□ EM DRIVES ■ TECHNOLOGY ■ POSITIONING SYSTEMS PIEZO NANO POSITIONING

starting from page PIShift Piezo Inertia Drives Technology N-412 N-422 Linear Actuator Page Page PILine® Ultrasonic Piezomotors Technology OEM Piezomotors U-264 RodDrive OEM Piezomotor Direct Drive M-272 Linear Drive for Automation, with Integrated Scale Page Page Page Page PiezoWalk® Piezo Stepping Drives Technology N-216 / N-111 NEXLINE® High-Force Stepping Drives N-310 NEXACT® OEM Miniature Linear Motor / Actuator N-381 High-Resolution Linear Actuator with Optional Position Sensor Page Page Page Page PiezoMike Linear Actuators Drive Electronics for Piezomotors Precision Positioning Systems...

Drives that Set the World in Motion For Industry and Research Future technology solutions Today PI delivers microand nanopositioning solutions for all important high-tech markets: ■ Semiconductor technology Optical metrology, microscopy Biotechnology and medical devices Precision automation and handling Precision machining Data storage technology Photonics, telecommunications PI (Physik Instrumente) is the leading supplier of piezo-based positioning systems with accuracies in the range of a few nanometers. The extensive product portfolio is based on a wide range of technologies with electromotive...

Piezomotors From OEM Drives to Multi-Axis Positioning Systems Miniature piezo ultrasonic drive Nanopositioning with piezomotors over long travel ranges: PiezoWalk®, PILine®, PIShift Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on different features. For example, PI piezomotors that feature high stiffness and resolutions in the nanometer range are used for nanometer-precision stages with...

Piezomotors Integration Examples of Piezo Linear Motors M-110 compact translation stage with motor and leadscrew Motor-leadscrew combinations transform the rotational motion of the motor into linear motion. Due to play in the mechanical components responsiveness is limited. Linear motors such as PILine® generate linear motion directly and provide much faster response and better stability. Furthermore, they allow significantly smaller designs. PiezoWalk® Drives like NEXLINE® and NEXACT® offer nanometer resolution with the highest force at low velocities and are intended for low duty cycles. PILine®...

PIShift Piezo Inertia Drives Cost-Efficient, Compact Linear Motors PIShift drives are space-saving and cost-efficient piezo-based drives with relatively high holding forces of up to 10 N and a basically unlimited travel range. They make use of the stick-slip effect (inertia effect) – a cyclical alternation of static and sliding friction between a moving runner and the drive element generated by the piezo element – for a continuous feed of the runner. With an operating frequency above 20 kHz, PIShift drives reach velocities of more than 5 mm/s. The PIShift drive principle is based on a single...

Different Integration Levels of PIShift Drives PIShift drives adjust the tilting angles in a cardanic mirror holder PIShift piezo inertia drives allow production of stages with smallest dimensions. In combination with a directly measuring optical encoder, stages with PIShift drives allow high-precision and repeatable positioning. The LPS-45 low-profile linear stage integrates the PIShift piezomotor for optimized precision and load capacity. A big platform and crossroller bearings guarantee a smooth, high-precision, motion. Vacuum versions are available. The direct drive avoids mechanical components...

Linear Actuator with PIShift Piezomotor Cost-Effective and Easy to Integrate Simple integration: Two mounting versions Quiet: Drive frequency >20 kHz Sub-micron resolution Piezomotor-based direct drive OEM actuator without position sensor. Continuous motion with step frequencies in the ultrasound range. Easy integration, the housing can either be bolted to a level surface (N-412) or mounted via a threaded flange (N-422) PIShift inertia drive Self-locking, no heat generation at rest. Noiseless drive with operating frequencies beyond 20 kHz. Resolution in step mode approx. 300 nm, open-loop Fields...

Preliminary Data Active axes Motion and positioning Travel range Step frequency* Max. velocity* Mechanical properties Stiffness in motion direction Push / pull force (active) Max. holding force (passive) Drive properties Drive type Operating voltage Power consumption PIShift inertia drive PIShift inertia drive 15 W (actuator) 30 W (drive input) 15 W (actuator) 30 W (drive input) Stainless steel Stainless steel Miscellaneous Operating temperature range Material** Dimensions Mass Cable length E-870 PIShift drive electronics E-870 PIShift drive electronics Recommended controller / driver Ask about...

PILine® Ultrasonic Piezomotors Compact Drives, Fast and Self-Locking Integration levels from an economical OEM motor to a multi-axis positioning system Excellent dynamic properties, fast step-and-settle Basically unlimited travel ranges Easy mechanical integration Preloading the piezoceramic actuators against the runner ensures self-locking of the drive when at rest and powered down. As a result, it does not consume any power, does not heat up, and keeps the position mechanically stable. Applications with a low duty cycle, that are battery-operated or heat-sensitive benefit from these characteristics....

Performance of PILine® Piezomotors Open-loop step sequence of a PILine® based translation stage. Steps of approx. 300 nm shown. For repeatable increments closed-loop opera- tion is recommended, because the step size depends on the force applied from outside PILine® ultrasonic linear motors provide excellent dynamic properties. They provide acceleration to several g and can achieve step-and-settle of a few 10 microseconds for small distances Maximum duty cycle depending on the ambient temperature with a Force / velocity motor characteristic of a PILine® motor 6 N holding control signal level of...