PIglide High-Precision Z Tip/Tilt Stage with Air Bearings High Performance • Cleanroom-Compatible • Low Profile A-523 ■ Travel range in Z to ±2.5 mm ■ Rotation range in 0X, 0Y to ±1° ■ Load capacity to 8 kg ■ Platform diameter 250 mm ■ Overall height 60 mm Product overview A-523 is an air bearing Z tip/tilt stage with direct drive. Designed as a parallel-kinematic multi-axis system, the platform can be used for Z and tip/tilt motion. This stage offers ultra-precision in miniature format. The combination of the noncontact components results in a frictionless motion platform that offers top performance, quality, and lifetime. When the A-523 is ordered together with a controller of the A-81x or A-82x series, PI carries out the configuration and cabling of the Z stage with applied servo tuning optimization and under applied load. You receive a complete, ready-to-use positioning system. Accessories and options ■ Air filter sets ■ Built-in vacuum clamping mechanism Application fields The Z tip/tilt stage is ideally suited for high-precision applications, such as wafer inspection, fiber positioning, optics positioning, flat screen inspection, maskless lithography, and ultra-LED manufacturing. The noncontact design is ideal for cleanroom applications.

Note on travel and rotation ranges: The travel range in Z and the rotation areas in θX and θY depend on each other. The values in the table show the maximum travel range for each axis, when all other axes are at the reference position. If one axis has reached its maximum position, movement of the other axes is not possible. Note on acceleration and velocity: The given values are valid in an unloaded state. Note on positioning accuracy: The calibrated accuracy can only be achieved with a controller-driven error compensation. The stage must be ordered with a controller from PI to reach these values....

TRAVEL CENTER MOTOR/ENCODER CONNECTOR STAGE MOUNTING SCREWS USER PAYLOAD MOUNTING HOLES A-523.25005B3, dimensions in mmWWW.PI.WS Page 4 08.09.2023

Order Information A-523.25005B3 PIglide high-precision Z tip/tilt stage with air bearings; ironless 3-phase linear motor; 5 mm travel range; 2 ° × 1.6 ° rotational angle (θX × θY); 80 N load capacity; 200 mm/s maximum velocity; absolute linear encoder, 1 nm sensor resolution, BiSS-C