PIglide AT1 Linear Air Bearing Stage HIGH PERFORMANCE SMALL DESIGN NANOPOSITIONING STAGE A-121 Ideal for scanning applications or ultra- precise positioning Clean room compatible Customer- specific adaptations can be provided Table size 115 mm × 115 mm Low profile 60 mm height The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non- contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The noncontact design also makes these stages ideal for cleanroom applications. A high- force linear motor can drive the stage to top speed within a few milliseconds. The dovetail preloaded air bearing design in this model will support normal, vertical, and side- mounted orientations. Multiple encoder options Air preparation kits Single or multi- axis motion controllers and servo drives XY stacks and custom configurations with precision alignment Cable track variations Counterbalance options for vertical orientation Customizations available Granite bases and vibration isolation systems © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Drive System Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Feedback System Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits...

Order Information A-121.050A1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 50 mm, Direct Position Measurement with Incremental Encoder (20 μm Grating Pitch, Sine (1 Vpp) Output), Bus Motor 48 VDC A-121.050B1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 50 mm, Absolute Encoder (1 nm Resolution, BiSS- C Serial Output), Bus Motor 48 VDC A-121.100A1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 100 mm, Direct Position Measurement with Incremental Encoder (20 μm Grating Pitch, Sine (1 Vpp) Output), Bus Motor 48 VDC A-121.100B1 PIglide AT1 Linear Motorized...

Drawings / Images © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Ordering example: line incremental © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice Latest releases available at www.pi.ws