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A-110

Product catalog summary

Overview
The PIglide LC Linear Air Bearing Stage is a high-performance, affordable nanopositioning system designed for precision applications. It features a magnetic linear motor, vacuum-preloaded air bearing, and optical linear encoder, ensuring non-contact and frictionless motion for high accuracy and reliability. It is suitable for cleanroom applications due to its frictionless motion that prevents particle formation.

Specifications

Travel Range: Available in 100 mm, 200 mm, 300 mm, and 400 mm.
Sensor: Integrated optical linear encoder with up to 1 nm resolution.
Positioning Accuracy: Ranges from ±2 µm to ±3 µm depending on the model.
Repeatability: ±1 µm typical bidirectional repeatability.
Velocity and Acceleration: Maximum velocity of 1000 mm/s and acceleration of 10 m/s².
Mechanical Properties: Mass ranges from 7.5 kg to 14 kg, with a moved mass of 2.6 kg.
Guiding: Utilizes air bearings with an operating pressure of 4.5 ± 0.3 bar.
Air Quality: Requires pure, oil-free, and dry air filtered to 1.0 µm or better.
Load Capacity: Maximum of 100 N.
Motor: Brushless linear servo motor, 3 phase, with a motor voltage of 80 V.

Applications
PIglide systems are ideal for high-precision applications such as metrology, photonics, precision scanning, and manufacturing of semiconductors or flat panel displays.

Accessories and Related Products
Available accessories include an air preparation kit and motion controllers. Related products include the A-311 PIglide IS Planar XY Air Bearing Stage and the A-322 PIglide HS Air Bearing Stage.

Technology
PIglide Air Bearing Technology offers multi-axis motion with nanometer precision and without friction.

Catalog excerpts

PIglide LC Linear Air Bearing Stage HIGH PERFORMANCE AFFORDABLE NANOPOSITIONING SYSTEM A-110 100 mm to 400 mm Travel Table size 160 mm x 200 mm Non- contact fully preloaded air bearings No exposed moving cables or air lines for travels up to 100 mm Integrated linear optical encoder PIglide Reference Class Linear Positioning Stage PIglide positioning systems have a magnetic linear motor, vacuum- preloaded air bearing and optical linear encoder: Non- contact and frictionless motion for the highest accuracy and reliability Air preparation kit, including pressure sensor. Single or multi- axis motion controller. Stacked XY systems on request. Additional accessories on request PIglide positioning systems are ideally suited for many high- precision applications, such as metrology, photonics and precision scanning as well as in semiconductor or flat panel display manufacturing. Thanks to the frictionless motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

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Specifications Preliminary Data Unit Tolerance Motion and Positioning Travel range Integrated sensor Optical linear encoder Optical linear encoder Optical linear encoder Optical linear encoder Sensor resolution Positioning accuracy Bidirectional repeatability Straightness / Flatness 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range Moved mass Operating pressure Pure (filtered to 1,0 Pure (filtered to 1,0 µm or Pure (filtered...

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Drawings / Images A-110, dimensions in mm © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

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