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Piezo Motors and Stages

Piezo Motors and Stages
48Pages

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□ EM DRIVES ■ TECHNOLOGY ■ POSITIONING SYSTEMS PIEZO NANO POSITIONING

starting from page PIShift Piezo Inertia Drives Technology N-412 N-422 Linear Actuator Page Page PILine® Ultrasonic Piezomotors Technology OEM Piezomotors U-264 RodDrive OEM Piezomotor Direct Drive M-272 Linear Drive for Automation, with Integrated Scale Page Page Page Page PiezoWalk® Piezo Stepping Drives Technology N-216 / N-111 NEXLINE® High-Force Stepping Drives N-310 NEXACT® OEM Miniature Linear Motor / Actuator N-381 High-Resolution Linear Actuator with Optional Position Sensor Page Page Page Page PiezoMike Linear Actuators Drive Electronics for Piezomotors Precision Positioning...

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Drives that Set the World in Motion For Industry and Research Future technology solutions Today PI delivers microand nanopositioning solutions for all important high-tech markets: ■ Semiconductor technology Optical metrology, microscopy Biotechnology and medical devices Precision automation and handling Precision machining Data storage technology Photonics, telecommunications PI (Physik Instrumente) is the leading supplier of piezo-based positioning systems with accuracies in the range of a few nanometers. The extensive product portfolio is based on a wide range of technologies with...

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Piezomotors From OEM Drives to Multi-Axis Positioning Systems Miniature piezo ultrasonic drive Nanopositioning with piezomotors over long travel ranges: PiezoWalk®, PILine®, PIShift Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on different features. For example, PI piezomotors that feature high stiffness and resolutions in the nanometer range are used for nanometer-precision stages...

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Piezomotors Integration Examples of Piezo Linear Motors M-110 compact translation stage with motor and leadscrew Motor-leadscrew combinations transform the rotational motion of the motor into linear motion. Due to play in the mechanical components responsiveness is limited. Linear motors such as PILine® generate linear motion directly and provide much faster response and better stability. Furthermore, they allow significantly smaller designs. PiezoWalk® Drives like NEXLINE® and NEXACT® offer nanometer resolution with the highest force at low velocities and are intended for low duty cycles....

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PIShift Piezo Inertia Drives Cost-Efficient, Compact Linear Motors PIShift drives are space-saving and cost-efficient piezo-based drives with relatively high holding forces of up to 10 N and a basically unlimited travel range. They make use of the stick-slip effect (inertia effect) – a cyclical alternation of static and sliding friction between a moving runner and the drive element generated by the piezo element – for a continuous feed of the runner. With an operating frequency above 20 kHz, PIShift drives reach velocities of more than 5 mm/s. The PIShift drive principle is based on a...

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Different Integration Levels of PIShift Drives PIShift drives adjust the tilting angles in a cardanic mirror holder PIShift piezo inertia drives allow production of stages with smallest dimensions. In combination with a directly measuring optical encoder, stages with PIShift drives allow high-precision and repeatable positioning. The LPS-45 low-profile linear stage integrates the PIShift piezomotor for optimized precision and load capacity. A big platform and crossroller bearings guarantee a smooth, high-precision, motion. Vacuum versions are available. The direct drive avoids mechanical...

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Linear Actuator with PIShift Piezomotor Cost-Effective and Easy to Integrate Simple integration: Two mounting versions Quiet: Drive frequency >20 kHz Sub-micron resolution Piezomotor-based direct drive OEM actuator without position sensor. Continuous motion with step frequencies in the ultrasound range. Easy integration, the housing can either be bolted to a level surface (N-412) or mounted via a threaded flange (N-422) PIShift inertia drive Self-locking, no heat generation at rest. Noiseless drive with operating frequencies beyond 20 kHz. Resolution in step mode approx. 300 nm, open-loop...

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Preliminary Data Active axes Motion and positioning Travel range Step frequency* Max. velocity* Mechanical properties Stiffness in motion direction Push / pull force (active) Max. holding force (passive) Drive properties Drive type Operating voltage Power consumption PIShift inertia drive PIShift inertia drive 15 W (actuator) 30 W (drive input) 15 W (actuator) 30 W (drive input) Stainless steel Stainless steel Miscellaneous Operating temperature range Material** Dimensions Mass Cable length E-870 PIShift drive electronics E-870 PIShift drive electronics Recommended controller / driver Ask...

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PILine® Ultrasonic Piezomotors Compact Drives, Fast and Self-Locking Integration levels from an economical OEM motor to a multi-axis positioning system Excellent dynamic properties, fast step-and-settle Basically unlimited travel ranges Easy mechanical integration Preloading the piezoceramic actuators against the runner ensures self-locking of the drive when at rest and powered down. As a result, it does not consume any power, does not heat up, and keeps the position mechanically stable. Applications with a low duty cycle, that are battery-operated or heat-sensitive benefit from these...

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Performance of PILine® Piezomotors Open-loop step sequence of a PILine® based translation stage. Steps of approx. 300 nm shown. For repeatable increments closed-loop opera- tion is recommended, because the step size depends on the force applied from outside PILine® ultrasonic linear motors provide excellent dynamic properties. They provide acceleration to several g and can achieve step-and-settle of a few 10 microseconds for small distances Maximum duty cycle depending on the ambient temperature with a Force / velocity motor characteristic of a PILine® motor 6 N holding control signal level...

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Piezo Motors and Stages 48Pages

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Piezo Motors and Stages
48Pages