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M-110 • M-111 • M-112 V6

M-110 • M-111 • M-112 V6

M-110 • M-111 • M-112 V6

Product catalog summary
Overview
The document describes the specifications and features of vacuum-compatible compact linear stages, specifically models M-110, M-111, and M-112 V6. These stages are designed for use in vacuum environments up to 10-6 hPa and are equipped with DC gear motors.

Key Features
  • Compact design with folded drive and belt drive mechanism.
  • Travel ranges available in 5 mm, 15 mm, and 25 mm.
  • Closed-loop DC motors with noncontact reference and limit switches.
  • Low outgassing materials used for lubrication, allowing bakeout temperatures up to 80°C.

Drive and Positioning
  • Equipped with a closed-loop DC gear motor and backlash-compensated threaded spindle.
  • Position measured by a rotary encoder on the motor shaft.
  • Noncontact Hall effect reference and limit switches ensure precise positioning.

Applications
  • Suitable for use in vacuum chambers, research, beamline instrumentation, microscopy, and electronics assembly and inspection.

Performance Specifications
  • Unidirectional repeatability: 0.25 µm.
  • Bidirectional repeatability: ±2 µm.
  • Minimum incremental motion: 0.05 µm.
  • Backlash: 3 µm.
  • Motor encoder resolution: 2048 counts per revolution.

Mechanical Properties
  • Ball guide with fine-threaded spindle and a gear ratio of 256:9.
  • Holding force in X: 10 N.
  • Permissible push force in Y: 10-15 N, Z: 20-30 N.
  • Permissible torque in θx, θY, θZ: 0.15 N·m.
  • Material: Anodized aluminum.

Miscellaneous
  • Connector: HD D-sub 26-pin (male).
  • Recommended controllers: C-863, C-884, G-901, G-910, ACS modular controller.
  • Cable length: 0.5 m.
  • Operating temperature range: -20 to 65°C.

Order Information
  • M-110.1VG1: 5 mm travel range, 30 N load capacity, 1 mm/s max velocity.
  • M-111.1VG1: 15 mm travel range, 30 N load capacity, 1.5 mm/s max velocity.
  • M-112.1VG1: 25 mm travel range, 20 N load capacity, 1.5 mm/s max velocity.
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Catalog excerpts

M-110 • M-111 • M-112 V6-1

Vacuum-Compatible Compact Linear Stage XY(Z) Combinations with DC Gear Motor, Various Travel Range Variants Very compact due to folded drive Noncontact reference and limit switches XY setups can be mounted directly Compact linear stage, versatile in use Linear stage with compact size due to folded drive with belt drive. Clear aperture with 10 mm Ø. XY setups can be mounted directly without adapter plate. Reduced outgassing especially for use in vacuum environments Most notably, for the lubrication of the guides and the spindle a material with particularly low outgassing is used. This allows a bakeout temperature of up to 80° C. With this and other modifications of the PI V6 vacuum class, this positioner can be used up to 10-6hPa. Closed-loop DC gear motor Backlash-compensated threaded spindle Rotary encoder on the motor shaft Noncontact Hall effect reference and limit switches Application fields Vacuum chambers. Research. Beamline instrumentation. Microscopy. Electronics assembly and inspection. Active axes Maximum velocity in X, unloaded

 Open the catalog to page 1
M-110 • M-111 • M-112 V6-2

Minimum incremental motion in X Reference switch Hall effect Hall effect Hall effect Limit switches Hall effect Hall effect Hall effect Motor encoder Incremental rotary encoder Incremental rotary encoder Incremental rotary encoder Resolution, motor encoder Motor encoder: Sensor signal ___ Drive Properties Drive type Nominal voltage Drive force in negative direction of motion in X Drive force in positive direction of motion in X Ball guide Ball guide Ball guide Drive screw type Fine-threaded spindle Fine-threaded spindle Fine-threaded spindle ___ Mechanical Properties Drive screw pitch Gear ratio...

 Open the catalog to page 2
M-110 • M-111 • M-112 V6-3

Drawings / Images M-11x.1VG1, dimensions in mm. Note that a comma is used in the drawing instead of a decimal point.

 Open the catalog to page 3
M-110 • M-111 • M-112 V6-4

Order Information M-110.1VG1 Vacuum-compatible compact linear stage; DC gear motor; 5 mm travel range; 30 N load capacity; 1 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length M-111.1VG1 Vacuum-compatible compact linear stage; DC gear motor; 15 mm travel range; 30 N load capacity; 1.5 mm/s maximum velocity; fine-threaded spindle; incremental rotary encoder, 2048 cts./rev. resolution, A/B quadrature, RS-422; vacuum compatible to 10-6 hPa; 0.5 m cable length M-112.1VG1 Vacuum-compatible...

 Open the catalog to page 4

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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