A-68x
4Pages

Catalog excerpts

PIglide RLA Rotation Stage with Air Bearings, Large Aperture Friction-free, Motorized A-68x  365 mm diameter motion platform, 260 mm diameter aperture  Low profile  Eccentricity and flatness < 300 nm Product overview The directly driven flat rotation stages of the PIglide RLA series are designed for the highest precision. They have a low profile and a large clear aperture. The RLA stages offer a superior travel accuracy, flatness, and wobble performance.  Brushless  Low cogging torque Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Incremental or absolute encoder PIglide filter and air preparation kit Single or multi-axis motion controllers and servo drives Multi-axis/customized setups Base plates made of granite and systems for reducing vibration Application fields Tomography, beamline systems, wafer metrology, wafer inspection, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applicat

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Specifications Motion Travel range Motion platform diameter Moved mass Overall mass Guide type Drive properties Drive type Torque motor, 3-phase, brushless Intermediate circuit voltage Peak current Nominal current Peak torque Nominal torque Torque constant Resistance phase-phase Inductance phase-phase Integrated sensor Incremental angle-measuring system Absolute angle-measuring system Sensor signal Eccentricity Flatness Wobble Mechanical properties Load capacity, axial Load capacity, radial Load torque, MX,Y Sensor resolution Bidirectional repeatability Accuracy, with error compensation...

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Miscellaneous Operating pressure Clean (filtered to 1.0 μm or better) - ISO 8573-1 Class 1 Oil free - ISO 8573-1 Class 1 Dry (-15 °C dew point) - ISO 8573-1 Class 3 Hardcoat aluminum, stainless steel mounting hardware Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load. (2) The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are...

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PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, incremental angle measuring system with sin/cos signal transmission, brushless 3-phase torque motor PIglide RLA rotation stage, air bearing, 365 mm motion platform diameter, 260 mm diameter aperture, low profile, absolute angle-measuring system with BiSS-C signal transmission, brushless 3-phase torque motor

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A-68x 4Pages

Catalog excerpts

All Physik Instrumente catalogs and technical brochures

A-68x
4Pages