Vacuum measurement, Analysis, Leak detection (Part 3.2)
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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 1

PFEIFFER W^VACUUM Vacuum measurement, analysis, leak detection

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 2

Vacuum measurement, analysis, leak detection

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 3

3.2 Vacuum measurement, analysis, leak detection Vacuum solutions from a single source Know-how book Vacuum generation Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Rotary vane pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Diaphragm vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124 Screw pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ....

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 4

3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service Addresses sales Argentina Bermat S. A. Sales Agency Santiago Santiago T +56 2 231 8877 F +56 2 231 4294 bermat@bermat.cl Scitek Australia Pty. Ltd. Sales Agency/ServicePoint Sydney Sydney T +61 2 9420 0477 F +61 2 9418 3540 contact@scitek.com.au Hakuto Enterprises Ltd. Hong Kong T +852 2512 5717 F +852 2807 0511 pfeiffer@hakuto.com.hk SV Vacuumservice Oy Sales Agency Helsinki Helsinki T +358-9-774 55 30 F +358- 9 774 55 330 info@vacuumservice.fi Pfeiffer Vacuum (Shanghai) Co., Ltd. Shanghai T +86-(0)21-33933940 F...

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3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service South Africa Pfeiffer Vacuum Benelux B.V. Culemborg T +31 345 478 400 F +31 345 531 076 office@pfeiffer-vacuum.nl APP Machines Ltda. Sales Agency Bogotá Bogotá T +57 1 704 2311 F +57 1 703 8648 ingenieria@appmachines.com Air & Vacuum Technologies (Pty) Ltd. Gauteng T + 27 11 318 3240/5 F + 27 (0)86 522 9188 burnm@vactech.co.za Secotec S.A. Sales Agency Caracas Caracas T +58 212 573 8687 F +58 212 573 1932 secotec@cantv.net Macedonia (FYROM) SCAN, d.o.o., Preddvor Kranj, Slovenia T +386 4 27 50 200 F +386 4 27 50...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 6

3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service Addresses service Argentina Great Britain RUVAC S.R.L. ServicePoint Buenos Aires C. F. Buenos Aires T +54 11 4501 5129 F +54 11 4504 4122 ventas@ruvac.com.ar Pfeiffer Vacuum (Shanghai) Co., Ltd. ServiceCenter Shanghai Shanghai T +86-(0)21-33933940 F +86-(0)21-33933944 info@pfeiffer-vacuum.cn Pfeiffer Vacuum Ltd ServiceCenter Livingston Livingston T +44 1506 418000 F +44 1506 418002 sales@pfeiffer-vacuum.co.uk Hakuto Enterprises Ltd. ServicePoint Hong Kong Hong Kong T +852 2690 2543 F +852 2690 2034...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 7

3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service Pfeiffer Vacuum Italia S.p.A. ServiceCenter Agrate Agrate Brianza (MB) T +39 039 6899718 F +39 039 6899718 service.agrate@pfeiffer-vacuum.it Macedonia (FYROM) APVACUUM Sp.z o.o. ServicePoint Suchy Las, k. Poznania T +48 61 656 35 30 F +48 61 6100312 serwis@apvacuum.com Pfeiffer Vacuum Scandinavia AB ServiceCenter Stockholm Upplands Väsby T +46 8 590 748 15 F +46 8 590 748 88 service@pfeiffer-vacuum.se Pfeiffer Vacuum Italia S.p.A. ServiceCenter Roma Pomezia (RM) T +39 335 5284142...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 8

Measurement equipment Measurement equipment Vacuum gauges for all vacuum areas and applications

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 9

Measurement equipment Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10 DigiLine Piezo resistive transmitter CPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Piezo/Pirani...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 10

Measurement equipment Measurement equipment Vacuum gauges for all vacuum areas and applications Many vacuum applications operate only in a specific pressure range. Analog and digital total vacuum or pressure measurement instruments are used to measure and control the total pressure in a vacuum system. Pfeiffer Vacuum offers three different lines of total pressure gauges. The criteria for selecting a vacuum gauge are based upon various conditions: The pressure range to be detected Gas composition (inert or corrosive) Required accuracy and repeatability Ambient conditions such as ionizing...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 11

Semiconductors Coating Industry Overview of series and applications R&D Measuring equipment and controllers Pirani / Cold cathodes 22 Capacitative temperature compensated 36 Capacitive temperature controlled 38 Pirani / Cold cathode 54 Pirani / Bayard-Alpert Vacuum gauges Cold cathode Measurement equipment Electron microscopy Leak detection Mass spectrometry Surface analysis Plasma monitoring Residual gas analysis Lithography PVD (Physical Vapor Deposition) CVD (Chemical Vapor Deposition) Plasma etching Implantation – source Implantation – beamline Inspection Bonding MBE (Molecular Beam...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 12

Features at a glance Pressure range Ultra-high Measurement equipment 3.2 Vacuum measurement, analysis, leak detection / Measurement equipment Piezo resistive transmitter Pirani transmitter Pirani/Cold cathode transmitter Pirani/Bayard Alpert transmitter Gauges DigiLine ActiveLine Piezo transmitter Pirani/Capacitive transmitter Pirani transmitter Pirani/Bayard Alpert transmitter Capacitive transmitter Temperature compensated Capacitive transmitter Temperature controlled Cold cathode transmitter Pirani/Cold cathode transmitter ModulLine Pirani vacuum gauge Cold cathode transmitter Depending...

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 13

3.2 Vacuum measurement, analysis, leak detection / Measurement equipment Customer benefits ■ Easy integration ■ Secure data transmission ■ Proven long life

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 14

Measurement equipment DigiLine Innovative vacuum measurement for the digital age

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Vacuum measurement, Analysis, Leak detection (Part 3.2) - 15

DigiLine The DigiLine series is designed for industrial and research applications that need wiring that is easy to install and reliable. The series covers the entire technically relevant vacuum range with measuring principles encompassing Piezo, Pirani, and hot and cold cathode vacuum gauges. All transmitters have an RS-485 interface which can be used to connect up to 16 measuring points to a controller. An additional voltage outlet that is proportional to the pressure and two switch-points as well as Profibus and DeviceNet interfaces are available as options. Protection class IP 54 and DIN...

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