PiezoMike Linear Actuators H i g h R e s o l u t i o n a n d L o n g - T e r m S ta b i l i t y

PiezoMike Linear Actuator PiezoMike Linear Actuator M i n i m u m D i m e n s iMn N,I M U M F oI r c E s ,SSO a bS e H oG i t i o n i R g E S , S T A B L E P O S I T I O N I N G o I s High D M e N I t N l , P I sH FO n C N-470 ½ Holding force >100 N ½ Step size 20 nm ½ Travel range 7.4 mm to 26 mm ½ Compact design ½ Lifetime >1.000.000.000 steps ½ Mounting thread or shank ½ Versions with cable exit offset by 180° Linear actuator with PIShift piezomotor Linear screw-type actuator with PIShift piezo inertia drive for high-resolution and stable positioning. Open-loop operation PIShift piezomotors...

X M10 × 1 mm mounting thread (N-470.110; N-470.110Y) 9.5 mm shank (N-470.120; N-470.120Y) X M10 × 1 mm mounting thread (N-470.210; N-470.210Y) 9.5 mm shank (N-470.220; N-470.220Y) X M10 × 1 mm mounting thread (N-470.410; N-470.410Y) 9.5 mm shank (N-470.420; N-470.420Y) Travel range Typical step size Max. velocity in full-step mode Typical velocity in full-step mode Stiffness in motion direction Feed force (active) Holding force (passive) Permissible lateral force Drive type PIShift piezomotor PIShift piezomotor PIShift piezomotor Active axes Mechanical properties Miscellaneous Operating temperature...

PiezoMike Linear Actuator PiezoMike Linear Actuator W i t h P o s i t i o n S e n s oW I T H C l O s e T - L o o p E N e r aR i o n R C L O S E D - L O O P O P E R A T I O N r for P o SIdION S Op SO t FO N-472 ½ High stability and holding force >100 N ½ Self-locking at rest even when closed-loop control is switched off ½ Travel range 7.5 mm and 13 mm ½ Encoder resolution up to <1 nm ½ Feed force 22 N ½ Lifetime >1,000,000,000 steps ½ Versions with cable exit offset by 180° ½ Nonmagnetic and vacuumcompatible operating principle PIShift piezomotors Compact, low-cost inertia drive principle (stick-slip)....

Preliminary Data Active axis Mechanical interface M10×1 mounting thread or 9.5 mm shank, vacuum-compatible to 10 -6 hPa M10×1 mounting thread or 9.5 mm shank, vacuum-compatible to 10 -6 hPa Motion and positioning Travel range Integrated sensor Incremental, optical Incremental, optical Incremental, optical Incremental, optical Sensor signal Maximum velocity, open-loop Recommended maximum velocity in continuous operation Holding force, de-energized Feed force (active) Drive type PIShift piezo inertia drive PIShift piezo inertia drive PIShift piezo inertia drive PIShift piezo inertia drive Motor...

PiezoMike Linear Actuator PiezoMike Linear Actuator With Kinematic Mirror Mount N-480 ½ High stability ½ For optics with 0.5“, 1“ or 2“ diameter ½ Compact design with integrated incremental encoder ½ Lifetime >1,000,000,000 steps ½ Vacuum-compatible versions to 10-6 hPa available Kinematic mirror mounts with PIShift piezomotors Linear screw-type actuator with PIShift piezo inertia drive for high-resolution and stable positioning PIShift piezomotors Compact, low-cost inertia drive principle (stick-slip). When at rest, the drive is self-locking, requires no current and generates no heat. It holds...

Preliminary Data Active axis Mechanical interface 0,5“ optics, closed frame V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 1“ optics, closed frame V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 1“ optics, right-hand V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 1“ optics, left-hand V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 2“ optics, closed frame V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 2“ optics, right-hand V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa 2“ optics, left-hand V: Vacuum to 10 -6 hPa U: Vacuum to 10 -9 hPa Motion and positioning Tilt angle Step size Mechanical properties Holding...

PiezoMike Linear Actuator Actuator PiezoMike Linear H i g h F o r c e s , S t a bH I G H sF t i o n i E g , V a c uB L E- C oO Sp a t O Ne N G , V A C U U M - C O M P A T I B L E le Po i O R C nS , S TA um P m I T I ibl I N-470.V/N-470.U ½ Holding force >100 N ½ Step size 20 nm ½ Travel range 7.4 mm to 26 mm ½ Compact design ½ Feed force 22 N ½ Lifetime >1.000.000.000 steps ½ Mounting thread or shank ½ Versions for 10- 6 hPa and 10- 9 hPa Active axes X M10 × 1 mm mounting thread (N-470.11V/.11U) 9.5 mm shank (N-470.12V/.12U) X M10 × 1 mm mounting thread (N-470.21V/.21U) 9.5 mm shank (N-470.22V/.22U)...

Typische Schrittweite in nm Operating Time in s Operating Frequency in steps/s 15 20 800 1000 1200 1400 Axiale Kraft in N Operating Frequency in steps/s The operation of the PiezoMike mainly at a maximum frequency of 2 kHz creates heat inside the piezoelectric actuator 20 and the drive mechanics. Therefore it is important to follow the recommendations for the duty cycle and operational 15 frequency; the values are given for room temperature and standard air pressure of 1013 hPa. pi_N470_StepSize_Force_EN Operation Time Duty Cycle (max) / Waiting Time Anzahl Schritte 30 25 Typical Step Size in...

Linear Linear Actuator with PIShift Piezomotor Actuator with PIShift Piezomotor C o s t - E f f e c t i v e a n d E a s y t o Cn tS T -rE F F E C T I V E A N D E A S Y T O I N T E G R A T E I O eg ate N-412 ½ Easy frontal mounting ½ Silent: Operating frequency to >20 kHz ½ Velocity over 5 mm/s ½ Holding force to 10 N ½ Low operating voltage to 48 Vpp ½ Self-locking when at rest, no heat generation Piezomotor-based direct drive OEM actuator without position sensor. Continuous motion with step frequencies in the ultrasound range. Frontal mounting with M10x1 thread or 9.5 mm shank PIShift piezo...

Preliminary Data Active axes Mechanical interface PIShift linear actuator, 9.5 mm shank PIShift linear actuator, M10 x 1 thread Travel range Step frequency * Stiffness in motion direction Push / pull force (active) Max. holding force (passive) Drive type PIShift piezo inertia drive PIShift piezo inertia drive Operating voltage Operating temperature range Stainless steel Stainless steel Cable length Recommended controller / driver E-870 PIShift drive electronics E-870 PIShift drive electronics Mechanical properties Drive properties ©Physik Instrumente (PI) GmbH & Co. KG 2015. Subject to change...