on controllers, driver electronics, and accessories for single-axis and multi-axis systems.

Specifications: The E-871.1A1N PiezoMike Controller is designed for closed-loop PiezoMikes and Q-Motion® positioners. It features a PID controller, broadband encoder input, and interfaces such as TCP/IP, USB, and RS-232. The controller supports extensive software, including NI LabVIEW, MATLAB, and Python, and includes a power supply and necessary cables.

Procedures and Functions: The controller supports point-to-point motion and includes a data recorder and ID chip detection for quick startup. It allows parameter changes during operation and includes safety features like a watchdog timer. Manual operation is possible via an analog joystick.

Driver Electronics: The E-872.401 Q-Motion® Drive Electronics can control up to four linear actuators, with the ability to scale up to 64 channels. It supports full-step and linear modes and includes interfaces for USB and Ethernet. The device is equipped with a powerful macro command language and extensive software support.

OEM Integration: The E-872 Q-Motion® Piezomotor Driver Electronics is a compact module for OEM applications, supporting easy integration with TTL signals for step and direction control. It offers microstep variants for high precision and includes temperature monitoring via SMBus.

Accessories: The document lists various adapter plates and brackets for mounting linear stages, vacuum feedthroughs for different pressure levels, and extension cables for different stage types. These accessories facilitate the integration and operation of the motion control systems in various configurations.

Key Features: The devices are designed for easy integration, compact design, and versatile applications. They offer extensive software support and are suitable for applications requiring silent travel and precise positioning.

Technical Document Summary

1. Specifications

Absolute Encoder: Used for detecting the absolute position of a motion platform, often realized optically with a Pseudo Random Code (PRC) scale.
Closed-loop Operation: Utilizes piezo servo controllers with position sensing and servo-control to compensate for nonlinearity, hysteresis, and creep, achieving subnanometer accuracy.
Drive Type: Supports various drives such as DC motors, piezo stepping drives, and piezo actuators.
Encoder: Determines position, available in linear and rotary types, operating incrementally or absolutely.
Operating Limits: Measured at 20°C, with linear operation within specified limits.

2. Procedures

Direct Metrology: Achieves high accuracy by measuring position directly at the motion platform, minimizing influence from nonlinearity and mechanical play.
Linearization: Digital piezo controllers use algorithms to reduce linearity error to less than 0.01% with capacitive sensors.

3. Standards and Recommendations

Integrated Feedback Sensor: Uses absolute measuring capacitive, piezo resistive, or strain gauge sensors for position information.
Operating Temperature Range: Devices operate safely within specified temperature ranges, with recalibration needed for different temperatures.

4. Key Technologies

PIglide Air Bearing Technology: Allows friction-free positioning with high guiding accuracy and constant-velocity scanning.
PILine® Ultrasonic Piezomotors: Precise, dynamic, and self-locking motors that reduce energy requirements and are suitable for mobile devices.
PIMag® Magnetic Linear Motors: Provide a direct and stiff connection for moving loads.

5. Glossary Highlights

Crosstalk: Deviation from ideal motion in perpendicular axes.
Linearity Error: Deviation of measured position from commanded position, expressed as a percentage of the measuring range.
Noise: Higher in extended measurement ranges for capacitive sensors.

Introduction
This document provides an overview of various motion and positioning technologies, focusing on linear motor stages, voice coil drives, and piezoelectric systems. It highlights their applications, advantages, and technical specifications.

Linear Motor Stages
Linear motor stages are designed for high dynamics and precision positioning, ideal for constant-velocity scanning applications. They feature smooth-running precision linear guides with crossed roller bearings and operate without contact, ensuring reliability. Integration into existing systems is facilitated by standardized fieldbus systems.

Voice Coil Drives
Voice coil drives are characterized by their low weight and friction-free operation, making them suitable for high dynamics and velocities over limited travel ranges, such as in medical technology. They offer advantages over traditional screw-based solutions, particularly in terms of wear and dynamics, and are free of hysteresis effects.

PIOne Linear Encoder
The PIOne encoder provides high-resolution position measuring with a resolution of less than one nanometer and a linearity error of less than 1%. It features low power consumption, high signal stability, and optimized signal processing for precision positioning.

PIRest Actuator Technology
PIRest utilizes piezo actuator technology for active adjustment of stable gaps with subnanometer precision. It holds its position without power, only requiring power during the positioning sequence.

Q-Motion® Piezoelectric Inertia Drive
Q-Motion® drives are compact, affordable, and offer high holding forces with virtually unlimited travel range. They operate silently and are self-locking, making them suitable for battery-powered applications.

Recirculating Ball Bearings
These bearings are designed for high-precision axes and offer high load capacity, long lifetime, and high guiding accuracy without maintenance.

Specifications and Performance
Performance specifications are valid at room temperature and recalibration is recommended for different temperatures. Custom designs are available for extreme temperatures.

Software and Compatibility
PI offers user software and functions compatible with various platforms, including LabVIEW, MATLAB, and others, providing extensive control and configuration options.

Vacuum-Compatible Versions
PI provides drive technologies suitable for vacuum environments, including piezo actuators and motors designed for strong magnetic fields and cryogenic conditions.

Conclusion
This document outlines the capabilities and applications of PI's motion and positioning technologies, emphasizing their precision, reliability, and adaptability to various industrial needs.

