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PI Electron Microscopy

PI Electron Microscopy
16Pages

Catalog excerpts

Highest Precision and Reliability to Achieve the Decisive Competitive Edge With more than 700 employees worldwide and subsidiaries in 13 countries, the PI Group is in a position to fulfill almost any requirement with regard to micro- and nanopositioning technology. Piezo actuator technology, different piezomotor drive principles, magnetic drives and guidings, nanometrology sensors and digital controllers – PI relies on a wide range of technological solutions that will always allow to find an approach that goes beyond common technologies. Key Technologies from a Single Source PI controls the...

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PI Products for Electron Microscopy Electron microscopy allows examinations of extremely high precision down to the nanometer range. Such a high resolution makes high demands on the imaging elements, but also on the positioning systems of the individual beam guidance components, such as the apertures. The positioning of the sample must be just as precise. The application of electron microscope methods is nowadays not limited to research, but also extends to the industrial sector whenever optical examination methods are no longer sufficient. Surface and structure tests are carried out using...

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Piezo Actuators and Piezomotors Technology of Piezo Drives Piezomotors Offer Nanometer Precision Over Larger Travel Ranges For travel ranges over 1 mm, PI uses piezomotors as drives, which also feature high stiffness and resolutions in the nanometer range. Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted for Nonmagnetic and UHV Environments Low-profile two-axis piezo scanner with flexure joints and SGS sensors Piezo Actuators - Ideal Drives for NanometerPrecision, Reliably Repeatable Positioning Piezo actuators...

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Piezomotor Technologies in Detail In PiezoWalk® drives such as NEXACT® and NEXLINE®, piezo actuators work in pairs as clamping and feed elements on a moving runner. Cyclical control induces a stepping motion of the actuators on the runner, and the runner is moved forwards and backwards. NEXACT® offers nanometer resolution at velocities of up to 10 mm/s, whereas NEXLINE® drives are used for high force generation. PILine® ultrasonic drives develop very high feed rates and position in the sub-micrometer range. The piezoceramic actuator is excited to ultrasonic vibrations with a high-frequency...

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Actuators and Drives Compact Drive Solutions for Easy Integration Nonmagnetic versions Sub-millisecond response time and sub-nanometer resolution Versions with SGS sensors for positional stability and repeatabilities of only a few nanometers Travel range of up to several millimeters Applications Piezoelectric drives allow production of stages with minimum dimensions. The direct drive avoids mechanical components such as gears and spindles, making for reliable and high-resolution drives down to a few nanometers. Piezo drives are in general vacuum-compatible and do not generate any magnetic...

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Vacuum-compatible versions Easy-to-control singleactuator principle with sub-nm resolution PICMA® multilayer actuator PiezoMove® exure actuator NEXACT® piezo stepping drive with exure guide PIShift piezo inertia drive combinable with linear encoder 0.5 μm sensor-related Drive: sub-nm sensor-dependent Drive: sub-nm Push force capacity in motion direction in N Pull force capacity in motion direction in N E-870 driver E-871 motion controller incl. driver Drive type Travel range Integrated sensor Resolution Repeatability Unloaded resonant frequency in Hz Velocity in mm/s Dimensions in mm...

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Linear Stages Miniature Stages with Direct Position Measurement Compact multi-axis solutions High resolution and stability Nonmagnetic and vacuum-compatible versions to 10–7 hPa Drive without lubricants, guidings without or with vacuum-compatible lubricants Applications Piezo drives are in general vacuum-compatible and do not generate any magnetic interference. This opens up application areas in which electric motors cannot be used, such as e.g. for sample scans in SEM. The stages are also ideally suited for sample positioning in surface analysis and processing using Focused Ion Beam (FIB)...

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(Preliminary data) PICMA® multilayer actuator with exure guide PILine® ultrasonic piezomotor PIShift piezo inertia drive NEXACT® piezo inertia drive Angular crosstalk (pitch / yaw) in μrad Push / pull force in N Drive type Travel range in mm Resolution in nm Dimensions in mm Recommended controller (including driver electronics) Interfaces / Communication

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Rotary Stages Compact Rotary Stages with PILine® Ultrasonic Piezomotors High resolution and stability Nonmagnetic and vacuum-compatible versions to 10–7 hPa Piezomotor: Drive without lubricants, guidings without or with vacuum-compatible lubricants Self-locking when at rest, no heat generation, no servo jitter Applications Rotary positioning of the sample is often required in sample preparation for SEM. These compact rotary stages allow the sample to be transported quickly, for example, in dual-beam installations from the electron beam path to FIB analysis and processing. The rotary stages...

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Versions up to UHV, clear aperture Ø 31 mm Preliminary data Special models, preliminary data PILine ultrasonic piezomotor PILine ultrasonic piezomotor PILine® ultrasonic piezomotor Design resolution in μrad Min. incremental motion in μrad 40 × 40 × 20 (with sensor) to 20 × 20 × 12 (open-loop) C-867 PILine® motion controller C-867 PILine® motion controller C-867 PILine® motion controller Rotation range in ° Drive type Velocity in °/s Load capacity (axial force) in N Torque cw / ccw in Nm Recommended controller Interfaces / Communication

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Multi-Axis Stages Precision Sample Positioning in up to Six Axes Parallel-kinematic design: All actuators act on the same moving platform Compact dimensions, low profile, light-weight High stiffness, high precision, optimum dynamics Nonmagnetic and vacuum-compatible versions to 10–7 hPa Drive without lubricants, guidings without or with vacuum-compatible lubricants One controller for all axes, many functionalities Applications These compact systems allow sample positioning in up to six axes of motion. With piezo nanopositioning systems, such as P-763 and P-563, highly dynamic scan processes...

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PI Electron Microscopy 16Pages

Catalog excerpts

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PI Electron Microscopy
16Pages