PIglide HS Air Bearing Stage XY POSITIONING SYSTEM WITH 1 NM RESOLUTION A-322 Customizable according to requirements Travel ranges up to 500 mm x 1000 mm Load capacity 15 kg Resolution to 1 nm Velocity up to 1 m/ s, acceleration up to 1 g Straightness / flatness up to 0.25 µm Active error compensation Cleanroom compatible The PIglide HS planar air- bearing stage has been designed to maximize throughput while providing the ultimate level of precision. This stage is ideal for wafer inspection and scribing applications, as well as other ultra- precision motion applications such as flat panel inspection. Flexural coupling of the cross beam to the lower axis provides yaw- compliance without sacrificing system stiffness. The gantry axis cross beam incorporates dual linear motors and dual linear encoders. Ironless linear motors provide smooth motion and no cogging or attractive forces. Both incremental and absolute encoder options are available. The PIglide HS incorporates three high- accuracy linear encoders, one for the bridge axis and two for the gantry axis. The PIglide™ HS is coupled with industry- leading digital controls that offer superior servo update rates (up to 5 kHz), advanced control algorithms to improve dynamic performance and error compensation, and a wide suite of software development tools. © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Specifications Preliminary Data A-322 X- Axis (Upper Axis) A-322 Y- Axis (Lower Axis) Travel range Integrated sensor Optical linear encoder Optical linear encoder Sensor resolution Bidirectional repeatability Straightness / Flatness < 0.1 µm per 25 mm travel range, < ±1 overall travel range < 0.1 µm per 25 mm travel range, < ±1 overall travel range 150 ms with 10 mm step size accurate to ±0.1 µm 190 ms with 20 mm step size accurate to ±0.1 µm 262 ms with 50 mm step size accurate to ±0.1 µm Mechanical Properties Mass Moved mass Operating pressure Pure (filtered to 1,0 µm or better), oil free,...

Drawings / Images A-322, dimensions in mm © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws