*mydirectindustry

Catalogs
Physik Instrumente
Catalog: PI Piezo Nano Positioning 2014/2015

Catalog: PI Piezo Nano Positioning 2014/2015

Product catalog summary

About PI: PI Group is a leader in precision motion technologies, offering innovative and customer-specific solutions across various industries with a global presence.

Piezo Positioning Systems: Designed for nano-precision positioning, these systems are crucial for applications requiring high precision, such as microscopy. They include piezo scanners, amplifiers, and controllers.

Nanometrology and Technology: This section covers piezo technology fundamentals, emphasizing guiding and preload technology for precise motion control.

Hexapod and SpaceFAB Systems: Utilizing parallel kinematics for six-axis motion, these systems offer advanced control and precision for various applications.

Motorized Positioning Systems: Explores motorized systems like precision linear, XY, and rotary stages, and the role of motion controllers in enhancing performance.

Patents and Innovations: PI holds numerous patents in nanopositioning and piezoelectric drive systems, reflecting its commitment to innovation and quality.

Global Presence and Customer Focus: PI ensures local support and service through its global network, emphasizing long-term customer relationships and customized solutions.

Applications and Markets: PI's technologies are applied in fields like semiconductor technology, medical imaging, and biotechnology, adaptable for extreme conditions.

Industrial Automation: PI systems integrate seamlessly into automated production lines, suitable for precision alignment tasks.

Astronomy and Aerospace Research: PI's hexapods and piezo-driven mirrors are used in astronomy and space exploration, including the Mars rover Curiosity.

PI Ceramic Piezo Technology: PI Ceramic offers a wide range of piezo actuators and sensors for various applications.

PI miCos Motion Control: Specializes in high-precision positioning systems for research and industrial applications.

Technology and Customer Solutions: PI emphasizes customer-specific product development, providing comprehensive systems with necessary components.

Product Highlights: PI's piezo systems are known for precision, reliability, and dynamic performance, suitable for high-accuracy applications.

Specifications: Detailed specifications for piezo positioning systems, including models, dimensions, travel ranges, and performance metrics.

Procedures and Applications: Outlines applications of piezo amplifiers and controllers in nanopositioning systems, emphasizing high precision and dynamic applications.

Standards and Recommendations: Recommendations for improved accuracy and performance, including linearization algorithms and real-time operation systems.

Key Features and Options: Highlights features like high dynamics, low power consumption, and extensive software support for piezo controllers.

Sensor Technology: Describes the use of capacitive and incremental sensors for noncontact distance measurement in nanopositioning systems.

Conclusion: Piezo actuators and controllers are essential for high-precision nanopositioning applications, with comprehensive specifications and recommendations for effective use.

Overview: Comprehensive overview of nanopositioning systems utilizing piezomotors and flexure guides, highlighting precision, dynamics, and applications.

Specifications and Features: Nanometer-precise positioning with high dynamics and stability, suitable for various environments.

Piezomotor Technologies: Used for travel ranges over 1 mm, offering high stiffness and nanometer resolution.

Flexure Guides: Provide excellent guiding accuracy with sub-nanometer precision, suitable for vacuum environments.

Parallel Kinematics: Optimize motion in multiple axes, offering compact construction and improved dynamic performance.

Tip/Tilt Systems: Offer high linearity and compact design, suitable for dynamic operations.

Use in Special Conditions: Suitable for vacuum environments and strong magnetic fields, with models for low temperatures.

Sensor Technology: High-resolution sensors are crucial for nanopositioning, offering accuracies in the nanometer range.

Introduction: Discusses advanced nanopositioning systems, focusing on PIOne linear encoders and piezo positioning systems.

PIOne Linear Encoders: Achieve resolutions of 20 picometers RMS, suitable for nanopositioning systems.

Strain Gauge Sensors: Used for indirect position measurement, providing good thermal stability.

Direct Parallel Metrology: Involves multi-axis measurements for real-time correction of motion crosstalk.

Precision Motion Control: Offers high linearity, sub-nanometer accuracy, and low power consumption.

Closed-Loop vs. Open-Loop Control: Closed-loop systems offer higher linearity and repeatability.

Digital Controllers: Offer improved linearity and dynamic performance through digital algorithms.

Software and Integration: Comprehensive software packages support various operating systems and custom applications.

