Capacitive Sensors SUB- NANOMETER- RESOLUTION POSITION SENSORS D-015 • D-050 • D-100 For applications requiring highest precision Measurement range to 1000 µm Resolution to 0.01 nm Linearity error to 0.01 % with digital controller Bandwidth to 10 kHz Servo controller E-509.CxA, compatible with E-500 piezo controller system Custom designs Sensor type Nominal measurement range Extended measurement range Linearity error** Sensor active area Thermal drift*** Operating temperature range Recommended sensor electronics Order Information D-015.00 Capacitive 2- Plate Position Sensor, 15 µm, Aluminum D-050.00 Capacitive 2- Plate Position Sensor, 50 µm, Aluminum D-100.00 Capacitive 2- Plate Position Sensor, 100 µm, Aluminum Ask about custom designs! Controllers / Drivers / Amplifiers E-509 Signal Conditioner / Piezo Servo Module Related Products D-510 PISeca Capacitive Sensors © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Drawings / Images dimensions in mm © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

© Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

steps, measured with (lower curve) and with a highly precise laser capacitive sensor provides significantly higher resolution than —'^VrO - —"WMW*W— —U»HM*J— © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice Latest releases available at www.pi.ws

© Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws