PIglide MB Miniature Linear Air Bearing Stage HIGH PERFORMANCE, CLEANROOM COMPATIBLE, CUSTOMIZABLE A-141 Table size 57 mm × 83 mm Overall height 38 mm Travel lengths to 40 mm Max. payload 3.5 kg Non- contact fully preloaded air bearings Ironless cog- free linear motor Integral optical linear encoder Resolutions to 20 nm Velocity to 0.5 m/ sec Acceleration to 0.75 g The PIglide MB air bearing stage is linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. This stage offers ultra- precision in a miniature package. The combination of non- contact components results in a frictionless motion platform that offers the highest performance, quality, and life. This stage is ideally suited for many high precision applications, such as metrology, photonics alignment, optics positioning, and scanning. The non- contact design also makes these stages ideal for cleanroom applications. There are no moving electrical cables to manage. The air bearing offers a locking design for the ultimate in position stability. Air preparation kits Single or multi- axis motion controllers and servo drives XY stacks and custom configurations with precision alignment Counterbalance options for vertical (Z) orientations Customizations available Granite bases and vibration isolation systems © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Drive System Brushless ironless linear servo motor, 3- phase Feedback System Non- contact optical linear encoder with travel limits and home index Motor Force Constant Continuous Force Peak Force Motor Resistance (phase- to- phase) Motor Inductance (phase- to- phase) Maximum Acceleration (1) (unloaded) Accuracy (3) (with error compensation) <1µm TIR over full travel <1 arc- sec TIR over full travel Stage Mass Moving Mass Clean (filtered to 1.0 µm or better) - ISO 8573-1 Class 1; Oil- free - ISO 8573-1 Class 1; Dry (-15 °C dew point) - ISO 8573-1 Class 3 Hardcoat Aluminum / SS Fasteners (1) Maximum...

Drawings / Images © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice Latest releases available at www.pi.ws