Linear Drives Linear drives basically allow for unlimited travel ranges. They are direct-drive systems; they do not use drive screws or gearheads and are backlash-free. The positioning accuracy of the overall system is only affected by the position measurement and the guides. millimeters. To maintain a stable position, the voice-coil linear drive, just as any other linear drive, has to be operated in closed-loop, or alternatively combined with brakes. Electromagnetic Linear Drives Linear servo motors are used both for very high and for very low feed velocities. They work precisely in a range from 0.1 μm/s to more than 5 m/s. If combined with air bearings, a position resolution down to a few nanometers is possible. Voice-Coil Linear Drives These friction-free electromagnetic linear drives are characterized by their good dynamics, albeit with relatively low holding force. They are used primarily in scanning applications with travel ranges from several ten Very compact designs are possible with voice-coil linear drives of the PIMag series Piezo Drives Piezo Actuators Piezo actuators guarantee position resolutions of less than one nanometer. Several micropositioning stage series can be supplied with additional piezo drives. As an alternative to this serial configuration, they are combined to hybrid drives, that use a common control loop for both motor and piezo actuator. Piezo actuators can achieve extremely high accelerations of many thousand g, are frictionless and backlash-free. Normally, their travel ranges are limited to less than one millimeter. Piezomotors: PiezoWalk , PILine , PIShift ® Piezomotors do not generate magnetic fields nor are they affected by them. They are used for nanometer-precision-stages with long travel ranges. Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on different features. Self-locking when powered off with maximum holding force Scalable travel ranges Nanometer-precision resolution Easy mechanical integration Different technologies optimized for high velocities or for high forces

PI Piezomotors Compared to Piezo Actuators PiezoWalk® piezo stepping drive PILine® ultrasonic piezomotor PIShift piezo inertia drive Sub-nanometer resolution ■ Nanometer-precise position- ■ ing with high dynamics ■ Lever-amplified and guided ■ systems ■ Piezo scanners ■ ■ Fine adjustment ■ Force generation ■ Nanometer-precision positioning Quasi-static applications at high holding force Travel ranges of up to a few mm Coarse and fine adjustment Force generation Active vibration insulation Operation at constant, low velocity ■ Positioning with sub-pm accuracy ■ Fast step-and-settle ■...

Headquarters GERMANY_ © Physik Instrumente (PI) GmbH & Co. KG All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI. Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely. Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ from the original and are not binding. PI reserves the right to...