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A-121

Product catalog summary

Overview: The PIglide AT1 series is a high-performance, compact linear air bearing stage designed for nanopositioning applications. It features a linear servo motor, preloaded air bearings, and an optical linear encoder, providing frictionless motion ideal for precision tasks in metrology, photonics, semiconductor inspection, and more. Its non-contact design is suitable for cleanroom environments.

Key Features:

High-force linear motor for rapid acceleration.
Dovetail preloaded air bearing supports multiple orientations.
Customizable with various encoder options, air preparation kits, and motion controllers.
Available in multiple travel ranges from 50 mm to 350 mm.

Specifications:

Drive System: Brushless ironless linear servo motor, 3-phase.
Feedback System: Non-contact optical linear encoder with travel limits and home index.
Motor Bus Voltage: 48 VDC nominal, 80 VDC max.
Motor Force: Continuous 11.1 N, Peak 33.2 N.
Maximum Velocity: 1 m/sec, Maximum Acceleration: 2 g (unloaded).
Accuracy: Uncompensated ±1.0 to ±3.0 µm, with error compensation ±0.50 to ±1.0 µm.
Repeatability: ±0.25 to ±0.50 µm.
Operating Pressure: 70±5 psi (485±35 kPa).
Air Quality: Clean, oil-free, and dry as per ISO 8573-1 standards.

Order Information: The stages are available with different encoder options and travel ranges. Examples include:

A-121.050A1: 50 mm travel, incremental encoder, 48 VDC motor.
A-121.100B1: 100 mm travel, absolute encoder, 48 VDC motor.

Alternate TTL encoder resolutions are available upon request.

Accessories and Related Products:

PIglide Air Preparation Kits.
Related products include various PIglide air bearing stages and systems for different applications.

Technology: PIglide Air Bearing Technology offers multi-axis motion with nanometer precision and no friction.

Catalog excerpts

PIglide AT1 Linear Air Bearing Stage HIGH PERFORMANCE SMALL DESIGN NANOPOSITIONING STAGE A-121 Ideal for scanning applications or ultra- precise positioning Clean room compatible Customer- specific adaptations can be provided Table size 115 mm × 115 mm Low profile 60 mm height The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non- contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The noncontact design also makes these stages ideal for cleanroom applications. A high- force linear motor can drive the stage to top speed within a few milliseconds. The dovetail preloaded air bearing design in this model will support normal, vertical, and side- mounted orientations. Multiple encoder options Air preparation kits Single or multi- axis motion controllers and servo drives XY stacks and custom configurations with precision alignment Cable track variations Counterbalance options for vertical orientation Customizations available Granite bases and vibration isolation systems © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

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Drive System Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Brushless ironless linear servo motor, 3- phase Feedback System Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits and home index Non- contact optical linear encoder with travel limits...

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Order Information A-121.050A1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 50 mm, Direct Position Measurement with Incremental Encoder (20 μm Grating Pitch, Sine (1 Vpp) Output), Bus Motor 48 VDC A-121.050B1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 50 mm, Absolute Encoder (1 nm Resolution, BiSS- C Serial Output), Bus Motor 48 VDC A-121.100A1 PIglide AT1 Linear Motorized Air Bearing Stage, Travel Range 100 mm, Direct Position Measurement with Incremental Encoder (20 μm Grating Pitch, Sine (1 Vpp) Output), Bus Motor 48 VDC A-121.100B1 PIglide AT1 Linear Motorized...

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Drawings / Images © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

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Ordering example: line incremental © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice Latest releases available at www.pi.ws

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All Physik Instrumente catalogs and technical brochures

*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.

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