P-541.2 • P-542.2 ■ Low profile for easy integration: 16.5 mm ■ Aperture 80 mm x 80 mm ■ Travel range to 200 pm x 200 pm ■ Parallel kinematics for faster response times and higher multi-axis accuracy ■ High dynamics direct-drive version ■ Sensor technology: Inexpensive strain gauge sensors or capacitive sensors for higher performance ■ Outstanding lifetime due to PICMA® piezo actuators ■ Combination possible with microscope stages for longer travel ranges Fields of application ■ Scanning microscopy ■ High-throughput microscopy ■ Super-resolution microscopy ■ Mask/wafer positioning ■ Interferometry ■ Measuring technology ■ Biotechnology ■ Micromanipulation Outstanding lifetime thanks to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven. Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in a wide temperature range.

Automatic configuration and fast component exchange Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on. Maximum accuracy due to direct position measuring Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows optimum repeatability, outstanding stability, and stiff, fast-responding control. High...

* With digital controller. With analog controllers, the typical linearity error for direct drive positioners can be up to 0.1 %. The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C).

The P-541.2DD has a settling time of only 3 ms for a 50-pm step.

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