Conclusion: Highlights the capabilities and applications of PI's nanopositioning systems, emphasizing precision and flexibility.

Universal Command Set for Motion Control: Simplifies commissioning and programming with a General Command Set (GCS).

PIMikroMove Software: Provides a graphical user interface for digital controllers and positioning systems.

System Optimization: Offers tools for optimizing system response and stability.

Integration with Third-Party Software: Supports integration with LabVIEW, MATLAB, and other software environments.

Service and Support: PI systems come with necessary components for operation, prioritizing long-term availability.

Glossary of Technical Terms: Explains technical terms related to amplifiers, sensors, and positioning systems.

Piezo Drives and Motors: Offers a range of piezomotor technologies with features like self-locking and scalable travel ranges.

Operating Principle: NEXLINE® and NEXACT® drives utilize piezo actuators for stepping motion.

Stepping Motion Sequence: PiezoWalk® drives use paired piezo actuators for clamping and feeding.

Self-Locking and Reliability: Piezomotors are self-locking when at rest, enhancing reliability.

Applications and Compatibility: Suitable for vacuum and strong magnetic fields, with special versions for clean rooms.

PILine® Ultrasonic Piezomotors: Offer compact, fast, and self-locking solutions with high dynamic properties.

PIShift Piezo Inertia Drives: Cost-efficient and compact, offering high holding forces and unlimited travel ranges.

Piezo Actuators: Offer high precision and force generation for dynamic applications.

Lever-Mechanism Design: Discusses the design of piezo actuators that function like mechanical levers.

Preloaded and Cased Actuators: Piezoceramic actuators need protection from pulling and shearing stress.

Flexure Guides: Ensure precise straight motions, are frictionless, and allow hysteresis-free motion.

PiezoMove® OEM Flexure Actuators: Offer guided motion with long travel ranges and precision.

Integration Levels: Describes the transformation of actuator travel range into straight motion using lever mechanisms.

PICMA® Actuators: Used in various applications, including the Mars Rover Curiosity.

Flexible Adjustment: PI Ceramic offers quick and flexible adjustments of piezo technology products.

Longitudinal Piezo Actuators: Offer high stiffness, sub-millisecond response time, and sub-nanometer resolution.

PICMA® Bender Multilayer Actuators: Ideal for dosing, pumping, and optical applications.

Unguided Piezo Actuators: Various designs are available for different applications.

Fundamentals of Piezo Technology: Explains the basic principles of piezoelectricity.

Overview of Piezoelectric Ceramics and Actuators: Discusses the basic principles of piezoelectricity and actuator materials.

1. Basic Principles of Piezoelectricity: Piezoceramic materials exhibit piezoelectric properties tailored for different applications.

2. Actuator Materials from PI Ceramic: Various PZT-based materials are used for different actuator applications.

3. Longitudinal Stack Actuators: Convert electrical energy to mechanical energy efficiently.

4. Shear Actuators: Utilize the largest piezoelectric coefficients for applications like stick-slip motors.

5. Tube Actuators: Use the transversal piezoelectric effect for radial and axial displacements.

6. Contracting Actuators: Achieve displacement perpendicular to the polarization direction.

7. Bending Actuators: Convert small transversal changes into large bending displacements.

Conclusion: PI Ceramic offers a wide range of piezoelectric materials and actuators tailored for specific applications.

Overview: Provides a comprehensive overview of the manufacturing processes, technologies, and properties of piezoelectric actuators.

Manufacturing Processes: Outlines the step-by-step manufacturing process of piezo actuators.

Multilayer Tape Technology: PICMA® actuators are manufactured using multilayer tape technology.

Pressing Technology: PICA stack actuators are produced using pressing technology.

Properties of Piezoelectric Actuators: Discusses the displacement behavior, nonlinearity, hysteresis, and temperature-dependent behavior.

Displacement Behavior: Piezo actuators exhibit nonlinear displacement curves with hysteresis.

Temperature-Dependent Behavior: Performance is affected by temperature, with displacement decreasing at cryogenic temperatures.

Conclusion: Provides detailed insights into the manufacturing and operational characteristics of piezoelectric actuators.

Temperature Effects on Actuators: Discusses the temperature expansion coefficient and operating range of actuators.

Temperature Operating Range: Standard glued actuators operate between -20 to 85°C, with extended ranges available.

