 Fast scanning and positioning  Travel ranges 5 mm, 10 mm, 20 mm  Scanning frequencies of more than 10 Hz  Max. velocity 250 mm/s  crossed roller bearings for the highest precision Reference‐class linear stage Linear positioning stages with magnetic direct drives largely dispense with mechanical components in the drivetrain and the drive force acts directly on the motion platform. Together with precision bearings, a high travel accuracy and longer lifetime is achieved. The linear positioning stages are particularly suitable for scanning applications. PIMag® Voice Coil Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gap of the magnetic field. When current flows through the coil, it moves in the magnetic field of the per‐ manent magnet. The direction of motion depends on the polarity. Thanks to their low weight and friction‐ free drive principle, voice coil drives are particularly suitable for applications, which require high dynamics and high velocities at limited travel ranges. High scan frequencies and precision positioning are also possible with these drives, because they are free of the effects of hysteresis. Crossed roller bearings With crossed roller bearings, the point contact of the balls in ball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need less preload, which reduces friction and allows smoother running. Crossed roller bearings are also distinguished by high guiding accuracy and load capacity. Forced guiding of the rolling body cages prevents the roller bearings from creeping.

Fields of application Industry and research. Metrology, photonics and precision scanning in semiconductor or flat panel display manufacturing Specifications Motion and position‐ ing Active axes Travel range Integrated Sensor Sensor resolution Min. incremental motion Unidirectional repeatability Bidirectional repe

Operating tempera‐ ture range

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The V-522 reliably performs 20-nm repeatable steps.