XZ and XYZ NanopositionerCompact Two-Axis Piezo System for Nanopositioning P-611.XZ • P-611.2 ■ Compact: Surface 44 mm x 44 mm ■ Travel range to 120 pm x 120 pm ■ Resolution to 0.2 nm ■ Particularly inexpensive systems (mechanics and controller) ■ Zero-play, high-precision flexure guide system ■ Outstanding lifetime due to PICMA® piezo actuators ■ Also available as linear and Z stage, and as XYZ version Fields of application ■ Interferometry ■ Microscopy ■ Nanopositioning ■ Biotechnology ■ Test procedures and quality assurance ■ Photonics ■ Fiber positioning ■ Semiconductor technology Outstanding lifetime thanks to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Active axes Motion and positioning Integrated sensor Travel range at -20 to 120 V, open loop Travel range, closed loop Resolution, open loop Resolution, closed loop Linearity error Repeatability Pitch in X, Y Tilt 0X (motion in Z) Yaw in X Yaw in Y Tilt 0Y (motion in Z) Mechanical properties Stiffness Resonant frequency, no load Resonant frequency, under load, 30 g Resonant frequency, under load, 100 g Push/pull force capacity in motion direction Load capacity Drive properties Ceramic type Electrical capacitance Miscellaneous Operating temperature range Material Dimensions Mass Cable length Sensor...

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Ordering Information P-611.2S XY nanopositioning system, 100 µm × 100 µm, strain gauge sensors P-611.20 XY nanopositioning system, 120 µm × 120 µm, without sensor P-611.XZS XZ nanopositioning system, 100 µm × 100 µm, strain gauge sensors P-611.XZ0 XZ nanopositioning system, 120 µm × 120 µm, without sensor