PIglide RL Low-Profile Rotation Stage with Air BearingFriction-Free, Motorized A-63x ■ 200 mm or 300 mm motion platform diameter ■ Low profile, 60 mm ■ Eccentricity and flatness < 100 nm ■ Option for self-locking at rest by magnetic preload Product Overview The directly driven low-profile rotation stages of the PIglide RL series are designed for the highest precision with low-profile design. Various options can be combined to create a solution ideal for point-to-point indexing or constant velocity scanning. The RL stages offer superior travel accuracy, flatness, and wobble performance. 3-phase torque motor ■ Brushless ■ Slotless ■ Low cogging torque Absolute encoder (optional) Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation. Accessories and options ■ Incremental or absolute encoder ■ Vacuum feedthrough ■ Self-locking at rest by magnetic preload ■ PIglide filter and air preparation kit ■ Single or multi-axis motion controllers and servo drives ■ Multi-axis/customized designs ■ Base plates made of granite and systems for reducing vibration Application fields Optical alignment, wafer inspection, wafer alignment, measuring technology, inspection systems, calibration, scanning. Thanks to the friction-free motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications.

(1) Dependent on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load. (2) The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required. (3) May be limited by the payload, payload imbalance, controller or drive. (4) Assumes 4096x interpolation. Contact PI for the use of other factors. (5) The specified values are based on error compensation controlled...

Bestellinformationen A-635.A100 PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, angle measuring system with sin/cos signal transmission, 31488 lines/revolution, slotless, brushless 3-phase torque motor A-635.B100 PIglide RL rotation stage, air bearing, 200 mm motion platform diameter, low height, absolute angle-measuring system with BiSS-C signal transmission, 0.0015 μrad sensor resolution, slotless, brushless 3-phase torque motor A-637.A100 PIglide RL rotation stage, air bearing, 300 mm motion platform diameter, low height, angle measuring system with sin/cos...