Contents Products: Hexapod and SpaceFAB. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Precision of Below One Micrometer H-850 6-Axis Hexapod for Loads up to 250 kg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 H-811 6-Axis Miniature Hexapod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16 H-810 6-Axis Miniature Hexapod. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26 H-206 6-Axis Precision Alignment System . . . . . . . . . . . . . . . . . . . . . ....

Products hexapod and spacefab

High-load Hexapod positioninG 1 ton witH micrometer precision H-845 Load capacity to 1000 kg Velocity to 50 mm/s Travel ranges to 340 mm / 60° Scalable design: Dimensions, travel ranges and loads Actuator resolution to 40 nm Drive: brushless motors with brake Sophisticated controller using vector algorithms, virtual pivot point Extensive software support reference-class 6-axis positioning system Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serialkinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction...

Preliminary Data Active axes Single- actuator design resolution Load (base plate horizontal / any orientation) Motor type Operating temperature range Cable length Controller Included in delivery Technical data specified at 20 ±3°C. Ask about custom designs! * The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less. ©Physik Instrumente (PI) GmbH & Co. KG 2015....

High-load Hexapod h-850Kmld Load capacity to 500 kg Min. incremental motion 1 µm (X, Y), 0.5 µm (Z) Travel ranges to 100 mm / 60° Optionally with absolute encoders Reference-class 6-axis positioning system Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction. Large clear aperture Optional feature: Absolute position measurement Optionally, the position is measured using absolute encoders. The exact position of the axes is determined after the...

Preliminary Data Active axes Load (base plate horizontal / any orientation) Holding force, de-energized (base plate horizontal / any orientation) Motor type Operating temperature range Base plate Ø 370 Moving platform Ø 280 Clear aperture Ø 100 Hexapod height in center position 350 Base plate Ø 370 Moving platform Ø 280 Clear aperture Ø 100 Hexapod height in center position 350 Cable length Mechanical properties Technical data specified at 20 ±3 °C. Ask about custom designs! * The travel ranges of the individual coordinates (X, Y, Z, θX, θ Y, θZ) are interdependent. The data for each axis in...

h-850 Load capacity to 250 kg Repeatability to ±0 .2 µm Travel ranges to 100 mm / 60° Actuator resolution to 5 nm MTBF 20,000 h Works in any orientation Vacuum-compatible versions available Sophisticated controller using vector algorithms, virtual pivot point Comprehensive software package reference-class 6-axis positioning system Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction . Vacuum-compatible versions to 10-6 hPa are available drive...

for higher loads and holding forces for higher velocity and precision Active axes Single-actuator design resolution Load (base plate horizontal / any orientation) Holding force, de-energized (base plate horizontal / any orientation) Motor type Operating temperature range Cable length Mechanical properties Vacuum versions to 10-6 hPa are available under the following ordering number: H-850 .xV . Specifications for vacuum versions can differ . Technical data specified at 20 ±3°C . Ask about custom designs! * The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent...

h-840 Load capacity to 30 kg Travel ranges to 100 mm / 60° Actuator resolution to 16 nm Repeatability to ±0 .4 µm MTBF 20,000 h Works in any orientation Rapid response Sophisticated controller using vector algorithms, virtual pivot point Comprehensive software package Precision-class 6-axis system Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serialkinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction drive variants H-840 .Gxx with DC gear motors H-840 .Dxx with powerful DC motors for higher velocity...

for higher resolution and load Motion and positioning Travel range* X, Y Single-actuator design resolution Load (base plate horizontal / any orientation) Holding force, de-energized (base plate horizontal / any orientation) Motor type Mechanical properties Miscellaneous Operating temperature range Cable length Technical data specified at 20 ±3°C . Ask about custom designs! * The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent . The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions . If the other linear...

h-824 Load capacity to 10 kg, self-locking version Travel ranges to 45 mm / 25° Actuator resolution to 7 nm Min . incremental motion to 0 .3 µm Velocity up to 25 mm/s Vacuum-compatible versions available Sophisticated controller using vector algorithms, virtual pivot point Comprehensive software package Precision-class 6-axis positioning system Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction . Vacuum-compatible versions to 10-6 hPa are...