Preload and Load Capacity: Piezoceramic actuators have low tensile strengths, necessitating mechanical preload.

Stiffness: Actuator stiffness is crucial for calculating force generation and system behavior.

Force Generation and Displacement: The actuator stiffness can be derived from the working graph.

Efficiency and Energy Balance: The efficiency of a piezo actuator system depends on various factors.

Resonant Frequency: Resonant frequencies apply when actuators are not clamped on both sides.

Dynamic Operation and Properties of Piezoelectric Actuators: Discusses dynamic properties influenced by effective mass and load.

Operating Voltage and Electrical Behavior: Piezo actuators operate at various voltages, behaving like capacitors below resonance.

Positioning Operation and Power Consumption: Power consumption increases with frequency and capacitance.

Driving Methods and Signal Shape: Piezo actuators can be driven with sine or triangular waveforms.

Environmental Considerations: Piezo actuators can operate in extreme conditions.

Applications and Limitations: Used in fast switching applications, with special considerations for operation in liquids.

Ambient Conditions and Lifetime of Piezoelectric Actuators: Discusses the impact of atmospheric humidity on actuator lifetime.

Accelerated Lifetime Testing: Used to test the reliability of PICMA® actuators under extreme conditions.

Dynamic Continuous Operation: Piezo actuators can endure high cycles-to-failure in cyclic load applications.

Design and Reliability: The patented design of PICMA® actuators reduces mechanical stress.

Piezo Electronics and Amplifiers: Require flexible drivers and controllers for precise positioning.

Charge Control: Offers a more linear displacement of piezo actuators compared to voltage control.

Handling and Installation: Piezo actuators require careful handling due to their brittle nature.

Cleaning and Handling Recommendations: Actuators should be cleaned with isopropanol or ethanol.

Mechanical Installation: Avoid torques and lateral forces by using appropriate structures or guides.

Preload Application: Preload can be applied externally or internally.

Load Application: Ensure even load distribution to avoid tensile stresses.

Electrical Connection: Piezo actuators are capacitors with high internal resistances.

Safe Operation: Reduce DC voltage during operation and avoid steep voltage rises.

Hexapod and SpaceFAB Systems: Offer six-axis positioning with high precision.

Product Highlights: Hexapod systems are ideal for precision applications.

Specifications: Outlines the specifications of Hexapod systems.

Controller Features: Highlights the C-887.11 controller for its powerful vector algorithms.

Digital Controller Versions: Two versions of the digital controller for 6-axis parallel kinematics are mentioned.

Interfaces and Software: Controllers support TCP/IP Ethernet, RS-232, and optional interfaces.

Accessories: Include control units, nanopositioning systems, and additional mounting platforms.

Technology and Advantages: Hexapods offer six degrees of freedom with a parallel-kinematic structure.

Motion Control and Software: Details advanced motion control capabilities.

Applications: Suitable for applications requiring precise trajectory control.

Overview: Provides a comprehensive overview of motion control software and motorized positioning systems.

Motion Control Software: Supports fast integration of PI controllers in third-party programming languages.

Hexapod-Specific Software: Provides tools for determining workspace limits and preventing collisions.

Motorized Positioning Systems: Details various motorized positioning systems, including linear positioning stages.

Key Specifications: Linear positioning stages with travel ranges up to 600 mm and load capacities up to 200 N.

Applications: Applicable in fields such as micro-processing and photonics production.

Overview: Provides detailed specifications and applications for various motorized positioning systems.

Specifications: Outlines specifications for different models, including repeatability and load capacity.

Highlights: Key features include covered mechanics for dust protection and high stiffness.

Applications: Used in various industrial applications, including wafer inspection and microscopy.

Motor Types and Controllers: Lists various motor types and recommended controllers.

Conclusion: Emphasizes the versatility and precision of the positioning systems.

Overview: Provides detailed specifications and applications for various motorized positioning systems.

Miniature Stages: Feature integrated optical encoders for direct position measurement.

Rotation Stages: Equipped with electric motors, offering unlimited rotation range.

Precision Rotation Stages: Feature backlash-compensated worm drives.

Ultraprecise Rotation Stages: Designed for high dynamics and positioning precision.

Goniometers and Tip/Tilt Stages: Provide smooth performance and uniform feed.

Motorized Precision Linear Actuators: Offer high-resolution drives for compact spaces.

Cost-Efficient Linear Actuators: Designed for cost-sensitive applications.

