PIglide LC Linear Air Bearing Stage HIGH PERFORMANCE AFFORDABLE NANOPOSITIONING SYSTEM A-110 100 mm to 400 mm Travel Table size 160 mm x 200 mm Non- contact fully preloaded air bearings No exposed moving cables or air lines for travels up to 100 mm Integrated linear optical encoder PIglide Reference Class Linear Positioning Stage PIglide positioning systems have a magnetic linear motor, vacuum- preloaded air bearing and optical linear encoder: Non- contact and frictionless motion for the highest accuracy and reliability Air preparation kit, including pressure sensor. Single or multi- axis motion controller. Stacked XY systems on request. Additional accessories on request PIglide positioning systems are ideally suited for many high- precision applications, such as metrology, photonics and precision scanning as well as in semiconductor or flat panel display manufacturing. Thanks to the frictionless motion, no particles are formed, which makes PIglide stages ideal for cleanroom applications © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws

Specifications Preliminary Data Unit Tolerance Motion and Positioning Travel range Integrated sensor Optical linear encoder Optical linear encoder Optical linear encoder Optical linear encoder Sensor resolution Positioning accuracy Bidirectional repeatability Straightness / Flatness 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range 0.1 µm per 25 mm travel range, < ±1 overall travel range Moved mass Operating pressure Pure (filtered to 1,0 Pure (filtered to 1,0 µm or Pure (filtered...

Drawings / Images A-110, dimensions in mm © Physik Instrumente (PI) GmbH und Co. KG 2014. Subject to change without notice. Latest releases available at www.pi.ws