P-620.2 - P-629.2 |_Travel ranges 50 to 1800 |jm Resolution to 0.1 nm Positioning accuracy 0.02 % Direct metrology with capacitive sensors X, XY, Z, XYZ versions Active axes Integrated sensor Capacitive Capacitive Capacitive Capacitive Capacitive Capacitive Closed- loop travel in X, 50 Open- loop resolution in X, Y Closed- loop resolution in X, Y Linearity error in X, Y Repeatability X, Y Pitch / yaw Mechanical properties Stiffness X, Y Unloaded resonant frequency X Unloaded resonant frequency Y Loaded resonant frequency in X, 50 g Resonant frequency in Y @ 50 g Resonant frequency in X @ 100 g Loaded resonant frequency in Y @ 100 g Push / pull force capacity in motion direction Load capacity Lateral force Drive properties Piezo ceramic Mrad typ. © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Dynamic operating current coefficient in X, Y Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum mm * 21.5 mm mm * 25 mm mm * 25 mm mm * 25 mm mm * 25 mm mm * 40 mm Sensor / voltage CD versions: Sub- D special connection CL versions: LEMO Lower axis: X; upper axis: Y. Versions without sensor are available under the P-62x.20L ordering number; operating temperature range -20 to 150 °C. Sensor / voltage connection LEMO -9 Vacuum versions to 10-9 hPa are available as P-62x.2UD. The resolution of PI piezo nanopositioners is not limited by friction or stiction. Value given as...

P-629.2CD PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub- D Connector(s) P-629.2CL PIHera XY Piezo Nanopositioning Stage, 1500 µm × 1500 µm, Capacitive Sensors, LEMO Connector(s) P-629.20L Precise PIHera XY Nanopositioning System, 1800 µm × 1800 µm, Open- Loop, LEMO Connector(s) P-629.2UD PIHera XY Piezo Nanopositioning Stage, 1500 µm ×1500 µm, Capacitive Sensors, Sub- D Connector(s), Vacuum- Compatible to 10-9 hPa Controllers / Drivers / Amplifiers E-610 Piezo Amplifier / Controller E-621 Piezo Servo- Controller & Driver E-625 Piezo Servo- Controller & Driver...

P-62x.2CD/.2CL/.20L dimensions in mm Page 4 of 4 © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. l5.l°.2°l5 Latest releases available at www.pi.ws 16:59