High-Load Actuators: Handle high loads with precision and reliability.

Compact Linear Actuators: Designed for the alignment of optomechanical components.

Overview: Provides detailed information on various motorized positioning systems.

Specifications: Specifies different types of motors and their controllers.

Controllers: Discusses various motor controllers and digital controllers for piezomotors.

Motorized Positioning Systems: Discusses various motorized positioning systems, including linear drives and piezo drives.

Key Features and Technologies: Highlights the advantages of each system.

Applications and Use Cases: Outlines various applications for these systems.

Stepper Motor Drives: Stepper motors move in discrete steps, allowing precise positioning.

Hybrid Systems: Combine piezo actuators and electric motors for enhanced precision.

Drive Train Elements: Various components enhance torque, resolution, and efficiency.

Metrology: Metrology systems include absolute encoders for position feedback.

Guidings and Bearings: Different types of bearings offer varying levels of precision and load capacity.

Use in Vacuum: Stages can be adapted for vacuum use.

SMC Controller Technology: Ensures smooth motor operation with high position resolution.

Overview of SMC Controllers: Discusses SMC controllers used for precision positioning.

Precision Positioning: Highlights the precision of the PLS-85 linear stage.

Position Control: Positioning accuracy can be enhanced using position feedback control.

Velocity Control: Velocity is a critical parameter for positioning systems.

Position Error Correction: The SMC controller can correct errors by saving measured deviations.

Glossary: Includes a glossary explaining terms related to positioning systems.

Patents: Lists various patents related to the products discussed.

General Information: Issued by Physik Instrumente (PI) GmbH & Co. KG, with key management personnel listed.

Disclaimer: States that while the information has been compiled with care, errors may still exist.

Trademarks: Several trademarks are registered under Physik Instrumente (PI) GmbH & Co. KG.

Copyright: All content within the document is protected by copyright and other laws.

Catalog excerpts

Piezo Nano Positioning 2014/2015

Open the catalog to page 1

starting from page Piezo Positioning Systems starting from page 17 Piezo Scanners for Nano-Precision Positioning in 1 to 6 Axes Z Piezo Scanners for Microscopy Precision Motion Control: Piezo Amplifiers and Controllers for Nanopositioning Nanopositioning Technology Piezo Drives starting from page 99 Piezomotors Piezomotor Technologies Piezo Actuators with Guiding and Preload Technology: Guiding and Preload Piezo Actuators and Piezo Components Fundamentals of Piezo Technology

Open the catalog to page 2

Catalog: PI Piezo Nano Positioning 2014/2015-3

Hexapod and SpaceFAB: Parallel Kinematics with 6 Motion Axes Controller for Hexapod Positioning Systems starting from page 159 Technology of Parallel-Kinematic Precision Positioning Systems Motorized Positioning Systems starting from page 191 ^^ri^^^ Precision Linear Stages Page 192 ^^^rf^^^ Precision XY Stages Page 216 Precision Rotary Stages Page 222 J^^^L '.7 Motorized Precision Linear Actuators Page 234 Motion Controllers Page 244 Basics of Motorized Positioning Systems Page 252 PIEZO NANO POSITIONING

Open the catalog to page 3

Catalog: PI Piezo Nano Positioning 2014/2015-4

No other company in the world offers a broader and deeper portfolio of precision motion technologies than the PI Group. Continuous growth through the development of novel products and technologies is one of the main characteristics of the PI Group. With more than 700 highly qualified employees all over the world, research and manufacturing centers on three continents and subsidiaries in 13 countries, the PI Group is in a position to fulfill almost any requirement with regard to innovative precision motion technology.

Open the catalog to page 4

Catalog: PI Piezo Nano Positioning 2014/2015-5

Typical for PI: PIFOC® objective scanner – nanometer resolution for precision focus control in microscopy PICMA® multilayer piezo actuators from PI Ceramic with all-ceramic coating for optimum reliability and lifetime SpaceFAB positioning system from PI miCos. Parallel kinematics for positioning in up to six degrees of freedom Unique in Piezo Technology and Precision Positioning Physik Instrumente (PI) – Precision Positioning for Industry and Research PI was founded more than four decades ago and is considered today a global market and technology leader in the field of precision positioning technology...

