Piezo Z/Tip/Tilt Stage High Dynamics with Large Aperture P-518 • P-528 • P-558  Z and tip/tilt stages with 3 axes / Z stages with 1 axis  Vertical tip/tilt angle to 200 µm / 2 mrad, closed loop (to 240 µm / 2.4 mrad open loop)  Parallel kinematics for faster response times and higher multi-axis accuracy  Zero-play, high-precision flexure guide system  Outstanding lifetime due to PICMA® piezo actuators  Clear aperture 66 mm × 66 mm  Highest linearity due to capacitive sensors Fields of application Metrology Interferometry Photonics / integrated optics Lithography Nanopositioning Scanning microscopy Sample alignment Micromachining Outstanding lifetime thanks to PICMA® piezo actuators The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymerinsulated actuators. 100 billion cycles without a single failure are proven. Subnanometer resolution with capacitive sensors Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range. High guiding accuracy due to zero-play flexure guides Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capacity and they are insensitive to shock and vibration. They are 100 % vacuum compatible and work in

Automatic configuration and fast component exchange Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the Sub-D connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on. High tracking accuracy in the nanometer range due to parallel position measuring All degrees of freedom are measured against a single fixed reference. Undesired crosstalk of motion to another axis can be actively compensated in real time (depending on...

Resonant frequency under load in Z, 2500 g Resonant frequency under load in θX, θY, 2500 g Load capacity* Piezo ceramic Electrical capacitance Operating temperature range Cable length Drive properties Sensor/voltage connection Recommended electronics * When mounted horizontally (standing on a surface, not suspended). The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. All specifications based on room temperature (22 °C ±3 °C). Ask about

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P-518 • P-528 • P-558 Z and tip/tilt stage, dimensions in mm Ordering Information P-558.ZCD Precision nanopositioning Z stage, 50 µm, direct position measuring, capacitive sensors, Sub-D connector P-558.ZCL Precision nanopositioning Z stage, 50 µm, direct position measuring, capacitive sensors, LEMO connector(s) P-518.ZCD Precision nanopositioning Z stage, 100 µm, direct position measuring, capacitive sensors, Sub-D connector

P-518.ZCL Precision nanopositioning Z stage, 100 µm, direct position measuring, capacitive sensors, LEMO connector(s) P-528.ZCD Precision nanopositioning Z stage, 200 µm, direct position measuring, capacitive sensors, Sub-D connector P-528.ZCL Precision nanopositioning Z stage, 200 µm, direct position measuring, capacitive sensors, LEMO connector(s) P-558.TCD Precision nanopositioning Z and tip/tilt stage, 50 µm, 0.6 mrad, parallel metrology, capacitive sensors, Sub-D connector P-518.TCD Precision nanopositioning Z and tip/tilt stage, 100 µm, 1.4 mrad, parallel metrology, capacitive sensors,...