PILine® Ultrasonic Piezomotors S m a l l , H i g h - S p e e d a n d C o s t- E f f i c i e n t

Nanopositioning with piezomotors over long travel ranges Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on different features. For example, PI piezomotors that feature high stiffness and resolutions in the nanometer range are used for nanometer-precision stages with travel ranges over 1 mm. Piezomotor properties elf-locking when powered off S with maximum holding force iezomotors do not...

Motor-leadscrew combinations transform the rotational motion of the motor into linear motion. Due to play in the mechanical compo­ nents responsiveness is limited. Linear motors such as PILine® generate linear motion directly and provide much faster response and better stability. Furthermore, they allow significantly smaller designs. PiezoWalk® Drives like NEXLINE® and NEXACT® offer nanometer resolution with the highest force at low velocities and are intended for low duty cycles. PILine® ultrasonic drives provide fast feeds and a positioning accuracy in the submicrometer range. PIShift drives...

PILine® Ultrasonic Piezomotors s m a l l , H i g H - s p e e d a n d C o s t- e f f i C i e n t Silent operation through control frequencies in the ultrasonic range Cost-efcient drive principle: One actuator, one control phase Easy mechanical integration, compact design Self-locking at rest: No holding currents, no heating at stop, no energy consumption and no control jitter Holding force up to 15 N Velocity to 500 mm/s Resolution to 1 nm Applications PILine® ultrasonic piezomotors are small, high-speed and cost-efcient. Ideally suitable for applications of low operating cycles, they can also...

PILine® Linear Positioning stages U-521 Compact Linear Stage Fast PILine® Direct Drive, Incremental Encoder PILine ® rotation stages U-622 Miniature Rotation Stage 20 mm Side Length, Integrated Encoder U-624 Fast Miniature Rotation Stage With Ultrasonic Piezomotor U-628 Fast Rotation Stage with Small Footprint With Ultrasonic Piezomotor U-651 Rotation Stage with Low-Prole Design Fast PILine® Direct Drive Motion control C-877 PILine® Motion Controller For Ultrasonic Piezomotors, Cost-Efcient and Compact C-867U PILine® Motion Controller For Ultrasonic Piezomotors, 1 and 2 Axes 13 5

compact Linear stage fa s t p i l i n e ® d i r e C t d r i V e , i n C r e m e n ta l e n C o d e r U-521 Only 35 mm wide and 10 mm high Up to 0.3 µm minimum incremental motion Travel range 18 mm Velocity 200 mm/s Feed force 2 N Versions vacuum-compatible to 10-6 hPa Precision-class micropositioning stage Piezoelectric ultrasonic direct drive for high velocities and small design. Centered ball bearings. The piezomotor drive principle and the electrical operation are cost-efcient and can be customized Direct-measuring principle Integrated, direct-measuring incremental encoder. Resolution depending...

Preliminary Data Linear stage with 0.1 µm sensor resolution U-521.23V for vacuum to 10 -6 hPa Active axes Linear stage with 0.4 µm sensor resolution Motion and Positioning Travel Range Integrated sensor Incremental encoder Incremental encoder Design resolution Minimum incremental motion Bidirectional repeatability Load capacity Holding force Drive force Motor Type PILine ® ultrasonic piezomotor, performance class 1 PILine ® ultrasonic piezomotor, performance class 1 Reference point switch Mechanical Properties Drive Properties Aluminum, anodized Aluminum, anodized Cable length Recommended controller/driver...

Miniaturized rotation stage 2 0 m m s i d e l e n g t H , i n t e g r at e d e n C o d e r Only 20 mm edge length, height 10 mm Integrated, direct-measuring incremental encoder Rotation range >360° High velocity 720 °/s Drive torque 5 mNm generation. No drive noises. High velocity to 720 °/s. Holding torque 5 mNm Precision-class miniature rotation stage Integrated, direct-measuring incremental encoder. Rotation range >360°. Optical reference point switch PILine® ultrasonic piezo motor The piezoceramic ring-shaped motor acts directly on the rotating platform. Self-locking at rest, therefore no...

Active axes Motion and Positioning Rotation range Integrated sensor Incremental encoder Design resolution Bidirectional repeatability Load capacity / axial force Holding torque Mechanical Properties Drive Properties Motor Type PILine ® ultrasonic piezomotor, performance class 1 Reference point switch Cable length Recommended controller/driver C-877.1U11: 1 channel, affordable compact device C-877.2U12: 2 channels, affordable bench-top C-867.1U: 1 channel C-867.2U: 2 channels ©Physik Instrumente (PI) GmbH & Co. KG 2015. Subject to change without notice. Latest releases available at www.pi.ws....

Fast Miniature rotation stage w i t H U lt r a s o n i C p i e z o m o t o r Only 30 mm edge length, height 12 mm Integrated, direct-measuring incremental encoder Rotation range >360° High velocity 720 °/s Drive torque 10 mNm generation. No drive noises. High velocity to 720 °/s. Holding torque 10 mNm Small, precision-class rotation stage Integrated, direct-measuring incremental encoder. Rotation range >360°. Optical reference point switch PILine® ultrasonic piezo motor The piezoceramic ring-shaped motor acts directly on the rotating platform. Self-locking at rest, therefore no heat Fields of...

Preliminary Data Active axes Motion and Positioning Rotation range Integrated sensor Incremental encoder Design resolution Bidirectional repeatability Load capacity / axial force Holding torque Mechanical Properties Drive Properties Motor Type PILine ® ultrasonic piezomotor, performance class 1 Reference point switch Cable length Recommended controller/driver C-877.1U11: 1 channel, affordable compact device C-877.2U12: 2 channels, affordable bench-top C-867.1U: 1 channel C-867.2U: 2 channels Ask about custom designs! ©Physik Instrumente (PI) GmbH & Co. KG 2015. Subject to change without notice....