Catalog excerpts

Precision and Dynamics with Piezo Motor Stages-1

CUSTOM DESIGNS CONSTANT VELOCITY RELIABLE PILINE® PRECISION AND DYNAMICS WITH PIEZO MOTOR STAGES MOTION CONTROL TJ PIEZOMIKES 2 COST EFFECTIVE n 1- n —I z C/3 PIEZOWALK® HIGH DYNAMICS MULTI-AXIS SOLUTIONS

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Precision and Dynamics with Piezo Motor Stages-2

Precision and Dynamics with Piezo Motor Stages Product Finder Online – What is the easiest way for you to find the best positioning solution? The printed catalog is a major showcase for PI and, as well as presenting the entire product range, it also acts as a reference for all of our motion solutions. However, to take advantage of the latest products and developments, we recommend using the product finder on the PI website www.pi.ws. How to use the product finder: Select the product type specified by the axes of motion required. Selection of more criteria expands or shortens the list of results....

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Precision and Dynamics with Piezo Motor Stages-3

Introduction Linear Stages XY Stages and Microscopy Solutions Motion Control PiezoMike Actuators Parallel Kinematics / Hexapods More information, step-files and downloads are available from our website www.pi.ws. All data subject to change without notice, ©PI 2018. Terms and Technology Glossary

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Precision and Dynamics with Piezo Motor Stages-4

Piezomotors position a laser for use in an eye surgery application fast and reliably LIFESCIENCE AND MICROSCOPY Optical methods have been relying on PI positioning systems for years, e.g. for aligning optical systems or samples. Piezo motors and actuators are best for replacing conventional motor/spindle driven systems because they are more compact, more precise and faster. Other non-optical microscopic processes, such as SEM (scanning electron microscope) and AFM (atomic force microscope), use PI systems due to their high accuracy and dynamics. The XY stage with PILine® technology ensures fast...

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Precision and Dynamics with Piezo Motor Stages-5

AUTOMATION OF HANDHELD OR PORTABLE DEVICES Leica Geosystems, a leading manufacturer of high-precision surveying instruments, relies on PILine ® direct drive technology in their new total station product line. Total stations are used for angle and distance measurement in geodesy. Customer requirements included an extensive increase of the rotation speed and the angular resolution compared to the previously used conventional drive. The typical usage of the device consists of rotating a mass of 6 kg (15,000 kg/m²) in alternating directions, with a total of 7,000 h or 2,500 km of operation. Several...

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Precision and Dynamics with Piezo Motor Stages-6

SCIENTIFIC INSTRUMENTATION From small-scale laboratory automation to experimental endstations of beamlines in synchrotrons and other particle accelerators, a large variety of applications in the scientific environment benefits from piezo based, sub-nanometer precision scanning and positioning. The conditions of use vary, and include ultrahigh vacuum, nonmagnetic or cryogenic. The miniature parallel-kinematic Q-845 aligns the probe extremely flexibly in all 6 degrees of freedom. The requirements are the lowest possible weight and an angular accuracy of up to 0.001° respectively, an error of less...

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Precision and Dynamics with Piezo Motor Stages-7

Eight Q-Motion® axes position components precisely to each other in this system. The six-axis hexapod aligns micrometer-sized components relative to the manipulator with an angular resolution under 10 µrad. Even the feeds from below and the side are moved by customized Q-Motion® linear stages. (Image: VUB Vrije University Brussels, Belgium) OPTOMECHANICS High throughput and high resolution are essential for optical particle analysis technology. Particle of different sizes are detected in liquids of all kind, ranging from monitoring of pipelines to ecological environments such as rivers or sea...

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Precision and Dynamics with Piezo Motor Stages-8

Custom Examples Picture Wall This customized, nonmagnetic, and HV-compatible hexapod is only 130 mm in height and has a diameter of 140 mm. Modified PiezoMike inertia drives serve as drives. With 5 mm/s, they are considerably faster than the classical PiezoMikes. A special joint construction ensures the necessary stiffness and at the same time, a long travel range of up to 10 mm. This customized tripod with PiezoMike inertia drives is used for adjusting a mirror. The mirror can be moved along an axis linearly and tilted in two further orthogonal axes. The constructive challenge was to realize...

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Precision and Dynamics with Piezo Motor Stages-9

This miniature hexapod was developed on the basis of fast PILine® ultrasonic motors to enable fast motion in all six spatial directions (three linear, three rotational). The parallelkinematic SpaceFAB design makes a particularly low overall height of only 80 mm possible. The individual axes can be commanded with up to 120 mm/s. This three-axis system integrates two linear axes and a rotational axis and is used for aligning and fast, surface area scanning of photosensitive sensors. The use of PILine® ultrasonic motors makes shorter process times and a small installation space possible. PiezoWalk®...

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Precision and Dynamics with Piezo Motor Stages-10

Custom Examples Picture Wall PILine® ultrasonic motors are suitable for directly driven rotary motion. This special product has a clear aperture of Ø 53 mm for accommodating 2” lenses and is also made completely of nonmagnetic materials. Even the rotation bearing is a proprietary development from PI. The low-profile design allows stacking of several rotational axes while maintaining small distances between the lenses. It is also important that the control unit for motion axes is designed according to customer specifications, in particular for highly integrated solutions in mobile end devices....

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Precision and Dynamics with Piezo Motor Stages-11

Options of Customizations / OEM Capabilities PILine® ultrasonic motors can be designed in different sizes, to generate various forces, and for different axes of motion. This makes it possible to develop custom-fit, customer-specific solutions that allow linear or rotary motion with velocities up to 400 mm/s, forces to 20 N, and minimum incremental motion to 10 nm. PI has the entire manufacturing chain at its disposal for manufacturing piezo actuators. The latest development is an ultrasonic piezo motor that can be operated with allow voltage of less than 12 volts and is particularly suitable...

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