Open the catalog to page 5

Catalog: PI Piezo Nano Positioning 2014/2015-6

PI UK PI France PI Italy miCos Iberia PI Japan PI Shanghai (with R&D and production) PI Singapore PI Korea PI Karlsruhe PI Ceramic PI miCos Locations for R&D, production, sales and service Locations for sales and service The PI Group is present in all key technology regions worldwide. Customers benet from its local representations around the globe in many ways: ■ Service facilities for diagnosis and repair as well as metrology equipment for tests, system calibration and quality assurance R&D departments, which are able to react promptly to the demands of the local markets and ensure a direct...

Open the catalog to page 6

Catalog: PI Piezo Nano Positioning 2014/2015-7

Well-Positioned All Over the World 2004 Market launch of PICMA® multilayer piezo stack actuators 2004 Market launch of NEXLINE® Waldbronn, Germany high-performance piezo linear drives 1991 Market launch of 6-axis parallel-kinematics positioning systems (Hexapods) 2007 Market launch of NEXACT® piezo linear drives 1992 Foundation of PI Ceramic, Thuringia, 2010 More space for growth: Acquisition Germany; crucial step towards market leadership in nanopositioning of the expansion site next to the PI headquarters 1994 Market launch of capacitive position 2011 Acquisition of the majority shares 1998...

Open the catalog to page 7

Catalog: PI Piezo Nano Positioning 2014/2015-8

Dear customers, PI is a synonym for top performance in precision motion technologies. We wish to inspire you with our products and we believe that we have exactly what it takes. PI offers a technological spectrum that is beyond competition worldwide. Piezo actuator technology, voice-coil drives, magnetic levitation technology, nanometrology sensors and digital controllers – we can implement all of these technologies for any high-precision motion task. Piezo ceramics are such an elementary part of our portfolio that we founded an entire company to produce the highest quality piezo materials in...

Open the catalog to page 8

Catalog: PI Piezo Nano Positioning 2014/2015-9

Unconventional Ways The PI Group can respond precisely to the customers‘ needs: eds: Specic requirements can often only be fullled by customomized solutions – solutions that can only be found by means eans of unconventional and creative thinking. Unique Solutions, Broadest and Deepest Portfolio in Precision Motion Technologies PI feels at home where unconventional solutions are of the essence in both industry and research. Today nanotechnology is also present in standardized industrial processes. With unconventional thinking and the broadest and deepest portfolio of precision motion technologies...

Open the catalog to page 9

Catalog: PI Piezo Nano Positioning 2014/2015-10

structure: Cells settle on ”handles“ Three-dimensional structu Bastmeyer, Zoological Institu(Photo: B. Richter and M. B Technology (KIT)) te, Karlsruhe Institute of Te In Hexapods in automation. I addition to PLC connecstandardized G-Code commands is tion, control over standard possible to allow for even higher flexibility Complex three-dimensional structure: A 300 μm Statue of Liberty was manufactured with 3D laser lithography by Nanoscribe (Photo: Nanoscribe GmbH) Drives that are both small and accurate improve imaging processes e.g. in medical technology. (Photo: SCHÖLLY FIBEROPTIC GmbH) Curiosity...

Open the catalog to page 10

Catalog: PI Piezo Nano Positioning 2014/2015-11

Vacuum-Compatible, Non-Magnetic and Suitable for Low Temperatures PI‘s piezoelectric drive systems can be modified to cope with extreme ambient conditions, such as ultrahigh vacuum, strong magnetic fields or extremely low temperatures. Piezoceramics are intrinsically compatible with these extreme conditions, but the selection of the right system components and the assembly process requires a lot of experience. PI miCos is an expert in classical drive technologies for UHV, in particular when it comes to designing complex multi-axis systems for high loads and long travel ranges. Medical Technology...

Open the catalog to page 11

Catalog: PI Piezo Nano Positioning 2014/2015-12

PI Ceramic Piezo Technology PI Ceramic is considered a global leading player in the field of piezo actuators and sensors. The product range includes various piezo ceramic elements manufactured in both multilayer and pressing technology. Piezo ceramic components are manufactured in a large number of forms and sizes and with different motion characteristics. The broad range of expertise in the complex development and manufacturing process of functional ceramic components combined with state-of-the-art production equipment ensure high quality, flexibility and adherence to supply deadlines. Prototypes...

Open the catalog to page 12

All Physik Instrumente catalogs and technical brochures